FR2327637A1 - Evaporateur a faisceau electronique - Google Patents

Evaporateur a faisceau electronique

Info

Publication number
FR2327637A1
FR2327637A1 FR7630197A FR7630197A FR2327637A1 FR 2327637 A1 FR2327637 A1 FR 2327637A1 FR 7630197 A FR7630197 A FR 7630197A FR 7630197 A FR7630197 A FR 7630197A FR 2327637 A1 FR2327637 A1 FR 2327637A1
Authority
FR
France
Prior art keywords
electronic beam
beam evaporator
evaporator
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7630197A
Other languages
English (en)
Other versions
FR2327637B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2327637A1 publication Critical patent/FR2327637A1/fr
Application granted granted Critical
Publication of FR2327637B1 publication Critical patent/FR2327637B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7630197A 1975-10-07 1976-10-07 Evaporateur a faisceau electronique Granted FR2327637A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2544725A DE2544725C3 (de) 1975-10-07 1975-10-07 Elektronenstrahlverdampfer

Publications (2)

Publication Number Publication Date
FR2327637A1 true FR2327637A1 (fr) 1977-05-06
FR2327637B1 FR2327637B1 (fr) 1982-04-09

Family

ID=5958462

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7630197A Granted FR2327637A1 (fr) 1975-10-07 1976-10-07 Evaporateur a faisceau electronique

Country Status (9)

Country Link
US (1) US4115653A (fr)
JP (1) JPS5246384A (fr)
BE (1) BE847029A (fr)
CH (1) CH621580A5 (fr)
DE (1) DE2544725C3 (fr)
FR (1) FR2327637A1 (fr)
GB (1) GB1516773A (fr)
LU (1) LU75884A1 (fr)
NL (1) NL7611034A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195438U (ja) * 1982-06-22 1983-12-26 日本電気株式会社 集積回路の輸送車
JPS59133663U (ja) * 1983-02-23 1984-09-07 日本電気ホームエレクトロニクス株式会社 電子ビ−ム蒸着装置
US4620081A (en) * 1984-08-03 1986-10-28 The United States Of America As Represented By The United States Department Of Energy Self-contained hot-hollow cathode gun source assembly
JPH0417281Y2 (fr) * 1984-08-31 1992-04-17
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.
JPS6119502A (ja) * 1985-06-19 1986-01-28 Matsushita Electric Ind Co Ltd スピンドル装置
US4983806A (en) * 1990-03-01 1991-01-08 Harper James L Method and device for cooling electron beam gun
US5473627A (en) * 1992-11-05 1995-12-05 Mdc Vacuum Products Corporation UHV rotating fluid delivery system
US5338913A (en) * 1992-12-28 1994-08-16 Tfi Telemark Electron beam gun with liquid cooled rotatable crucible
DE19623701A1 (de) 1996-06-14 1997-12-18 Leybold Systems Gmbh Vorrichtung und Verfahren zum Elektronenstrahlverdampfen
TW591202B (en) * 2001-10-26 2004-06-11 Hermosa Thin Film Co Ltd Dynamic film thickness control device/method and ITS coating method
DE102018108726B4 (de) * 2018-04-12 2019-11-07 VON ARDENNE Asset GmbH & Co. KG Elektronenstrahlverdampfer und Verfahren zum Verdampfen eines Verdampfungsguts mittels eines Elektronenstrahls
CN111855579B (zh) * 2019-04-28 2024-06-11 核工业理化工程研究院 一种碱金属原子蒸气吸收池及其光谱测量方法
CN110797242B (zh) * 2019-11-04 2022-06-10 中国航空制造技术研究院 一种用于镀膜的冷阴极电子枪装置
EP3840012A1 (fr) * 2019-12-20 2021-06-23 Essilor International Ensemble de creuset optimisé et procédé de dépôt physique en phase vapeur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB875399A (en) * 1958-12-04 1961-08-16 Ass Elect Ind Electron beam furnace
DE1521174B2 (de) * 1965-11-26 1973-07-19 Balzers Hochvakuum Gmbh, 6000 Frankfurt Verfahren zur thermischen verdampfung eines stoffgemisches im vakuum
DE2206995A1 (de) * 1972-02-15 1973-08-23 Leybold Heraeus Gmbh & Co Kg Vorrichtung zum erwaermen von stoffen mittels gebuendelter elektronenstrahlen im vakuum

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
US3250842A (en) * 1963-01-15 1966-05-10 Atomic Energy Commission Electron beam zone refining
JPS4517178Y1 (fr) * 1967-06-14 1970-07-15
DE1797031A1 (de) * 1968-08-06 1971-07-01 Bosch Photokino Gmbh Elektrisch angetriebene Laufbildkamera

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB875399A (en) * 1958-12-04 1961-08-16 Ass Elect Ind Electron beam furnace
DE1521174B2 (de) * 1965-11-26 1973-07-19 Balzers Hochvakuum Gmbh, 6000 Frankfurt Verfahren zur thermischen verdampfung eines stoffgemisches im vakuum
DE2206995A1 (de) * 1972-02-15 1973-08-23 Leybold Heraeus Gmbh & Co Kg Vorrichtung zum erwaermen von stoffen mittels gebuendelter elektronenstrahlen im vakuum

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EXBK/75 *
EXRV/68 *

Also Published As

Publication number Publication date
US4115653A (en) 1978-09-19
CH621580A5 (fr) 1981-02-13
BE847029A (fr) 1977-01-31
NL7611034A (nl) 1977-04-13
DE2544725B2 (de) 1980-04-17
DE2544725C3 (de) 1981-01-08
FR2327637B1 (fr) 1982-04-09
LU75884A1 (fr) 1977-05-11
GB1516773A (en) 1978-07-05
JPS5246384A (en) 1977-04-13
DE2544725A1 (de) 1977-04-21

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