GB1158888A - Improvements relating to Sputtering and Evaporation - Google Patents

Improvements relating to Sputtering and Evaporation

Info

Publication number
GB1158888A
GB1158888A GB26534/68A GB2653468A GB1158888A GB 1158888 A GB1158888 A GB 1158888A GB 26534/68 A GB26534/68 A GB 26534/68A GB 2653468 A GB2653468 A GB 2653468A GB 1158888 A GB1158888 A GB 1158888A
Authority
GB
United Kingdom
Prior art keywords
article
articles
surface portions
sputtering
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB26534/68A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1158888A publication Critical patent/GB1158888A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/169—Vacuum deposition, e.g. including molecular beam epitaxy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

1,158,888. Sputtering and vapour deposition. INTERNATIONAL BUSINESS MACHINES CORP. June 4, 1968 [June 15, 1967], No.26534/68. Heading C7F. An apparatus for sputter-cleaning surface portions of an article and evaporating material on to the cleaned surface portions comprises an ionization chamber with means for evacuating the chamber and means for inserting an ionizable gas therein, article support means mounted in said container for holding at least one article for successive sputter-cleaning and evaporation operations and arranged to be negatively biased during sputtering with respect to shield means located on opposite sides of said article support means arranged to shield said article support means from undesired sputtering and evaporation operations, said shield means being located within the "dark space" created during sputtering, heating means for heating the articles to a desired temperature level to permit evaporated material to be deposited on cleaned surface portions of said article, and material evaporation means for evaporating material on to the cleaned surface portions of said articles. In the embodiment shown in Fig. 1, part-spherical section 32 constitutes the holding means for articles 42, and the two shields are constituted by apertured sheets 22 and 74, which latter has in its apertures quartz plates 76 which permit radiation from heater assembly 78 to heat the articles. A tungsten holder 98 bearing the material 96 to be evaporated is heated by A. C. source 105. A specific type of substrate holder is described, and the deposition of Cr-Cu-Au on a semi-conductor is given as an example.
GB26534/68A 1967-06-15 1968-06-04 Improvements relating to Sputtering and Evaporation Expired GB1158888A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64624467A 1967-06-15 1967-06-15

Publications (1)

Publication Number Publication Date
GB1158888A true GB1158888A (en) 1969-07-23

Family

ID=24592318

Family Applications (1)

Application Number Title Priority Date Filing Date
GB26534/68A Expired GB1158888A (en) 1967-06-15 1968-06-04 Improvements relating to Sputtering and Evaporation

Country Status (5)

Country Link
US (1) US3507248A (en)
DE (1) DE1765582B1 (en)
FR (1) FR1558882A (en)
GB (1) GB1158888A (en)
NL (1) NL167204C (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2237311B1 (en) * 1973-07-12 1977-05-13 Ibm France
US4126530A (en) * 1977-08-04 1978-11-21 Telic Corporation Method and apparatus for sputter cleaning and bias sputtering
CH636647A5 (en) * 1979-02-01 1983-06-15 Balzers Hochvakuum VACUUM VAPORIZATION SYSTEM.
US4328257A (en) * 1979-11-26 1982-05-04 Electro-Plasma, Inc. System and method for plasma coating
DE2950997C2 (en) * 1979-12-18 1986-10-09 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Device for coating
US4448149A (en) * 1982-10-12 1984-05-15 International Business Machines Corporation Apparatus for removably mounting and supplying mechanical and electrical energy to a vacuum chamber substrate holder
US4877573A (en) * 1985-12-19 1989-10-31 Litton Systems, Inc. Substrate holder for wafers during MBE growth
US5690784A (en) * 1994-06-20 1997-11-25 International Business Machines Corporation Ion milling end point detection method and apparatus
WO2001034871A1 (en) * 1999-11-12 2001-05-17 Far West Electrochemical, Inc. Apparatus and method for performing simple chemical vapor deposition
US7390535B2 (en) * 2003-07-03 2008-06-24 Aeromet Technologies, Inc. Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings
TWI452163B (en) * 2010-04-08 2014-09-11 Hon Hai Prec Ind Co Ltd Plating apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB610529A (en) * 1945-09-07 1948-10-18 Edwards & Co London Ltd W Improvements in or relating to the coating of objects by cathodic disintegration
DE1143374B (en) * 1955-08-08 1963-02-07 Siemens Ag Process for removing the surface of a semiconductor crystal and subsequent contacting
US3087838A (en) * 1955-10-05 1963-04-30 Hupp Corp Methods of photoelectric cell manufacture
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
DE1083617B (en) * 1956-07-27 1960-06-15 Gen Motors Corp Process for producing porous surfaces on chromed cylinder liners of internal combustion engines

Also Published As

Publication number Publication date
US3507248A (en) 1970-04-21
FR1558882A (en) 1969-02-28
DE1765582B1 (en) 1971-12-16
NL167204B (en) 1981-06-16
NL6807988A (en) 1968-12-16
NL167204C (en) 1981-11-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee