GB1062365A - A method of electroplating an ohmic contact bump upon a semiconductor body - Google Patents
A method of electroplating an ohmic contact bump upon a semiconductor bodyInfo
- Publication number
- GB1062365A GB1062365A GB5009/66A GB500966A GB1062365A GB 1062365 A GB1062365 A GB 1062365A GB 5009/66 A GB5009/66 A GB 5009/66A GB 500966 A GB500966 A GB 500966A GB 1062365 A GB1062365 A GB 1062365A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ohmic contact
- electroplating
- contact bump
- semiconductor body
- bump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/20—Electroplating using ultrasonic waves
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
- C25D5/022—Electroplating of selected surface areas using masking means
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
- H10P14/46—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials using a liquid
- H10P14/47—Electrolytic deposition, i.e. electroplating; Electroless plating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43598965A | 1965-03-01 | 1965-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1062365A true GB1062365A (en) | 1967-03-22 |
Family
ID=23730652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5009/66A Expired GB1062365A (en) | 1965-03-01 | 1966-02-04 | A method of electroplating an ohmic contact bump upon a semiconductor body |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB1062365A (cg-RX-API-DMAC7.html) |
| NL (1) | NL6602548A (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2151859A3 (en) * | 2008-08-08 | 2011-08-17 | Fei Company | Method of determining characteristics of a transistor in an integrated circuit |
-
1966
- 1966-02-04 GB GB5009/66A patent/GB1062365A/en not_active Expired
- 1966-02-25 NL NL6602548A patent/NL6602548A/xx unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2151859A3 (en) * | 2008-08-08 | 2011-08-17 | Fei Company | Method of determining characteristics of a transistor in an integrated circuit |
| US8278220B2 (en) | 2008-08-08 | 2012-10-02 | Fei Company | Method to direct pattern metals on a substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6602548A (cg-RX-API-DMAC7.html) | 1966-09-02 |
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