BE847029A - Vaporisateur a faisceau electronique, - Google Patents

Vaporisateur a faisceau electronique,

Info

Publication number
BE847029A
BE847029A BE171306A BE171306A BE847029A BE 847029 A BE847029 A BE 847029A BE 171306 A BE171306 A BE 171306A BE 171306 A BE171306 A BE 171306A BE 847029 A BE847029 A BE 847029A
Authority
BE
Belgium
Prior art keywords
electronic beam
beam vaporizer
vaporizer
electronic
Prior art date
Application number
BE171306A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE847029A publication Critical patent/BE847029A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
BE171306A 1975-10-07 1976-10-07 Vaporisateur a faisceau electronique, BE847029A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2544725A DE2544725C3 (de) 1975-10-07 1975-10-07 Elektronenstrahlverdampfer

Publications (1)

Publication Number Publication Date
BE847029A true BE847029A (fr) 1977-01-31

Family

ID=5958462

Family Applications (1)

Application Number Title Priority Date Filing Date
BE171306A BE847029A (fr) 1975-10-07 1976-10-07 Vaporisateur a faisceau electronique,

Country Status (9)

Country Link
US (1) US4115653A (fr)
JP (1) JPS5246384A (fr)
BE (1) BE847029A (fr)
CH (1) CH621580A5 (fr)
DE (1) DE2544725C3 (fr)
FR (1) FR2327637A1 (fr)
GB (1) GB1516773A (fr)
LU (1) LU75884A1 (fr)
NL (1) NL7611034A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110373635A (zh) * 2018-04-12 2019-10-25 冯·阿登纳资产股份有限公司 电子束蒸镀器和用于借助电子束对蒸镀物进行蒸镀的方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195438U (ja) * 1982-06-22 1983-12-26 日本電気株式会社 集積回路の輸送車
JPS59133663U (ja) * 1983-02-23 1984-09-07 日本電気ホームエレクトロニクス株式会社 電子ビ−ム蒸着装置
US4620081A (en) * 1984-08-03 1986-10-28 The United States Of America As Represented By The United States Department Of Energy Self-contained hot-hollow cathode gun source assembly
JPH0417281Y2 (fr) * 1984-08-31 1992-04-17
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.
JPS6119502A (ja) * 1985-06-19 1986-01-28 Matsushita Electric Ind Co Ltd スピンドル装置
US4983806A (en) * 1990-03-01 1991-01-08 Harper James L Method and device for cooling electron beam gun
US5473627A (en) * 1992-11-05 1995-12-05 Mdc Vacuum Products Corporation UHV rotating fluid delivery system
US5338913A (en) * 1992-12-28 1994-08-16 Tfi Telemark Electron beam gun with liquid cooled rotatable crucible
DE19623701A1 (de) * 1996-06-14 1997-12-18 Leybold Systems Gmbh Vorrichtung und Verfahren zum Elektronenstrahlverdampfen
TW591202B (en) * 2001-10-26 2004-06-11 Hermosa Thin Film Co Ltd Dynamic film thickness control device/method and ITS coating method
CN111855579B (zh) * 2019-04-28 2024-06-11 核工业理化工程研究院 一种碱金属原子蒸气吸收池及其光谱测量方法
CN110797242B (zh) * 2019-11-04 2022-06-10 中国航空制造技术研究院 一种用于镀膜的冷阴极电子枪装置
EP3840012A1 (fr) * 2019-12-20 2021-06-23 Essilor International Ensemble de creuset optimisé et procédé de dépôt physique en phase vapeur

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
GB875399A (en) * 1958-12-04 1961-08-16 Ass Elect Ind Electron beam furnace
US3250842A (en) * 1963-01-15 1966-05-10 Atomic Energy Commission Electron beam zone refining
CH427744A (de) * 1965-11-26 1967-01-15 Balzers Patent Beteilig Ag Verfahren für die thermische Verdampfung von Stoffgemischen im Vakuum
JPS4517178Y1 (fr) * 1967-06-14 1970-07-15
DE1797031A1 (de) * 1968-08-06 1971-07-01 Bosch Photokino Gmbh Elektrisch angetriebene Laufbildkamera

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110373635A (zh) * 2018-04-12 2019-10-25 冯·阿登纳资产股份有限公司 电子束蒸镀器和用于借助电子束对蒸镀物进行蒸镀的方法
CN110373635B (zh) * 2018-04-12 2022-03-22 冯·阿登纳资产股份有限公司 电子束蒸镀器和用于借助电子束对蒸镀物进行蒸镀的方法

Also Published As

Publication number Publication date
GB1516773A (en) 1978-07-05
DE2544725C3 (de) 1981-01-08
FR2327637A1 (fr) 1977-05-06
JPS5246384A (en) 1977-04-13
DE2544725B2 (de) 1980-04-17
DE2544725A1 (de) 1977-04-21
FR2327637B1 (fr) 1982-04-09
LU75884A1 (fr) 1977-05-11
NL7611034A (nl) 1977-04-13
US4115653A (en) 1978-09-19
CH621580A5 (fr) 1981-02-13

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Legal Events

Date Code Title Description
RE20 Patent expired

Owner name: LEYBOLD HERAEUS G.M.B.H. & CO. K.G.

Effective date: 19961007