SE335269B - - Google Patents
Info
- Publication number
- SE335269B SE335269B SE09709/67*A SE970967A SE335269B SE 335269 B SE335269 B SE 335269B SE 970967 A SE970967 A SE 970967A SE 335269 B SE335269 B SE 335269B
- Authority
- SE
- Sweden
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Medicines Containing Material From Animals Or Micro-Organisms (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US564811A US3360600A (en) | 1966-07-13 | 1966-07-13 | Vapor source assembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE335269B true SE335269B (xx) | 1971-05-17 |
Family
ID=24255989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE09709/67*A SE335269B (xx) | 1966-07-13 | 1967-06-29 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3360600A (xx) |
| AT (1) | AT294511B (xx) |
| BE (1) | BE701306A (xx) |
| CH (1) | CH463232A (xx) |
| ES (1) | ES342858A1 (xx) |
| GB (1) | GB1151126A (xx) |
| LU (1) | LU53955A1 (xx) |
| NL (1) | NL6709464A (xx) |
| NO (1) | NO127425B (xx) |
| SE (1) | SE335269B (xx) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3502499A (en) * | 1967-05-22 | 1970-03-24 | Texas Instruments Inc | Cladding method and apparatus |
| US3613633A (en) * | 1970-03-18 | 1971-10-19 | Schjeldahl Co G T | Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible |
| US4048462A (en) * | 1975-01-17 | 1977-09-13 | Airco, Inc. | Compact rotary evaporation source |
| DE2519537C2 (de) * | 1975-05-02 | 1982-11-04 | Leybold-Heraeus GmbH, 5000 Köln | Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen |
| DE3228311C2 (de) * | 1982-07-29 | 1984-07-05 | Leybold-Heraeus GmbH, 5000 Köln | Verdampfertiegel für Vakuum-Aufdampfanlagen |
| KR101785562B1 (ko) * | 2010-10-18 | 2017-10-18 | 삼성디스플레이 주식회사 | 연속 증착이 가능한 박막 증착 장치 및 그 박막 증착 장치에 사용되는 마스크유닛과 도가니유닛 |
-
1966
- 1966-07-13 US US564811A patent/US3360600A/en not_active Expired - Lifetime
-
1967
- 1967-06-26 LU LU53955D patent/LU53955A1/xx unknown
- 1967-06-27 NO NO00168765A patent/NO127425B/no unknown
- 1967-06-29 SE SE09709/67*A patent/SE335269B/xx unknown
- 1967-07-07 NL NL6709464A patent/NL6709464A/xx unknown
- 1967-07-10 AT AT642667A patent/AT294511B/de not_active IP Right Cessation
- 1967-07-10 ES ES342858A patent/ES342858A1/es not_active Expired
- 1967-07-11 GB GB31852/67A patent/GB1151126A/en not_active Expired
- 1967-07-12 CH CH993667A patent/CH463232A/de unknown
- 1967-07-13 BE BE701306D patent/BE701306A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1621203B2 (de) | 1972-12-28 |
| LU53955A1 (xx) | 1967-08-28 |
| DE1621203A1 (de) | 1971-06-03 |
| NL6709464A (xx) | 1968-01-15 |
| BE701306A (xx) | 1967-12-18 |
| US3360600A (en) | 1967-12-26 |
| NO127425B (xx) | 1973-06-18 |
| CH463232A (de) | 1968-09-30 |
| GB1151126A (en) | 1969-05-07 |
| AT294511B (de) | 1971-11-25 |
| ES342858A1 (es) | 1968-08-16 |