GB1169747A - Improvements in or relating to Sputtering Apparatus - Google Patents

Improvements in or relating to Sputtering Apparatus

Info

Publication number
GB1169747A
GB1169747A GB3423566A GB3423566A GB1169747A GB 1169747 A GB1169747 A GB 1169747A GB 3423566 A GB3423566 A GB 3423566A GB 3423566 A GB3423566 A GB 3423566A GB 1169747 A GB1169747 A GB 1169747A
Authority
GB
United Kingdom
Prior art keywords
electrodes
sputtered
sputtering
bias
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3423566A
Other languages
English (en)
Inventor
Leslie Arthur Holland
Tony Ian Putner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum International Ltd filed Critical Edwards High Vacuum International Ltd
Priority to GB3423566A priority Critical patent/GB1169747A/en
Priority to DE19671690684 priority patent/DE1690684A1/de
Priority to FR116165A priority patent/FR1539830A/fr
Publication of GB1169747A publication Critical patent/GB1169747A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
GB3423566A 1966-07-29 1966-07-29 Improvements in or relating to Sputtering Apparatus Expired GB1169747A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB3423566A GB1169747A (en) 1966-07-29 1966-07-29 Improvements in or relating to Sputtering Apparatus
DE19671690684 DE1690684A1 (de) 1966-07-29 1967-07-26 Verfahren und Vorrichtung zum Spruehen mit Hochfrequenz
FR116165A FR1539830A (fr) 1966-07-29 1967-07-28 Procédé et appareil pour l'électrodéposition de matière, ainsi que produits conformes à ceux obtenus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3423566A GB1169747A (en) 1966-07-29 1966-07-29 Improvements in or relating to Sputtering Apparatus

Publications (1)

Publication Number Publication Date
GB1169747A true GB1169747A (en) 1969-11-05

Family

ID=10363112

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3423566A Expired GB1169747A (en) 1966-07-29 1966-07-29 Improvements in or relating to Sputtering Apparatus

Country Status (2)

Country Link
DE (1) DE1690684A1 (de)
GB (1) GB1169747A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4116793A (en) * 1974-12-23 1978-09-26 Telic Corporation Glow discharge method and apparatus
US4591417A (en) * 1983-12-27 1986-05-27 Ford Motor Company Tandem deposition of cermets
DE3801309A1 (de) * 1988-01-19 1989-07-27 Leybold Ag Einrichtung fuer die regelung der targetgleichspannung und der biasgleichspannung von sputteranlagen
GB2396052A (en) * 2002-05-29 2004-06-09 Visteon Global Tech Inc Two electrode corona apparatus for plastic throttle body surface treatment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4116793A (en) * 1974-12-23 1978-09-26 Telic Corporation Glow discharge method and apparatus
US4591417A (en) * 1983-12-27 1986-05-27 Ford Motor Company Tandem deposition of cermets
DE3801309A1 (de) * 1988-01-19 1989-07-27 Leybold Ag Einrichtung fuer die regelung der targetgleichspannung und der biasgleichspannung von sputteranlagen
GB2396052A (en) * 2002-05-29 2004-06-09 Visteon Global Tech Inc Two electrode corona apparatus for plastic throttle body surface treatment
GB2396052B (en) * 2002-05-29 2004-11-17 Visteon Global Tech Inc Two-electrode corona apparatus and method for plastic throttle body surface treatment

Also Published As

Publication number Publication date
DE1690684A1 (de) 1972-02-03

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