GB1148188A - Process for obtaining thin layers of a product by evaporation in vacuo - Google Patents

Process for obtaining thin layers of a product by evaporation in vacuo

Info

Publication number
GB1148188A
GB1148188A GB238267A GB238267A GB1148188A GB 1148188 A GB1148188 A GB 1148188A GB 238267 A GB238267 A GB 238267A GB 238267 A GB238267 A GB 238267A GB 1148188 A GB1148188 A GB 1148188A
Authority
GB
United Kingdom
Prior art keywords
vacuo
evaporation
product
thin layers
obtaining thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB238267A
Inventor
Igor Melnick
Bernard Pruniaux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1148188A publication Critical patent/GB1148188A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

1,148,188. Depositing alumina. COMMISSARIAT A L'ENERGIE ATOMIQUE. 17 Jan., 1967 [18 Jan., 1966], No. 2382/67. Heading C1A. [Also in Division C7] Material, e.g. aluminium, in a crucible 7, is evaporated on to a heated substrate through a funnel 18 to which a gaseous oxidizing agent, e.g. water vapour or oxygen, is supplied to deposit layers of aluminium oxide.
GB238267A 1966-01-18 1967-01-17 Process for obtaining thin layers of a product by evaporation in vacuo Expired GB1148188A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR46341 1966-01-18

Publications (1)

Publication Number Publication Date
GB1148188A true GB1148188A (en) 1969-04-10

Family

ID=8599048

Family Applications (1)

Application Number Title Priority Date Filing Date
GB238267A Expired GB1148188A (en) 1966-01-18 1967-01-17 Process for obtaining thin layers of a product by evaporation in vacuo

Country Status (5)

Country Link
BE (1) BE691418A (en)
CH (1) CH467873A (en)
ES (1) ES335297A1 (en)
GB (1) GB1148188A (en)
LU (1) LU52832A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308921A1 (en) * 1975-04-25 1976-11-19 Anvar Strain gauge with high mechanical strength - consists of steel substrate, alumina insulating layer and a metal layer
DE3627151A1 (en) * 1986-08-11 1988-02-18 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR REACTIVELY EVAPORATING METAL COMPOUNDS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308921A1 (en) * 1975-04-25 1976-11-19 Anvar Strain gauge with high mechanical strength - consists of steel substrate, alumina insulating layer and a metal layer
DE3627151A1 (en) * 1986-08-11 1988-02-18 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR REACTIVELY EVAPORATING METAL COMPOUNDS

Also Published As

Publication number Publication date
ES335297A1 (en) 1968-08-16
CH467873A (en) 1969-01-31
LU52832A1 (en) 1967-03-17
BE691418A (en) 1967-05-29

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