IT1037702B - Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico - Google Patents

Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico

Info

Publication number
IT1037702B
IT1037702B IT22825/75A IT2282575A IT1037702B IT 1037702 B IT1037702 B IT 1037702B IT 22825/75 A IT22825/75 A IT 22825/75A IT 2282575 A IT2282575 A IT 2282575A IT 1037702 B IT1037702 B IT 1037702B
Authority
IT
Italy
Prior art keywords
electronic beam
beam heating
evaporation equipment
evaporation
equipment
Prior art date
Application number
IT22825/75A
Other languages
English (en)
Inventor
Negri Sergio
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Priority to IT22825/75A priority Critical patent/IT1037702B/it
Priority to US05/680,009 priority patent/US4035573A/en
Application granted granted Critical
Publication of IT1037702B publication Critical patent/IT1037702B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
IT22825/75A 1975-04-29 1975-04-29 Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico IT1037702B (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT22825/75A IT1037702B (it) 1975-04-29 1975-04-29 Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico
US05/680,009 US4035573A (en) 1975-04-29 1976-04-26 Electron beam heating apparatus having means for sweeping the beam spot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT22825/75A IT1037702B (it) 1975-04-29 1975-04-29 Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico

Publications (1)

Publication Number Publication Date
IT1037702B true IT1037702B (it) 1979-11-20

Family

ID=11200875

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22825/75A IT1037702B (it) 1975-04-29 1975-04-29 Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico

Country Status (2)

Country Link
US (1) US4035573A (it)
IT (1) IT1037702B (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3339131A1 (de) * 1983-10-28 1985-05-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlverdampfer mit mindestens zwei magnetischen ablenksystemen
US5012064A (en) * 1990-06-29 1991-04-30 The Boc Group, Inc. Electron beam evaporation source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3394217A (en) * 1965-06-11 1968-07-23 Air Reduction Method and apparatus for controlling plural electron beams
US3420977A (en) * 1965-06-18 1969-01-07 Air Reduction Electron beam apparatus
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field

Also Published As

Publication number Publication date
US4035573A (en) 1977-07-12

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