GB1159704A - Method for Preparing a Semiconductor Surface for the Metallisation. - Google Patents

Method for Preparing a Semiconductor Surface for the Metallisation.

Info

Publication number
GB1159704A
GB1159704A GB29993/66A GB2999366A GB1159704A GB 1159704 A GB1159704 A GB 1159704A GB 29993/66 A GB29993/66 A GB 29993/66A GB 2999366 A GB2999366 A GB 2999366A GB 1159704 A GB1159704 A GB 1159704A
Authority
GB
United Kingdom
Prior art keywords
silicon
july
cleaned
plating
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB29993/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
CSF Compagnie Generale de Telegraphie sans Fil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSF Compagnie Generale de Telegraphie sans Fil SA filed Critical CSF Compagnie Generale de Telegraphie sans Fil SA
Publication of GB1159704A publication Critical patent/GB1159704A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/60Wet etching
    • H10P50/61Electrolytic etching
    • H10P50/613Electrolytic etching of Group IV materials
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/12Electroplating: Baths therefor from solutions of nickel or cobalt
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • H10P14/46Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials using a liquid
    • H10P14/47Electrolytic deposition, i.e. electroplating; Electroless plating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemically Coating (AREA)
GB29993/66A 1965-07-08 1966-07-04 Method for Preparing a Semiconductor Surface for the Metallisation. Expired GB1159704A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR23963A FR1449882A (fr) 1965-07-08 1965-07-08 Nouvelle méthode de préparation de l'état de surface de semi-conducteurs

Publications (1)

Publication Number Publication Date
GB1159704A true GB1159704A (en) 1969-07-30

Family

ID=8584094

Family Applications (1)

Application Number Title Priority Date Filing Date
GB29993/66A Expired GB1159704A (en) 1965-07-08 1966-07-04 Method for Preparing a Semiconductor Surface for the Metallisation.

Country Status (5)

Country Link
DE (1) DE1496765A1 (https=)
FR (1) FR1449882A (https=)
GB (1) GB1159704A (https=)
NL (1) NL6609525A (https=)
SE (1) SE343606B (https=)

Also Published As

Publication number Publication date
SE343606B (https=) 1972-03-13
DE1496765A1 (de) 1969-08-07
NL6609525A (https=) 1967-01-09
FR1449882A (fr) 1966-05-06

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees