FR2929445B1 - Procede de fabrication d'une couche de nitrure de gallium ou de nitrure de gallium et d'aluminium - Google Patents
Procede de fabrication d'une couche de nitrure de gallium ou de nitrure de gallium et d'aluminiumInfo
- Publication number
- FR2929445B1 FR2929445B1 FR0851891A FR0851891A FR2929445B1 FR 2929445 B1 FR2929445 B1 FR 2929445B1 FR 0851891 A FR0851891 A FR 0851891A FR 0851891 A FR0851891 A FR 0851891A FR 2929445 B1 FR2929445 B1 FR 2929445B1
- Authority
- FR
- France
- Prior art keywords
- gallium nitride
- aluminum
- producing
- nitride layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910002601 GaN Inorganic materials 0.000 title 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title 2
- 229910052782 aluminium Inorganic materials 0.000 title 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02513—Microstructure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02598—Microstructure monocrystalline
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02376—Carbon, e.g. diamond-like carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Junction Field-Effect Transistors (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0851891A FR2929445B1 (fr) | 2008-03-25 | 2008-03-25 | Procede de fabrication d'une couche de nitrure de gallium ou de nitrure de gallium et d'aluminium |
PCT/EP2009/052881 WO2009118244A1 (fr) | 2008-03-25 | 2009-03-11 | Procédé de fabrication d'une couche de nitrure de gallium ou d’une couche de nitrure d'aluminium et de gallium |
KR1020107023128A KR101186032B1 (ko) | 2008-03-25 | 2009-03-11 | 질화갈륨 또는 질화알루미늄갈륨 층을 제조하는 방법 |
EP09725028A EP2269212A1 (fr) | 2008-03-25 | 2009-03-11 | Procédé de fabrication d'une couche de nitrure de gallium ou d une couche de nitrure d'aluminium et de gallium |
JP2011501165A JP2011515861A (ja) | 2008-03-25 | 2009-03-11 | 窒化ガリウムまたはガリウムおよびアルミニウム窒化物の層を製造する方法 |
CN200980109974.0A CN101978470B (zh) | 2008-03-25 | 2009-03-11 | 氮化镓或氮化铝镓层的制造方法 |
US12/934,359 US8093077B2 (en) | 2008-03-25 | 2009-03-11 | Method for manufacturing a layer of gallium nitride or gallium and aluminum nitride |
US13/313,522 US8283673B2 (en) | 2008-03-25 | 2011-12-07 | Method for manufacturing a layer of gallium nitride or gallium and aluminum nitride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0851891A FR2929445B1 (fr) | 2008-03-25 | 2008-03-25 | Procede de fabrication d'une couche de nitrure de gallium ou de nitrure de gallium et d'aluminium |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2929445A1 FR2929445A1 (fr) | 2009-10-02 |
FR2929445B1 true FR2929445B1 (fr) | 2010-05-21 |
Family
ID=40298702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0851891A Active FR2929445B1 (fr) | 2008-03-25 | 2008-03-25 | Procede de fabrication d'une couche de nitrure de gallium ou de nitrure de gallium et d'aluminium |
Country Status (7)
Country | Link |
---|---|
US (2) | US8093077B2 (fr) |
EP (1) | EP2269212A1 (fr) |
JP (1) | JP2011515861A (fr) |
KR (1) | KR101186032B1 (fr) |
CN (1) | CN101978470B (fr) |
FR (1) | FR2929445B1 (fr) |
WO (1) | WO2009118244A1 (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010027411A1 (de) * | 2010-07-15 | 2012-01-19 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement, Substrat und Verfahren zur Herstellung einer Halbleiterschichtenfolge |
WO2012176411A1 (fr) * | 2011-06-24 | 2012-12-27 | 住友化学株式会社 | Substrat semi-conducteur pour transistor, et procédé de fabrication de transistor et de substrat semi-conducteur pour transistor |
FR2977260B1 (fr) * | 2011-06-30 | 2013-07-19 | Soitec Silicon On Insulator | Procede de fabrication d'une couche epitaxiale epaisse de nitrure de gallium sur un substrat de silicium ou analogue et couche obtenue par ledit procede |
JP2013149732A (ja) * | 2012-01-18 | 2013-08-01 | Mitsubishi Electric Corp | へテロ接合電界効果型トランジスタおよびその製造方法 |
KR102225693B1 (ko) * | 2013-03-14 | 2021-03-12 | 헥사테크, 인크. | 단결정 알루미늄 질화물 기판을 포함하는 전력 반도체 장치들 |
EP3182460A1 (fr) * | 2015-12-18 | 2017-06-21 | IMEC vzw | Procédé de fabrication d'un dispositif hemt à nitrure du groupe iii à mode d'enrichissement, et structure à nitrure de groupe iii fabriqué à l'aide dudit procédé |
US10043903B2 (en) | 2015-12-21 | 2018-08-07 | Samsung Electronics Co., Ltd. | Semiconductor devices with source/drain stress liner |
EP3539155A4 (fr) * | 2016-11-10 | 2020-06-17 | The Government of the United States of America, as represented by the Secretary of the Navy | Couches d'arrêt de gravure iii-n contenant du scandium pour la gravure sélective de nitrures d'éléments du groupe iii et matériaux apparentés |
US10128107B1 (en) * | 2017-08-31 | 2018-11-13 | Rfhic Corporation | Wafers having III-Nitride and diamond layers |
WO2019077420A1 (fr) * | 2017-10-19 | 2019-04-25 | King Abdullah University Of Science And Technology | Transistor à haute mobilité d'électrons ayant une couche intermédiaire en alliage de nitrure de bore et procédé de production |
CN110791805A (zh) * | 2019-10-31 | 2020-02-14 | 中国电子科技集团公司第十三研究所 | 一种衬底、外延片及其生长方法 |
JP7439536B2 (ja) * | 2020-01-28 | 2024-02-28 | 富士通株式会社 | 半導体装置 |
CN111477536A (zh) * | 2020-03-31 | 2020-07-31 | 华为技术有限公司 | 一种半导体外延结构及半导体器件 |
CN111334781A (zh) * | 2020-04-20 | 2020-06-26 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | 一种氮化铝晶体生长所用的大尺寸复合籽晶及其制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3505405B2 (ja) * | 1998-10-22 | 2004-03-08 | 三洋電機株式会社 | 半導体素子及びその製造方法 |
GB2343294A (en) * | 1998-10-31 | 2000-05-03 | Sharp Kk | Lattice-matched semiconductor devices |
GB2350721A (en) * | 1999-08-24 | 2000-12-06 | Arima Optoelectronics Corp | Growing semiconductor layers |
FR2810159B1 (fr) * | 2000-06-09 | 2005-04-08 | Centre Nat Rech Scient | Couche epaisse de nitrure de gallium ou de nitrure mixte de gallium et d'un autre metal, procede de preparation, et dispositif electronique ou optoelectronique comprenant une telle couche |
TWI230978B (en) * | 2003-01-17 | 2005-04-11 | Sanken Electric Co Ltd | Semiconductor device and the manufacturing method thereof |
JP4332720B2 (ja) * | 2003-11-28 | 2009-09-16 | サンケン電気株式会社 | 半導体素子形成用板状基体の製造方法 |
US8362503B2 (en) | 2007-03-09 | 2013-01-29 | Cree, Inc. | Thick nitride semiconductor structures with interlayer structures |
-
2008
- 2008-03-25 FR FR0851891A patent/FR2929445B1/fr active Active
-
2009
- 2009-03-11 JP JP2011501165A patent/JP2011515861A/ja active Pending
- 2009-03-11 KR KR1020107023128A patent/KR101186032B1/ko active IP Right Grant
- 2009-03-11 WO PCT/EP2009/052881 patent/WO2009118244A1/fr active Application Filing
- 2009-03-11 US US12/934,359 patent/US8093077B2/en active Active
- 2009-03-11 EP EP09725028A patent/EP2269212A1/fr not_active Withdrawn
- 2009-03-11 CN CN200980109974.0A patent/CN101978470B/zh active Active
-
2011
- 2011-12-07 US US13/313,522 patent/US8283673B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011515861A (ja) | 2011-05-19 |
EP2269212A1 (fr) | 2011-01-05 |
FR2929445A1 (fr) | 2009-10-02 |
US20110012128A1 (en) | 2011-01-20 |
CN101978470A (zh) | 2011-02-16 |
WO2009118244A1 (fr) | 2009-10-01 |
KR101186032B1 (ko) | 2012-09-25 |
US8283673B2 (en) | 2012-10-09 |
CN101978470B (zh) | 2013-03-20 |
US20120074427A1 (en) | 2012-03-29 |
KR20100124334A (ko) | 2010-11-26 |
US8093077B2 (en) | 2012-01-10 |
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Legal Events
Date | Code | Title | Description |
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CD | Change of name or company name |
Owner name: SOITEC, FR Effective date: 20140825 |
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TP | Transmission of property |
Owner name: SOITEC, FR Effective date: 20140825 |
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PLFP | Fee payment |
Year of fee payment: 9 |
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PLFP | Fee payment |
Year of fee payment: 10 |
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PLFP | Fee payment |
Year of fee payment: 11 |
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PLFP | Fee payment |
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PLFP | Fee payment |
Year of fee payment: 14 |
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PLFP | Fee payment |
Year of fee payment: 15 |
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PLFP | Fee payment |
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PLFP | Fee payment |
Year of fee payment: 17 |