GB1010331A - Improvements in or relating to capacitors - Google Patents

Improvements in or relating to capacitors

Info

Publication number
GB1010331A
GB1010331A GB4209460A GB4209460A GB1010331A GB 1010331 A GB1010331 A GB 1010331A GB 4209460 A GB4209460 A GB 4209460A GB 4209460 A GB4209460 A GB 4209460A GB 1010331 A GB1010331 A GB 1010331A
Authority
GB
United Kingdom
Prior art keywords
sputtering
dielectric layer
oxygen atmosphere
electrode
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4209460A
Inventor
Peter Lloyd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Priority to GB4209460A priority Critical patent/GB1010331A/en
Publication of GB1010331A publication Critical patent/GB1010331A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium

Abstract

<PICT:1010331/C6-C7/1> A capacitor is made by vacuum evaporating an aluminium electrode 2 on to a quartz substrate 1, applying a dielectric layer 3 of tantalum oxide to the electrode by sputtering from a tantalum cathode in an oxygen atmosphere (reactive sputtering) and then evaporating a second aluminium electrode 4 on to the dielectric layer. The electrodes 2, 4 engage respective silver contacts 1A, 1B previously fired on to the substrate, e.g. by cathode sputtering or firing a silver paste. A proportion of an inert gas, argon for example, may be included in the oxygen atmosphere.
GB4209460A 1960-12-07 1960-12-07 Improvements in or relating to capacitors Expired GB1010331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4209460A GB1010331A (en) 1960-12-07 1960-12-07 Improvements in or relating to capacitors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4209460A GB1010331A (en) 1960-12-07 1960-12-07 Improvements in or relating to capacitors

Publications (1)

Publication Number Publication Date
GB1010331A true GB1010331A (en) 1965-11-17

Family

ID=10422820

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4209460A Expired GB1010331A (en) 1960-12-07 1960-12-07 Improvements in or relating to capacitors

Country Status (1)

Country Link
GB (1) GB1010331A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588667A (en) * 1984-05-15 1986-05-13 Xerox Corporation Electrophotographic imaging member and process comprising sputtering titanium on substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588667A (en) * 1984-05-15 1986-05-13 Xerox Corporation Electrophotographic imaging member and process comprising sputtering titanium on substrate

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