FR2805892B1 - Dispositif de mesure optique, notamment pour la surveillance de la qualite dans des processus continus - Google Patents

Dispositif de mesure optique, notamment pour la surveillance de la qualite dans des processus continus

Info

Publication number
FR2805892B1
FR2805892B1 FR0102894A FR0102894A FR2805892B1 FR 2805892 B1 FR2805892 B1 FR 2805892B1 FR 0102894 A FR0102894 A FR 0102894A FR 0102894 A FR0102894 A FR 0102894A FR 2805892 B1 FR2805892 B1 FR 2805892B1
Authority
FR
France
Prior art keywords
measurement device
optical measurement
quality monitoring
continuous processes
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0102894A
Other languages
English (en)
Other versions
FR2805892A1 (fr
Inventor
Jurgen Gobel
Werner Hoyme
Martin Gotz
Wilhelm Schebesta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of FR2805892A1 publication Critical patent/FR2805892A1/fr
Application granted granted Critical
Publication of FR2805892B1 publication Critical patent/FR2805892B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J2001/0481—Preset integrating sphere or cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155—Measuring in two spectral ranges, e.g. UV and visible

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR0102894A 2000-03-02 2001-03-02 Dispositif de mesure optique, notamment pour la surveillance de la qualite dans des processus continus Expired - Lifetime FR2805892B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10010213A DE10010213B4 (de) 2000-03-02 2000-03-02 Optische Meßvorrichtung, insbesondere zur Qualitätsüberwachung bei kontinuierlichen Prozessen

Publications (2)

Publication Number Publication Date
FR2805892A1 FR2805892A1 (fr) 2001-09-07
FR2805892B1 true FR2805892B1 (fr) 2007-09-28

Family

ID=7633264

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0102894A Expired - Lifetime FR2805892B1 (fr) 2000-03-02 2001-03-02 Dispositif de mesure optique, notamment pour la surveillance de la qualite dans des processus continus

Country Status (4)

Country Link
US (2) US20020001078A1 (fr)
DE (1) DE10010213B4 (fr)
FR (1) FR2805892B1 (fr)
GB (1) GB2366372B (fr)

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GB0421374D0 (en) * 2004-09-25 2004-10-27 Univ Surrey Measuring device and system for measuring reflectance characteristics
JP2006214935A (ja) * 2005-02-04 2006-08-17 Omron Corp 薄膜検査装置および薄膜検査方法
US7929140B2 (en) * 2005-05-18 2011-04-19 Axsun Technologies, Inc. Spectroscopy probe and material processing system
US7382456B2 (en) * 2005-12-29 2008-06-03 Honeywell Asca, Inc. Spectroscopic sensor for measuring sheet properties
EP1826555A1 (fr) * 2006-02-28 2007-08-29 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Appareil et procédé d'inspection de structures des circuits intégrés
FI20075173A0 (fi) * 2006-09-20 2007-03-12 Standard Measuring Devices Oy Yleisoptinen mittalaite
US7610157B2 (en) * 2007-05-02 2009-10-27 General Electric Company Apparatus and method for fully automated closed system pH measurement
US20080275668A1 (en) * 2007-05-02 2008-11-06 General Electric Company Apparatus and method for fully automated closed system optical measurement of volume
US7519492B2 (en) * 2007-05-02 2009-04-14 General Electric Company Apparatus and method for fully automated closed system quality control of a substance
DE102007061213A1 (de) * 2007-12-19 2009-06-25 Carl Zeiss Microimaging Gmbh Anordnung zum Bestimmen des Reflexionsgrades einer Probe
DE102009015909A1 (de) * 2009-04-03 2010-10-07 Carl Zeiss Microlmaging Gmbh Verfahren und Vorrichtung zur Charakterisierung einer dünnen Siliziumschicht auf einem lichtdurchlässigen Substrat
DE102009030468A1 (de) 2009-06-23 2011-01-05 Carl Zeiss Microlmaging Gmbh Vorrichtung für die optische Spektroskopie und mechanischer Schalter für eine solche Vorrichtung
DE102009040642B3 (de) 2009-09-09 2011-03-10 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Messung von optischen Kenngrößen transparenter, streuender Messobjekte
US8492721B2 (en) * 2009-10-15 2013-07-23 Camtek Ltd. Systems and methods for near infra-red optical inspection
DE102010041748A1 (de) * 2010-09-30 2012-04-05 Carl Zeiss Microimaging Gmbh Vorrichtungen und Verfahren zur spektroskopischen Untersuchung von Proben
DE102010047061A1 (de) 2010-09-30 2012-04-05 Carl Zeiss Microlmaging Gmbh Optisches Weitbereichsspektrometer
DE102011077290A1 (de) 2011-06-09 2012-12-13 Carl Zeiss Microimaging Gmbh Messverfahren und Messvorrichtung zur Ermittlung von Transmissions- und/oder Reflektionseigenschaften
DE102011050969A1 (de) 2011-06-09 2013-05-16 Carl Zeiss Microscopy Gmbh Vorrichtung zur referenzierten Messung von reflektiertem Licht und Verfahren zum Kalibrieren einer solchen Vorrichtung
DE102012007609A1 (de) 2012-04-05 2013-10-10 Carl Zeiss Microscopy Gmbh Optisches Weitbereichsspektrometer
CN102735634B (zh) * 2012-06-08 2014-07-30 中国科学院半导体研究所 介质光栅结构单波长反射光吸收传感芯片及其制造方法
DE102013016413A1 (de) 2013-09-27 2015-04-02 Carl Zeiss Microscopy Gmbh Vorrichtung zur Homogenisierung von Licht
DE102013219830B4 (de) 2013-09-30 2021-11-11 Carl Zeiss Spectroscopy Gmbh Optische Vorrichtung zur Reflexionsmessung unter diffuser Beleuchtung und Verfahren zum Optimieren einer solchen, sowie Verwendung der Vorrichtung
DE202014010613U1 (de) 2014-08-01 2016-02-25 Carl Zeiss Spectroscopy Gmbh Messanordnung zur Reflexionsmessung
DE102014115318A1 (de) 2014-10-21 2016-04-21 cibite AG Verfahren und Vorrichtung zur Überprüfung des Transmissionsgrads eines Flachglas-Substrats
TW201740096A (zh) 2015-12-11 2017-11-16 帝斯曼知識產權資產管理有限公司 用於在透明片上的光學測量之系統及方法
DE102018212489A1 (de) * 2018-07-26 2020-01-30 Implen GmbH Vorrichtung für eine lichtspektroskopische Analyse
CN113848438A (zh) * 2021-09-09 2021-12-28 海南电网有限责任公司电力科学研究院 一种基于电力变压器的绝缘纸红外光谱采集方法
DE102022002964A1 (de) 2022-08-16 2024-02-22 Plasus Gmbh Messanordnung zur Messung des Reflexionsgrades eines Messobjekts

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US4288160A (en) * 1973-12-28 1981-09-08 Nekoosa Papers Inc. Optical property measurement system and method
DE3215879A1 (de) * 1982-04-29 1983-11-03 Fa. Carl Zeiss, 7920 Heidenheim Geraet zur spektrenmessung in der blutbahn
US4602160A (en) * 1983-09-28 1986-07-22 Sentrol Systems Ltd. Infrared constituent analyzer and control system
DE3639636C2 (de) * 1986-11-20 1996-04-18 Robert Prof Dr Ing Massen Automatische Inspektion von Textilbahnen
DE8704679U1 (fr) * 1987-03-30 1987-05-27 Fa. Carl Zeiss, 7920 Heidenheim, De
DE3806382A1 (de) * 1988-02-29 1989-09-07 Feldmuehle Ag Verfahren und vorrichtung zum pruefen von laufenden transparenten bahnen
IT1216681B (it) * 1988-03-31 1990-03-08 Maxmeyer Duco Mm D Spa Spettrofometro portatile.
US5319437A (en) * 1991-07-26 1994-06-07 Kollmorgen Corporation Handheld portable spectrophotometer
DE4305006A1 (de) * 1992-03-23 1993-09-30 Buehler Ag Verfahren zum automatischen Sortieren von Abfallmaterial und Verfahren zur Spektralanalyse von Stoffen sowie Einrichtungen zur Durchführung der Verfahren
US5508512A (en) * 1995-01-24 1996-04-16 Esm International Inc. Sorting machine using dual frequency optical detectors
DE19503763C2 (de) * 1995-02-04 1996-11-28 Honeywell Ag Vorrichtung zur Farbmessung
US5642189A (en) * 1995-06-12 1997-06-24 Measurex Corporation Color sensor simulating standard source illuminant
DE19528855A1 (de) * 1995-08-05 1997-02-06 Leybold Ag Verfahren und Vorrichtung zur spektralen Remissions- und Transmissionsmessung
DE19629342C2 (de) * 1996-07-20 1999-09-02 Epsa Elektronik Und Praezision Verfahren und Anordnung zur nicht-invasiven, transkutanen Bestimmung von Stoffkonzentrationen in Körpergeweben
DE19732831C2 (de) * 1997-07-02 1999-07-29 Mahlo Gmbh & Co Kg Verfahren und Vorrichtung zum Abtasten einer vorzugsweise textilen Warenbahn
US5965873A (en) * 1997-09-17 1999-10-12 Lockheed Martin Energy Research Corporation Integrated CMOS spectrometers
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AU777591B2 (en) * 1999-07-16 2004-10-21 Textron Systems Corporation Integrated optics block for spectroscopy

Also Published As

Publication number Publication date
DE10010213A1 (de) 2001-09-06
US20020001078A1 (en) 2002-01-03
GB0104773D0 (en) 2001-04-18
GB2366372A (en) 2002-03-06
DE10010213B4 (de) 2005-02-17
US20030202180A1 (en) 2003-10-30
FR2805892A1 (fr) 2001-09-07
GB2366372B (en) 2004-10-20

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