FR2734946B1 - Dispositif a cathode froide du type a emission de champ, a electrode emettrice conique, et procede de fabrication de ce dispositif - Google Patents

Dispositif a cathode froide du type a emission de champ, a electrode emettrice conique, et procede de fabrication de ce dispositif

Info

Publication number
FR2734946B1
FR2734946B1 FR9606653A FR9606653A FR2734946B1 FR 2734946 B1 FR2734946 B1 FR 2734946B1 FR 9606653 A FR9606653 A FR 9606653A FR 9606653 A FR9606653 A FR 9606653A FR 2734946 B1 FR2734946 B1 FR 2734946B1
Authority
FR
France
Prior art keywords
manufacturing
field emission
cold cathode
emitter electrode
emission type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9606653A
Other languages
English (en)
Other versions
FR2734946A1 (fr
Inventor
Naruaki Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of FR2734946A1 publication Critical patent/FR2734946A1/fr
Application granted granted Critical
Publication of FR2734946B1 publication Critical patent/FR2734946B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
FR9606653A 1995-05-31 1996-05-30 Dispositif a cathode froide du type a emission de champ, a electrode emettrice conique, et procede de fabrication de ce dispositif Expired - Fee Related FR2734946B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13370395A JP2900837B2 (ja) 1995-05-31 1995-05-31 電界放射型冷陰極装置及びその製造方法

Publications (2)

Publication Number Publication Date
FR2734946A1 FR2734946A1 (fr) 1996-12-06
FR2734946B1 true FR2734946B1 (fr) 1998-11-27

Family

ID=15110921

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9606653A Expired - Fee Related FR2734946B1 (fr) 1995-05-31 1996-05-30 Dispositif a cathode froide du type a emission de champ, a electrode emettrice conique, et procede de fabrication de ce dispositif

Country Status (4)

Country Link
US (1) US5739628A (fr)
JP (1) JP2900837B2 (fr)
KR (1) KR100233692B1 (fr)
FR (1) FR2734946B1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69518849T2 (de) * 1995-12-14 2001-01-11 St Microelectronics Srl Verfahren zur Herstellung einer Mikrospitzenkathodenstruktur für eine Feldemissionsanzeigetafel
US5965898A (en) * 1997-09-25 1999-10-12 Fed Corporation High aspect ratio gated emitter structure, and method of making
JP3303908B2 (ja) 1997-12-03 2002-07-22 日本電気株式会社 微小冷陰極およびその製造方法
TW483025B (en) * 2000-10-24 2002-04-11 Nat Science Council Formation method of metal tip electrode field emission structure
JP3774682B2 (ja) * 2001-06-29 2006-05-17 キヤノン株式会社 電子放出素子、電子源および画像形成装置
US6628052B2 (en) * 2001-10-05 2003-09-30 Hewlett-Packard Development Company, L.P. Enhanced electron field emitter spindt tip and method for fabricating enhanced spindt tips
FR2836279B1 (fr) * 2002-02-19 2004-09-24 Commissariat Energie Atomique Structure de cathode pour ecran emissif
JP3848341B2 (ja) * 2004-06-29 2006-11-22 キヤノン株式会社 電子放出素子、電子源、画像表示装置、および映像受信表示装置、並びに電子放出素子の製造方法
JP6662895B2 (ja) * 2014-10-23 2020-03-11 イー／ジー エレクトログラフ インコーポレーテッドＥ／Ｇ Ｅｌｅｃｔｒｏｇｒａｐｈ Ｉｎｃ． 電極を製造する方法、電極、及び電極の表面に形成した堆積物の局所的破壊を生じさせる方法
CN107210101B (zh) * 2014-10-23 2019-06-04 E/G电图公司 电极、制造电极的方法及产生局部击穿的方法
US9903016B2 (en) 2014-10-23 2018-02-27 E/G Electro-Graph, Inc. Device having preformed triple junctions to maintain electrode conductivity and a method for making and using the device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01149351A (ja) * 1987-12-06 1989-06-12 Canon Inc 電子放出素子及びその製造方法
JP2626276B2 (ja) * 1991-02-06 1997-07-02 双葉電子工業株式会社 電子放出素子
JP3135131B2 (ja) * 1991-02-28 2001-02-13 キヤノン株式会社 電子放出素子
US5266530A (en) * 1991-11-08 1993-11-30 Bell Communications Research, Inc. Self-aligned gated electron field emitter
JPH05151887A (ja) * 1991-11-27 1993-06-18 Clarion Co Ltd 微小真空素子の作成方法
US5229331A (en) * 1992-02-14 1993-07-20 Micron Technology, Inc. Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology
JPH0652788A (ja) * 1992-07-28 1994-02-25 Sharp Corp 電界放出型電子源装置およびその製造方法
FR2709206B1 (fr) * 1993-06-14 2004-08-20 Fujitsu Ltd Dispositif cathode ayant une petite ouverture, et son procédé de fabrication.
US5394006A (en) * 1994-01-04 1995-02-28 Industrial Technology Research Institute Narrow gate opening manufacturing of gated fluid emitters

Also Published As

Publication number Publication date
US5739628A (en) 1998-04-14
KR960042876A (ko) 1996-12-21
JPH08329824A (ja) 1996-12-13
FR2734946A1 (fr) 1996-12-06
KR100233692B1 (ko) 1999-12-01
JP2900837B2 (ja) 1999-06-02

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Legal Events

Date Code Title Description
ST Notification of lapse