FR3080995B1 - Dispositif d'écrouissage par laser et procédé d'écrouissage par laser - Google Patents

Dispositif d'écrouissage par laser et procédé d'écrouissage par laser Download PDF

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Publication number
FR3080995B1
FR3080995B1 FR1904825A FR1904825A FR3080995B1 FR 3080995 B1 FR3080995 B1 FR 3080995B1 FR 1904825 A FR1904825 A FR 1904825A FR 1904825 A FR1904825 A FR 1904825A FR 3080995 B1 FR3080995 B1 FR 3080995B1
Authority
FR
France
Prior art keywords
radiation
laser beam
laser
current
injector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1904825A
Other languages
English (en)
Other versions
FR3080995A1 (fr
Inventor
Souichi Ueno
Akihiro Tsuji
Hiroya Ichikawa
Kazuki Kora
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2019020697A external-priority patent/JP7068207B2/ja
Application filed by Toshiba Corp, Toshiba Energy Systems and Solutions Corp filed Critical Toshiba Corp
Publication of FR3080995A1 publication Critical patent/FR3080995A1/fr
Application granted granted Critical
Publication of FR3080995B1 publication Critical patent/FR3080995B1/fr
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/356—Working by laser beam, e.g. welding, cutting or boring for surface treatment by shock processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/009—Working by laser beam, e.g. welding, cutting or boring using a non-absorbing, e.g. transparent, reflective or refractive, layer on the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D10/00—Modifying the physical properties by methods other than heat treatment or deformation
    • C21D10/005—Modifying the physical properties by methods other than heat treatment or deformation by laser shock processing
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D11/00—Process control or regulation for heat treatments
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D7/00—Modifying the physical properties of iron or steel by deformation
    • C21D7/02—Modifying the physical properties of iron or steel by deformation by cold working
    • C21D7/04—Modifying the physical properties of iron or steel by deformation by cold working of the surface
    • C21D7/06—Modifying the physical properties of iron or steel by deformation by cold working of the surface by shot-peening or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/04—Tubular or hollow articles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Laser Beam Processing (AREA)

Abstract

Un dispositif d'écrouissage par laser d'un mode de réalisation comprend : un oscillateur laser (13) ; un injecteur de rayonnement (12) destiné à appliquer un faisceau laser (30) sur une cible de rayonnement (100) ; une unité de transmission optique (14) ; un obturateur (18) lié à l'unité de transmission optique (14) ; un élément d'alimentation de liquide (15) destiné à délivrer à l'injecteur de rayonnement (12) un liquide de manière à provoquer l'écoulement du liquide le long d'un trajet optique du faisceau laser (30) s'étendant de l'injecteur de rayonnement (12) à la cible de rayonnement (100) ; un capteur de rayonnement courant (35) destiné à obtenir des informations sur le rayonnement de faisceau laser courant indiquant si le faisceau laser (30) est appliqué correctement afin d'assurer l'exécution de l'opération d'écrouissage par laser courante sur la cible de rayonnement (100) ; et une unité de commande (16) destinée à commander l'obturateur (18) en fonction des informations sur le rayonnement de faisceau laser courant obtenues par le capteur de rayonnement courant (35). Figure à publier avec l’abrégé : Fig. 1
FR1904825A 2018-05-11 2019-05-10 Dispositif d'écrouissage par laser et procédé d'écrouissage par laser Active FR3080995B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2018-091839 2018-05-11
JP2018091839 2018-05-11
JP2019-020697 2019-02-07
JP2019020697A JP7068207B2 (ja) 2018-05-11 2019-02-07 レーザピーニング装置およびレーザピーニング方法

Publications (2)

Publication Number Publication Date
FR3080995A1 FR3080995A1 (fr) 2019-11-15
FR3080995B1 true FR3080995B1 (fr) 2023-04-14

Family

ID=68336921

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1904825A Active FR3080995B1 (fr) 2018-05-11 2019-05-10 Dispositif d'écrouissage par laser et procédé d'écrouissage par laser

Country Status (4)

Country Link
US (1) US11440137B2 (fr)
CN (1) CN110468273A (fr)
DE (1) DE102019003384A1 (fr)
FR (1) FR3080995B1 (fr)

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492111B1 (fr) 1967-02-28 1974-01-18
JPH02235588A (ja) * 1989-03-09 1990-09-18 Fanuc Ltd レーザ出力制御方式
JPH0716779A (ja) 1993-06-30 1995-01-20 Matsushita Electric Ind Co Ltd レーザ加工機用焦点調整装置
EP0724929B1 (fr) 1995-01-31 2001-04-11 Kabushiki Kaisha Toshiba Procédé et système de traitement par laser sous l'eau
JP3461948B2 (ja) 1995-02-06 2003-10-27 株式会社東芝 水中レーザ加工方法
JPH1147965A (ja) * 1997-05-28 1999-02-23 Komatsu Ltd レーザ加工装置
US7380697B2 (en) * 2001-02-14 2008-06-03 Honda Giken Kogyo Kabushiki Kaisha Welding condition monitoring device
CN1272138C (zh) * 2001-08-09 2006-08-30 奥博泰克有限公司 用于露出嵌入在多层电路中的目标的系统和方法
JP3903761B2 (ja) * 2001-10-10 2007-04-11 株式会社日立製作所 レ−ザアニ−ル方法およびレ−ザアニ−ル装置
JP3792683B2 (ja) * 2003-07-16 2006-07-05 ファナック株式会社 レーザ溶接装置
US7148448B2 (en) 2003-10-31 2006-12-12 General Electric Company Monitored laser shock peening
JP4868729B2 (ja) 2004-11-12 2012-02-01 株式会社東芝 レーザ衝撃硬化処理方法および装置
JP2006292424A (ja) 2005-04-06 2006-10-26 Toshiba Corp 光ファイバモニタ装置およびレーザ加工システム
JP5043630B2 (ja) * 2007-12-18 2012-10-10 株式会社ディスコ レーザー加工機
JP2010089094A (ja) * 2008-10-03 2010-04-22 Disco Abrasive Syst Ltd レーザ加工装置
CN102470481B (zh) * 2009-07-10 2015-04-29 三菱电机株式会社 激光加工方法及其装置
KR101084231B1 (ko) 2009-10-05 2011-11-16 삼성모바일디스플레이주식회사 레이저 조사 시스템 및 레이저 조사 방법
JP2013150995A (ja) * 2012-01-24 2013-08-08 Shibuya Kogyo Co Ltd レーザ加工装置
JP6063635B2 (ja) 2012-04-10 2017-01-18 株式会社東芝 レーザ加工装置、レーザ加工システム、レーザ加工方法
JP5689495B2 (ja) * 2013-04-15 2015-03-25 ファナック株式会社 消費電力の削減制御を行うレーザ加工装置
JP5902747B2 (ja) 2014-04-30 2016-04-13 ファナック株式会社 加工再開準備機能を有するレーザ加工システム
CN107107266B (zh) * 2015-01-30 2019-09-20 株式会社牧野铣床制作所 激光加工机
JP6227586B2 (ja) * 2015-03-31 2017-11-08 ファナック株式会社 複数の運転モードで動作するレーザ加工システム
EP3150323B1 (fr) 2015-09-30 2020-11-18 Kabushiki Kaisha Toshiba Appareil de traitement laser, procédé de traitement laser et procédé de mesure de distance
JP6767205B2 (ja) 2015-09-30 2020-10-14 株式会社東芝 レーザ加工装置、レーザ加工方法および距離測定方法
JP6649095B2 (ja) 2016-01-26 2020-02-19 株式会社東芝 レーザ加工ヘッド、レーザ加工システム及びレーザ加工方法
JP2017177162A (ja) * 2016-03-30 2017-10-05 株式会社Ｓｕｂａｒｕ レーザピーニング加工装置及びレーザピーニング加工方法

Also Published As

Publication number Publication date
FR3080995A1 (fr) 2019-11-15
US11440137B2 (en) 2022-09-13
DE102019003384A1 (de) 2019-11-14
CN110468273A (zh) 2019-11-19
US20190344383A1 (en) 2019-11-14

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