GB1013169A - Improvements relating to vacuum deposition - Google Patents

Improvements relating to vacuum deposition

Info

Publication number
GB1013169A
GB1013169A GB4345063A GB4345063A GB1013169A GB 1013169 A GB1013169 A GB 1013169A GB 4345063 A GB4345063 A GB 4345063A GB 4345063 A GB4345063 A GB 4345063A GB 1013169 A GB1013169 A GB 1013169A
Authority
GB
United Kingdom
Prior art keywords
wire
wires
sublimation
source
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4345063A
Inventor
Leo Ewart Arthur Summers
Roger John Horwood
Richard William Pockett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Aircraft Corp Ltd
Original Assignee
British Aircraft Corp Operating Ltd
British Aircraft Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Aircraft Corp Operating Ltd, British Aircraft Corp Ltd filed Critical British Aircraft Corp Operating Ltd
Priority to GB4345063A priority Critical patent/GB1013169A/en
Publication of GB1013169A publication Critical patent/GB1013169A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

<PICT:1013169/C6-C7/1> A sublimation or evaporation source in a vacuum deposition apparatus comprises a group of wires of the material to be deposited e.g. "Nichrome" (Registered Trade Mark) spirally interwound to form a multi-stranded length with a hollow core along its axis and means for passing an electric current through the wires. The multi-stranded length of wires may be divided transversely into a number of lengths separated by a region from which no sublimation occurs or shields may surround predetermined regions of the wires to prevent sublimation from these regions (Figs. 5, 6 and 7, not shown). As shown in Fig. 3 the source wire 1 is supported in a vacuum chamber between supports 5 and 6, and the substrates 7 are arranged around the wire 1 on the surface of an imaginary cylinder 71. The support 6 comprises an electrically insulated sprung grip plunger which is free to slide in the direction of the wire length so that the wire is maintained taut. The opposite end of the wire is fixed in support 5 and the wire is heated by a current of about 200 amps from the secondary winding of a step down transformer. Two circuits are shown for controlling the current to the wire source, one circuit being manually controlled and the other automatically controlled.
GB4345063A 1963-11-04 1963-11-04 Improvements relating to vacuum deposition Expired GB1013169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4345063A GB1013169A (en) 1963-11-04 1963-11-04 Improvements relating to vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4345063A GB1013169A (en) 1963-11-04 1963-11-04 Improvements relating to vacuum deposition

Publications (1)

Publication Number Publication Date
GB1013169A true GB1013169A (en) 1965-12-15

Family

ID=10428802

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4345063A Expired GB1013169A (en) 1963-11-04 1963-11-04 Improvements relating to vacuum deposition

Country Status (1)

Country Link
GB (1) GB1013169A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183975A (en) * 1978-03-16 1980-01-15 Dare Pafco, Inc. Vacuum metallizing process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183975A (en) * 1978-03-16 1980-01-15 Dare Pafco, Inc. Vacuum metallizing process

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