GB1151126A - A Drive Shaft and Supporting Assembly for a Vapor Source. - Google Patents

A Drive Shaft and Supporting Assembly for a Vapor Source.

Info

Publication number
GB1151126A
GB1151126A GB31852/67A GB3185267A GB1151126A GB 1151126 A GB1151126 A GB 1151126A GB 31852/67 A GB31852/67 A GB 31852/67A GB 3185267 A GB3185267 A GB 3185267A GB 1151126 A GB1151126 A GB 1151126A
Authority
GB
United Kingdom
Prior art keywords
seals
shaft
crucible
face
gears
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31852/67A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Publication of GB1151126A publication Critical patent/GB1151126A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
GB31852/67A 1966-07-13 1967-07-11 A Drive Shaft and Supporting Assembly for a Vapor Source. Expired GB1151126A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US564811A US3360600A (en) 1966-07-13 1966-07-13 Vapor source assembly

Publications (1)

Publication Number Publication Date
GB1151126A true GB1151126A (en) 1969-05-07

Family

ID=24255989

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31852/67A Expired GB1151126A (en) 1966-07-13 1967-07-11 A Drive Shaft and Supporting Assembly for a Vapor Source.

Country Status (10)

Country Link
US (1) US3360600A (https=)
AT (1) AT294511B (https=)
BE (1) BE701306A (https=)
CH (1) CH463232A (https=)
ES (1) ES342858A1 (https=)
GB (1) GB1151126A (https=)
LU (1) LU53955A1 (https=)
NL (1) NL6709464A (https=)
NO (1) NO127425B (https=)
SE (1) SE335269B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3613633A (en) * 1970-03-18 1971-10-19 Schjeldahl Co G T Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
DE2519537C2 (de) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen
DE3228311C2 (de) * 1982-07-29 1984-07-05 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel für Vakuum-Aufdampfanlagen
KR101785562B1 (ko) * 2010-10-18 2017-10-18 삼성디스플레이 주식회사 연속 증착이 가능한 박막 증착 장치 및 그 박막 증착 장치에 사용되는 마스크유닛과 도가니유닛

Also Published As

Publication number Publication date
DE1621203B2 (de) 1972-12-28
US3360600A (en) 1967-12-26
NL6709464A (https=) 1968-01-15
BE701306A (https=) 1967-12-18
AT294511B (de) 1971-11-25
DE1621203A1 (de) 1971-06-03
ES342858A1 (es) 1968-08-16
LU53955A1 (https=) 1967-08-28
CH463232A (de) 1968-09-30
SE335269B (https=) 1971-05-17
NO127425B (https=) 1973-06-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees