GB1060309A - A source of ions or electrons - Google Patents

A source of ions or electrons

Info

Publication number
GB1060309A
GB1060309A GB45884/63A GB4588463A GB1060309A GB 1060309 A GB1060309 A GB 1060309A GB 45884/63 A GB45884/63 A GB 45884/63A GB 4588463 A GB4588463 A GB 4588463A GB 1060309 A GB1060309 A GB 1060309A
Authority
GB
United Kingdom
Prior art keywords
source
stage
resistance
ion
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB45884/63A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Original Assignee
Siemens Schuckertwerke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG filed Critical Siemens Schuckertwerke AG
Publication of GB1060309A publication Critical patent/GB1060309A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB45884/63A 1962-11-20 1963-11-20 A source of ions or electrons Expired GB1060309A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES82505A DE1208420B (de) 1962-11-20 1962-11-20 Vorrichtung zur Erzeugung eines Strahlenbuendels von Ionen oder Elektronen bei der wenigstens zwei gleichartige Ionen- bzw. Elektronenquellen hintereinander angeordnet sind

Publications (1)

Publication Number Publication Date
GB1060309A true GB1060309A (en) 1967-03-01

Family

ID=7510392

Family Applications (1)

Application Number Title Priority Date Filing Date
GB45884/63A Expired GB1060309A (en) 1962-11-20 1963-11-20 A source of ions or electrons

Country Status (5)

Country Link
US (1) US3315125A (enrdf_load_stackoverflow)
CH (1) CH412124A (enrdf_load_stackoverflow)
DE (1) DE1208420B (enrdf_load_stackoverflow)
GB (1) GB1060309A (enrdf_load_stackoverflow)
NL (1) NL298175A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2169131A (en) * 1984-12-22 1986-07-02 English Electric Valve Co Ltd Gas discharge devices

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3449628A (en) * 1966-04-27 1969-06-10 Xerox Corp Plasma arc electrodes with anode heat shield
US3453489A (en) * 1966-04-27 1969-07-01 Xerox Corp Multiple anode electrode assembly
US3408283A (en) * 1966-09-15 1968-10-29 Kennecott Copper Corp High current duoplasmatron having an apertured anode positioned in the low pressure region
US3458743A (en) * 1966-12-19 1969-07-29 Radiation Dynamics Positive ion source for use with a duoplasmatron
US3409529A (en) * 1967-07-07 1968-11-05 Kennecott Copper Corp High current duoplasmatron having an apertured anode comprising a metal of high magnetic permeability
US3513351A (en) * 1968-06-26 1970-05-19 Atomic Energy Commission Duoplasmatron-type ion source including a gas reservoir
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
DE2923724C2 (de) * 1979-06-12 1983-11-03 W.C. Heraeus Gmbh, 6450 Hanau Kühlbare Deuteriumlampe
CH632176A5 (fr) * 1979-12-06 1982-09-30 Charmilles Sa Ateliers Procede et dispositif pour usiner par etincelage erosif.
JPS57191950A (en) 1981-05-22 1982-11-25 Hitachi Ltd Charged-particle source
CA1252581A (en) * 1985-05-28 1989-04-11 Yoshinobu Aoyagi Electron beam-excited ion beam source
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
GB8803837D0 (en) * 1988-02-18 1988-03-16 Vg Instr Group Mass spectrometer
DE10336273A1 (de) * 2003-08-07 2005-03-10 Fraunhofer Ges Forschung Vorrichtung zur Erzeugung von EUV- und weicher Röntgenstrahlung
WO2008035061A1 (en) * 2006-09-19 2008-03-27 University Of Southampton Improved pulsed plasma thruster and method of operation thereof
WO2014201285A1 (en) * 2013-06-12 2014-12-18 General Plasma, Inc. Linear duoplasmatron
US10176977B2 (en) * 2014-12-12 2019-01-08 Agilent Technologies, Inc. Ion source for soft electron ionization and related systems and methods
CN115426759B (zh) * 2022-09-07 2025-04-01 中国人民解放军空军工程大学 一种级联式高效放电装置和方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE764127C (de) * 1939-07-09 1954-05-17 Aeg Mittelbar geheizte Gluehkathode zur Erzeugung eines Elektronenstrahles grosser Stromstaerke
US2975277A (en) * 1955-05-10 1961-03-14 Vakutronik Veb Ion source
DE1059581B (de) * 1956-03-28 1959-06-18 Siemens Ag Plasmaquelle fuer geladene Teilchen
US3033984A (en) * 1959-02-17 1962-05-08 United States Steel Corp Apparatus for increasing the energy of x-rays
US3137801A (en) * 1960-09-22 1964-06-16 High Voltage Engineering Corp Duoplasmatron-type ion source including a non-magnetic anode and magnetic extractor electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2169131A (en) * 1984-12-22 1986-07-02 English Electric Valve Co Ltd Gas discharge devices
US4758766A (en) * 1984-12-22 1988-07-19 English Electric Valve Company Limited Gas discharge devices utilizing electron injection for gas ionization

Also Published As

Publication number Publication date
DE1208420B (de) 1966-01-05
NL298175A (enrdf_load_stackoverflow)
US3315125A (en) 1967-04-18
CH412124A (de) 1966-04-30

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