GB1153372A - Improvements in or relating to Methods of Heat Treating Semiconductor Bodies. - Google Patents
Improvements in or relating to Methods of Heat Treating Semiconductor Bodies.Info
- Publication number
- GB1153372A GB1153372A GB2770366A GB2770366A GB1153372A GB 1153372 A GB1153372 A GB 1153372A GB 2770366 A GB2770366 A GB 2770366A GB 2770366 A GB2770366 A GB 2770366A GB 1153372 A GB1153372 A GB 1153372A
- Authority
- GB
- United Kingdom
- Prior art keywords
- heat treating
- plug
- relating
- methods
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/005—Oxydation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Formation Of Insulating Films (AREA)
Abstract
1,153,372. Muffles. ASSOCIATED SEMICONDUCTOR MFG. Ltd. 21 June, 1966, No. 27703/66. Heading F4B. [Also in Division H1] A muffle for heat treating semi-conductors, through which oxygen flows in the direction of the arrows for the oxidation of a silicon slice carried in a small silica tube 11, comprises coaxial silica tubes 1 and 3 sealed together at 6 and connected by three supports 7, a gas inlet 2, a gas outlet 5, a plug 8 with a conical port 9 for fitting into a conical socket 4, and a silica rod 10 mounted in the plug 8 and carrying the tube 11 and a thermocouple 12. The entire muffle is placed within an electrical heating element and suitable insulations. Germanium may be heat-treated in an Argon atmosphere in a similar furnace.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2770366A GB1153372A (en) | 1966-06-21 | 1966-06-21 | Improvements in or relating to Methods of Heat Treating Semiconductor Bodies. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2770366A GB1153372A (en) | 1966-06-21 | 1966-06-21 | Improvements in or relating to Methods of Heat Treating Semiconductor Bodies. |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1153372A true GB1153372A (en) | 1969-05-29 |
Family
ID=10263923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2770366A Expired GB1153372A (en) | 1966-06-21 | 1966-06-21 | Improvements in or relating to Methods of Heat Treating Semiconductor Bodies. |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1153372A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0062174A1 (en) * | 1981-04-06 | 1982-10-13 | International Business Machines Corporation | Apparatus treating specimens at raised temperatures |
GB2139744A (en) * | 1983-05-12 | 1984-11-14 | Norton Co | Apparatus for firing semiconductor elements |
-
1966
- 1966-06-21 GB GB2770366A patent/GB1153372A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0062174A1 (en) * | 1981-04-06 | 1982-10-13 | International Business Machines Corporation | Apparatus treating specimens at raised temperatures |
GB2139744A (en) * | 1983-05-12 | 1984-11-14 | Norton Co | Apparatus for firing semiconductor elements |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |