GB1369749A - Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible - Google Patents

Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible

Info

Publication number
GB1369749A
GB1369749A GB3155072A GB3155072A GB1369749A GB 1369749 A GB1369749 A GB 1369749A GB 3155072 A GB3155072 A GB 3155072A GB 3155072 A GB3155072 A GB 3155072A GB 1369749 A GB1369749 A GB 1369749A
Authority
GB
United Kingdom
Prior art keywords
crucible
mandrel
tungsten
sourve
vaporizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3155072A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1369749A publication Critical patent/GB1369749A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4998—Combined manufacture including applying or shaping of fluent material
    • Y10T29/49982—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

1369749 Making crucibles THOMSON-CSF 5 July 1972 [6 July 1971] 31550/72 Heading B3A [Also in Divisions F4 and H1] A tungsten crucible is manufactured by machining a copper mandrel M having external dimensions corresponding to the internal dimensions of the crucible C, depositing tungsten on the mandrel by pyrolysis, and dissolving the mandrel in nitric acid. The tungsten is deposited by evacuating a quartz tube containing the mandrel M, introducing hydrogen into the quartz tube and heating to 600‹ C. Tungsten hexafluoride is then introduced into the tuba and tungsten is deposited on the mandrel due to reaction between the tungsten hexafluoride and the hydrogen. A second opening 5 is drilled in the crucible opposite the opening 4 left by the mandrel support-member 11.
GB3155072A 1971-07-06 1972-07-05 Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible Expired GB1369749A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7124682A FR2145012A5 (en) 1971-07-06 1971-07-06

Publications (1)

Publication Number Publication Date
GB1369749A true GB1369749A (en) 1974-10-09

Family

ID=9079898

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3155072A Expired GB1369749A (en) 1971-07-06 1972-07-05 Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible

Country Status (5)

Country Link
US (1) US3789253A (en)
DE (1) DE2233275A1 (en)
FR (1) FR2145012A5 (en)
GB (1) GB1369749A (en)
NL (1) NL7209307A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146836A (en) * 1983-08-12 1985-04-24 Centre Nat Rech Scient A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719355A (en) * 1986-04-10 1988-01-12 Texas Instruments Incorporated Ion source for an ion implanter
US4791273A (en) * 1987-05-15 1988-12-13 Varian Associates, Inc. Vaporizer system for ion source
DE19835512C1 (en) * 1998-08-06 1999-12-16 Daimlerchrysler Aerospace Ag Ion engine designed as an electrostatic motor switched on by positive voltage
JP3485104B2 (en) * 2001-04-24 2004-01-13 日新電機株式会社 Oven for ion source

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1585902A (en) * 1968-04-09 1970-02-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146836A (en) * 1983-08-12 1985-04-24 Centre Nat Rech Scient A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

Also Published As

Publication number Publication date
US3789253A (en) 1974-01-29
NL7209307A (en) 1973-01-09
FR2145012A5 (en) 1973-02-16
DE2233275A1 (en) 1973-01-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee