GB1117676A - Improvements in and relating to methods of treating the surface of a germanium body - Google Patents
Improvements in and relating to methods of treating the surface of a germanium bodyInfo
- Publication number
- GB1117676A GB1117676A GB1256466A GB1256466A GB1117676A GB 1117676 A GB1117676 A GB 1117676A GB 1256466 A GB1256466 A GB 1256466A GB 1256466 A GB1256466 A GB 1256466A GB 1117676 A GB1117676 A GB 1117676A
- Authority
- GB
- United Kingdom
- Prior art keywords
- acid
- volume
- gms
- hydrogen peroxide
- germanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052732 germanium Inorganic materials 0.000 title abstract 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title abstract 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract 5
- 239000000243 solution Substances 0.000 abstract 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract 2
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 abstract 2
- 239000002253 acid Substances 0.000 abstract 2
- 235000002906 tartaric acid Nutrition 0.000 abstract 2
- 239000011975 tartaric acid Substances 0.000 abstract 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 abstract 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 abstract 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- 229960000583 acetic acid Drugs 0.000 abstract 1
- 150000001450 anions Chemical class 0.000 abstract 1
- 239000007864 aqueous solution Substances 0.000 abstract 1
- 125000003118 aryl group Chemical group 0.000 abstract 1
- 239000008367 deionised water Substances 0.000 abstract 1
- 229910021641 deionized water Inorganic materials 0.000 abstract 1
- 239000012362 glacial acetic acid Substances 0.000 abstract 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
- 238000007654 immersion Methods 0.000 abstract 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- 159000000000 sodium salts Chemical class 0.000 abstract 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-N sulfonic acid Chemical compound OS(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-N 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Germanium bodies e.g. mesa transistors are cleaned by immersion in a solution containing tartaric acid, hydrogen peroxide and anions of an aromatic sulphonic acid such as naphthalene-1-5-disulphonic acid. An aqueous solution preferably used contains 135 to 250 gms/1 tartaric acid, 40 to 80 gms/1 hydrogen peroxide and 2 to 4 gms/1 of a sodium salt of napthalene-1-5-disulphonic acid. The germanium is immersed in the solution for a maximum time of 40 minutes at room temperature and is then etched in a solution consisting of:- .hydrogen peroxide, 30%,.1 part by volume .glacial acetic acid,.1 part by volume .nitric acid,.1 part by volume .hydrofluoric acid, 49%,.1 part by volume .deionized water.2 parts by volume
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR10752A FR1437640A (en) | 1965-03-25 | 1965-03-25 | Process for preparing the surface of a semiconductor wafer before chemical etching |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1117676A true GB1117676A (en) | 1968-06-19 |
Family
ID=8574912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1256466A Expired GB1117676A (en) | 1965-03-25 | 1966-03-22 | Improvements in and relating to methods of treating the surface of a germanium body |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR1437640A (en) |
| GB (1) | GB1117676A (en) |
-
1965
- 1965-03-25 FR FR10752A patent/FR1437640A/en not_active Expired
-
1966
- 1966-03-22 GB GB1256466A patent/GB1117676A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR1437640A (en) | 1966-05-06 |
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