GB1135290A - Improvements in or relating to electron beam apparatus - Google Patents

Improvements in or relating to electron beam apparatus

Info

Publication number
GB1135290A
GB1135290A GB23277/66A GB2327766A GB1135290A GB 1135290 A GB1135290 A GB 1135290A GB 23277/66 A GB23277/66 A GB 23277/66A GB 2327766 A GB2327766 A GB 2327766A GB 1135290 A GB1135290 A GB 1135290A
Authority
GB
United Kingdom
Prior art keywords
polepieces
field
strength
constant
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB23277/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Publication of GB1135290A publication Critical patent/GB1135290A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
GB23277/66A 1965-06-18 1966-05-25 Improvements in or relating to electron beam apparatus Expired GB1135290A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US46496865A 1965-06-18 1965-06-18

Publications (1)

Publication Number Publication Date
GB1135290A true GB1135290A (en) 1968-12-04

Family

ID=23846005

Family Applications (1)

Application Number Title Priority Date Filing Date
GB23277/66A Expired GB1135290A (en) 1965-06-18 1966-05-25 Improvements in or relating to electron beam apparatus

Country Status (10)

Country Link
US (1) US3420977A (enExample)
AT (1) AT285193B (enExample)
BE (1) BE682211A (enExample)
CH (1) CH452732A (enExample)
DE (1) DE1565880A1 (enExample)
DK (1) DK121914B (enExample)
GB (1) GB1135290A (enExample)
LU (1) LU51327A1 (enExample)
NL (1) NL6608483A (enExample)
SE (1) SE336728B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194384A (en) * 1986-07-16 1988-03-02 Boc Group Inc Vapor source assembly with adjustable magnetic pole

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710072A (en) * 1971-05-10 1973-01-09 Airco Inc Vapor source assembly
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
IT1037702B (it) * 1975-04-29 1979-11-20 Varian Associates Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico
US4064352A (en) * 1976-02-17 1977-12-20 Varian Associates, Inc. Electron beam evaporator having beam spot control
US4153005A (en) * 1977-07-06 1979-05-08 United Technologies Corporation Multiple electron beam vacuum vapor deposition apparatus
WO1981003104A1 (fr) * 1980-04-25 1981-10-29 A Ivanov Dispositif d'irradiation d'objets a l'aide de rayons cathodiques
DE3916787C2 (de) * 1989-05-23 1994-01-20 Balzers Hochvakuum Verfahren und Anordnung zur Steuerung der Bündelung eines Strahls monopolar geladener Partikel und Anwendung
DE3921040C2 (de) * 1989-06-27 1994-03-10 Balzers Hochvakuum Verfahren und Anordnung zum Steuern der Verdampfung von Material von einem Zielobjekt durch einen Strahl geladener Teilchen und Verwendung, sowie Verfahren und Meßanordnung zum selektiven Messen einer verdampften Partikelmenge zur Durchführung des Verfahrens
US5111022A (en) * 1989-08-23 1992-05-05 Tfi Telemark Cooling system for electron beam gun and method
DE3929475A1 (de) * 1989-09-05 1991-03-14 Balzers Hochvakuum Verfahren und vorrichtung zur umlenkung eines strahls
US4983806A (en) * 1990-03-01 1991-01-08 Harper James L Method and device for cooling electron beam gun
TW490714B (en) * 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
US20020011205A1 (en) 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US8891583B2 (en) 2000-11-15 2014-11-18 Ati Properties, Inc. Refining and casting apparatus and method
US6496529B1 (en) * 2000-11-15 2002-12-17 Ati Properties, Inc. Refining and casting apparatus and method
US7578960B2 (en) 2005-09-22 2009-08-25 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US7803212B2 (en) * 2005-09-22 2010-09-28 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US7803211B2 (en) * 2005-09-22 2010-09-28 Ati Properties, Inc. Method and apparatus for producing large diameter superalloy ingots
US8381047B2 (en) * 2005-11-30 2013-02-19 Microsoft Corporation Predicting degradation of a communication channel below a threshold based on data transmission errors
US8642916B2 (en) * 2007-03-30 2014-02-04 Ati Properties, Inc. Melting furnace including wire-discharge ion plasma electron emitter
US8748773B2 (en) 2007-03-30 2014-06-10 Ati Properties, Inc. Ion plasma electron emitters for a melting furnace
US7798199B2 (en) 2007-12-04 2010-09-21 Ati Properties, Inc. Casting apparatus and method
US8747956B2 (en) 2011-08-11 2014-06-10 Ati Properties, Inc. Processes, systems, and apparatus for forming products from atomized metals and alloys

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177535A (en) * 1960-06-21 1965-04-13 Stauffer Chemical Co Electron beam furnace with low beam source
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons
NL287742A (enExample) * 1962-01-15
BE634652A (enExample) * 1962-07-09
US3202794A (en) * 1963-02-18 1965-08-24 Thermionics Lab Inc Permanent magnet transverse electron beam evaporation source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194384A (en) * 1986-07-16 1988-03-02 Boc Group Inc Vapor source assembly with adjustable magnetic pole
GB2194384B (en) * 1986-07-16 1991-02-13 Boc Group Inc Vapor source assembly with adjustable magnetic pole pieces

Also Published As

Publication number Publication date
DK121914B (da) 1971-12-20
US3420977A (en) 1969-01-07
AT285193B (de) 1970-10-12
DE1565880A1 (de) 1970-02-26
SE336728B (enExample) 1971-07-12
LU51327A1 (enExample) 1966-08-16
BE682211A (enExample) 1966-11-14
NL6608483A (enExample) 1966-12-19
CH452732A (de) 1968-03-15

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