FR3118183B1 - Dispositif de mesure de conductivité electrique et/ou résistivité electrique pour couche anisotrope - Google Patents

Dispositif de mesure de conductivité electrique et/ou résistivité electrique pour couche anisotrope Download PDF

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Publication number
FR3118183B1
FR3118183B1 FR2014028A FR2014028A FR3118183B1 FR 3118183 B1 FR3118183 B1 FR 3118183B1 FR 2014028 A FR2014028 A FR 2014028A FR 2014028 A FR2014028 A FR 2014028A FR 3118183 B1 FR3118183 B1 FR 3118183B1
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FR
France
Prior art keywords
conductive track
central
measuring
anisotropic layer
electrical conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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FR2014028A
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English (en)
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FR3118183A1 (fr
Inventor
Alexandre Meunier
The Fon Pierre Che
Joël Pauchet
Ludovic Rouillon
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Priority to FR2014028A priority Critical patent/FR3118183B1/fr
Publication of FR3118183A1 publication Critical patent/FR3118183A1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08—Measuring resistance by measuring both voltage and current

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Capteur (2) de mesure de conductivité électrique et/ou de résistivité électrique d’une couche, en particulier d’une couche mince anisotrope, comprenant :- un support isolant,- une piste conductrice centrale (11) et une piste conductrice périphérique (13), dédiées chacune à l’application ou au prélèvement d’un courant,- des sondes (21, 231,…,231 2) de mesures de tensions entourées par ladite piste conductrice périphérique (13) avec :- une sonde centrale (21) entourée par la piste conductrice centrale (11, 11’),- une pluralité de sondes radiales (231,…,231 2), les sondes radiales étant agencées entre la piste conductrice centrale (11) et la piste conductrice périphérique (13) et réparties suivant différentes positions angulaires prédéterminées et à des distances respectives prédéterminées de la sonde centrale (21). Figure pour l’abrégé : figure 1.
FR2014028A 2020-12-23 2020-12-23 Dispositif de mesure de conductivité electrique et/ou résistivité electrique pour couche anisotrope Active FR3118183B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR2014028A FR3118183B1 (fr) 2020-12-23 2020-12-23 Dispositif de mesure de conductivité electrique et/ou résistivité electrique pour couche anisotrope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2014028 2020-12-23
FR2014028A FR3118183B1 (fr) 2020-12-23 2020-12-23 Dispositif de mesure de conductivité electrique et/ou résistivité electrique pour couche anisotrope

Publications (2)

Publication Number Publication Date
FR3118183A1 FR3118183A1 (fr) 2022-06-24
FR3118183B1 true FR3118183B1 (fr) 2022-12-09

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FR2014028A Active FR3118183B1 (fr) 2020-12-23 2020-12-23 Dispositif de mesure de conductivité electrique et/ou résistivité electrique pour couche anisotrope

Country Status (1)

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FR (1) FR3118183B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3033118B2 (ja) * 1990-03-30 2000-04-17 ジェイエスアール株式会社 電気抵抗率の測定方法と４端子プローブ
GB2276462B (en) * 1993-03-23 1997-01-22 Univ Sheffield Method and apparatus for mapping of semiconductor materials
JP2010217134A (ja) * 2009-03-19 2010-09-30 Eiji Nemoto 多点電圧・電流プローブ法による２次元、および３次元異方性物質の主軸電気抵抗率測定方法およびその測定装置
JP6429669B2 (ja) 2015-02-23 2018-11-28 日置電機株式会社 シート抵抗測定装置およびシート抵抗測定方法

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Publication number Publication date
FR3118183A1 (fr) 2022-06-24

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