GB1151126A - A Drive Shaft and Supporting Assembly for a Vapor Source. - Google Patents

A Drive Shaft and Supporting Assembly for a Vapor Source.

Info

Publication number
GB1151126A
GB1151126A GB31852/67A GB3185267A GB1151126A GB 1151126 A GB1151126 A GB 1151126A GB 31852/67 A GB31852/67 A GB 31852/67A GB 3185267 A GB3185267 A GB 3185267A GB 1151126 A GB1151126 A GB 1151126A
Authority
GB
United Kingdom
Prior art keywords
seals
shaft
crucible
face
gears
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31852/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Publication of GB1151126A publication Critical patent/GB1151126A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

1,151,126. Mechanical seals. AIR REDUCTION CO. Inc. 11 July, 1967 [13 July, 1966], No. 31852/67. Heading F2B. [Also in Division F4] The shaft and supporting assembly for a crucible 14 of a vapour deposition apparatus operating under vacuum is provided with seals spaced along the shaft for maintaining regions of different pressures, the seals including seals 101, 107 adjacent the low pressure regions at the ends of the shaft, each of which comprises a pair of spaced seals, i.e. 109 and 111 at the crucible end and 171, 169 at the other end, evacuated by pumps 132, 198. As shown diagrammatically, the seals are of the face type and the crucible is carried by a hollow shaft 26 driven by bevel gears 65, 69 in a housing 47, the evaporant material (e.g. wire) being fed by rollers 97 to the crucible where it is vaporized by electron beams. Face seals 103, 105 define with the end seals 101, 107 a lubricating chamber for the gears and bearings having an oil inlet 128 and an outlet 130, and a cooling chamber for the crucible having a water inlet 161 and an outlet 165. Leakage of water may be drained through a vent 201. As illustrated in Fig. 2 (not shown), two of the end seals (107) are pressed by coil springs (189), (191) towards a rotary ring (181) having face seals mounted thereon by means of rubber seal elements (186), (188) and sealed to the shaft by an 0-ring (183); also illustrated is a face seal (79) around the driving-shaft (71) for the gears comprising a fixed seal (82) mounted by a rubber seal element (95) and a movable ring which is sealed to the shaft by a sleeve (75) and urged into sealing engagement by a coil spring.
GB31852/67A 1966-07-13 1967-07-11 A Drive Shaft and Supporting Assembly for a Vapor Source. Expired GB1151126A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US564811A US3360600A (en) 1966-07-13 1966-07-13 Vapor source assembly

Publications (1)

Publication Number Publication Date
GB1151126A true GB1151126A (en) 1969-05-07

Family

ID=24255989

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31852/67A Expired GB1151126A (en) 1966-07-13 1967-07-11 A Drive Shaft and Supporting Assembly for a Vapor Source.

Country Status (10)

Country Link
US (1) US3360600A (en)
AT (1) AT294511B (en)
BE (1) BE701306A (en)
CH (1) CH463232A (en)
ES (1) ES342858A1 (en)
GB (1) GB1151126A (en)
LU (1) LU53955A1 (en)
NL (1) NL6709464A (en)
NO (1) NO127425B (en)
SE (1) SE335269B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3613633A (en) * 1970-03-18 1971-10-19 Schjeldahl Co G T Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
DE2519537C2 (en) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Electron beam device for heating, melting and evaporation purposes with deflection systems
DE3228311C2 (en) * 1982-07-29 1984-07-05 Leybold-Heraeus GmbH, 5000 Köln Evaporation crucible for vacuum evaporation systems
KR101785562B1 (en) * 2010-10-18 2017-10-18 삼성디스플레이 주식회사 Thin film depositing apparatus for continuous depositing and mask unit and crucible unit included in the thin film depositing apparatus

Also Published As

Publication number Publication date
CH463232A (en) 1968-09-30
LU53955A1 (en) 1967-08-28
DE1621203A1 (en) 1971-06-03
NO127425B (en) 1973-06-18
NL6709464A (en) 1968-01-15
BE701306A (en) 1967-12-18
AT294511B (en) 1971-11-25
DE1621203B2 (en) 1972-12-28
SE335269B (en) 1971-05-17
US3360600A (en) 1967-12-26
ES342858A1 (en) 1968-08-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees