FR1437640A - Process for preparing the surface of a semiconductor wafer before chemical etching - Google Patents

Process for preparing the surface of a semiconductor wafer before chemical etching

Info

Publication number
FR1437640A
FR1437640A FR10752A FR10752A FR1437640A FR 1437640 A FR1437640 A FR 1437640A FR 10752 A FR10752 A FR 10752A FR 10752 A FR10752 A FR 10752A FR 1437640 A FR1437640 A FR 1437640A
Authority
FR
France
Prior art keywords
preparing
semiconductor wafer
chemical etching
wafer before
before chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR10752A
Other languages
French (fr)
Inventor
Rodolphe Lacal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique SA
Original Assignee
Radiotechnique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique SA filed Critical Radiotechnique SA
Priority to FR10752A priority Critical patent/FR1437640A/en
Priority to GB1256466A priority patent/GB1117676A/en
Application granted granted Critical
Publication of FR1437640A publication Critical patent/FR1437640A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
FR10752A 1965-03-25 1965-03-25 Process for preparing the surface of a semiconductor wafer before chemical etching Expired FR1437640A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR10752A FR1437640A (en) 1965-03-25 1965-03-25 Process for preparing the surface of a semiconductor wafer before chemical etching
GB1256466A GB1117676A (en) 1965-03-25 1966-03-22 Improvements in and relating to methods of treating the surface of a germanium body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR10752A FR1437640A (en) 1965-03-25 1965-03-25 Process for preparing the surface of a semiconductor wafer before chemical etching

Publications (1)

Publication Number Publication Date
FR1437640A true FR1437640A (en) 1966-05-06

Family

ID=8574912

Family Applications (1)

Application Number Title Priority Date Filing Date
FR10752A Expired FR1437640A (en) 1965-03-25 1965-03-25 Process for preparing the surface of a semiconductor wafer before chemical etching

Country Status (2)

Country Link
FR (1) FR1437640A (en)
GB (1) GB1117676A (en)

Also Published As

Publication number Publication date
GB1117676A (en) 1968-06-19

Similar Documents

Publication Publication Date Title
BE785150A (en) PROCESS FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES
FR1427365A (en) Process for preparing a protective coating on the surfaces of semiconductor devices
FR1509937A (en) Process for the deposition of silicon nitride on a support
FR1437640A (en) Process for preparing the surface of a semiconductor wafer before chemical etching
IT1022968B (en) PERFECTED PROCESS FOR PROCESSING SEMICONDUCTOR WAFERS
FR1364435A (en) Process for the preparation of a high density form of silicon
FR1538402A (en) Manufacturing process of integrated semiconductor devices
FR1466788A (en) Chemical process for the surface treatment of semiconductor devices
FR1422043A (en) Chemical process for the preparation of cyclohexylamine
FR1446273A (en) Process for the manufacture of a vitamin preparation
FR1546341A (en) Machining process by chemical etching
FR1485878A (en) Masking process for the fabrication of semiconductor devices
FR1535151A (en) Process for the simultaneous production of a large number of semiconductor components
FR1470479A (en) Chemical process for the preparation of ethylbenzene hydroperoxide
FR1448419A (en) Process for the manufacture of semiconductor devices
FR1307107A (en) Process for preparing a semiconductor substance
FR1471029A (en) Method for treating the surface of semiconductor devices
FR1436118A (en) Chemical process for the preparation of oxygenated amines
FR1501444A (en) Process for manufacturing semiconductor micro-components by the planar technique
FR89793E (en) Manufacturing process of a shoe
FR1453005A (en) Process for the production of a monocrystalline semiconductor material
FR1454259A (en) Process for the production of high purity silicon
FR1453001A (en) Process for preparing a very pure semiconductor substance
FR1352894A (en) Chemical etching process
FR1434152A (en) Chemical process for the preparation of fumaric acid