FR2648288B1 - Procede de fabrication d'actionneurs electrostrictifs, et articles ainsi obtenus - Google Patents

Procede de fabrication d'actionneurs electrostrictifs, et articles ainsi obtenus

Info

Publication number
FR2648288B1
FR2648288B1 FR9000301A FR9000301A FR2648288B1 FR 2648288 B1 FR2648288 B1 FR 2648288B1 FR 9000301 A FR9000301 A FR 9000301A FR 9000301 A FR9000301 A FR 9000301A FR 2648288 B1 FR2648288 B1 FR 2648288B1
Authority
FR
France
Prior art keywords
actuator
areas
stack
accordance
electrostrictive actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9000301A
Other languages
English (en)
Other versions
FR2648288A1 (fr
Inventor
Galvagni John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Avx Components Corp
Original Assignee
AVX Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AVX Corp filed Critical AVX Corp
Publication of FR2648288A1 publication Critical patent/FR2648288A1/fr
Application granted granted Critical
Publication of FR2648288B1 publication Critical patent/FR2648288B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
FR9000301A 1989-06-09 1990-01-11 Procede de fabrication d'actionneurs electrostrictifs, et articles ainsi obtenus Expired - Fee Related FR2648288B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/363,770 US4903166A (en) 1989-06-09 1989-06-09 Electrostrictive actuators

Publications (2)

Publication Number Publication Date
FR2648288A1 FR2648288A1 (fr) 1990-12-14
FR2648288B1 true FR2648288B1 (fr) 1997-12-12

Family

ID=23431654

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9000301A Expired - Fee Related FR2648288B1 (fr) 1989-06-09 1990-01-11 Procede de fabrication d'actionneurs electrostrictifs, et articles ainsi obtenus

Country Status (6)

Country Link
US (1) US4903166A (fr)
JP (1) JPH0311980A (fr)
CA (1) CA2001435C (fr)
DE (1) DE3940619A1 (fr)
FR (1) FR2648288B1 (fr)
GB (1) GB2232532B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2965602B2 (ja) * 1990-02-26 1999-10-18 日立金属株式会社 積層型変位素子
US5629578A (en) * 1995-03-20 1997-05-13 Martin Marietta Corp. Integrated composite acoustic transducer array
US5655209A (en) * 1995-03-28 1997-08-05 International Business Machines Corporation Multilayer ceramic substrates having internal capacitor, and process for producing same
DE19860001C2 (de) 1998-12-23 2001-10-04 Epcos Ag Piezoelektrisches Bauelement, Verfahren zu dessen Herstellung und Verwendung eines derartigen Bauelements
DE10152490A1 (de) * 2000-11-06 2002-05-08 Ceramtec Ag Außenelektroden an piezokeramischen Vielschichtaktoren
DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
EP1944814B1 (fr) * 2005-09-16 2011-11-09 Delphi Technologies Holding S.à.r.l. Actionneur piézoélectrique
DE102005051289B3 (de) * 2005-10-26 2007-05-16 Siemens Ag Piezoaktor und Verfahren zur Herstellung desselben
DE102006022600B4 (de) * 2006-05-15 2008-02-14 Siemens Ag Herstellungsverfahren eines Piezoaktors
WO2008047460A1 (fr) * 2006-10-20 2008-04-24 Kyocera Corporation Unité actionneur piézo-électrique et procédé de fabrication associé
CH706635A1 (de) * 2012-06-20 2013-12-31 Kistler Holding Ag Messelement, Messkörper und Messanordnung zum Messen einer Kraft und Verwendung eines solchen Messkörpers.
DE102012107341B4 (de) * 2012-08-09 2020-07-09 Tdk Electronics Ag Verfahren zum Befüllen von mindestens einer Kavität eines Vielschichtbauelements mit einem Füllmaterial
DE102012111023A1 (de) 2012-11-15 2014-05-15 Epcos Ag Vielschichtkondensator und Verfahren zur Herstellung eines Vielschichtkondensators
DE102013102278A1 (de) 2013-03-07 2014-09-11 Epcos Ag Kondensatoranordnung

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2437212A (en) * 1942-12-23 1948-03-02 Frederic D Schottland Electric condenser and method for making the same
US3322267A (en) * 1964-06-12 1967-05-30 Pantasote Company Of New York Multiple-cavity cookie container
US3679950A (en) * 1971-04-16 1972-07-25 Nl Industries Inc Ceramic capacitors
GB2029360A (en) * 1978-07-11 1980-03-19 Sharp Interpack Ltd Packaging
NO793003L (no) * 1978-09-22 1980-03-25 Torben Bredal Salgspakning av reklametypen.
DD151529A1 (de) * 1980-06-17 1981-10-21 Renate Gesemann Keramischer kondensator und verfahren zu dessen herstellung
DE3378393D1 (en) * 1982-05-11 1988-12-08 Nec Corp Multilayer electrostrictive element which withstands repeated application of pulses
US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
WO1984003079A1 (fr) * 1983-02-14 1984-08-16 Mayer Oskar Foods Emballage alimentaire et procede
JPS59218784A (ja) * 1983-05-26 1984-12-10 Nippon Soken Inc 積層セラミツク圧電体
JPS59231884A (ja) * 1983-06-15 1984-12-26 Nippon Soken Inc 積層形圧電体
JPS6066882A (ja) * 1983-09-22 1985-04-17 Murata Mfg Co Ltd 圧電変位素子およびその分極方法
JPS60176282A (ja) * 1984-02-22 1985-09-10 Toyota Motor Corp 積層型圧電磁器およびその製造方法
DE3434729A1 (de) * 1984-09-21 1986-04-03 Siemens AG, 1000 Berlin und 8000 München Biegeelement aus piezokeramik und verfahren zu seiner herstellung
US4685197A (en) * 1986-01-07 1987-08-11 Texas Instruments Incorporated Fabricating a stacked capacitor
JPS63174380A (ja) * 1987-01-13 1988-07-18 Nagai Denshi Kogyo Kyodo Kumiai 積層セラミツク圧電素子の製造方法
US4742912A (en) * 1987-04-24 1988-05-10 Noel Lee Package assembly
DE69031839T2 (de) * 1989-04-07 1998-05-07 Mitsui Petrochemical Ind Geschichtete Keramikanordnung und Verfahren zur deren Herstellung

Also Published As

Publication number Publication date
US4903166A (en) 1990-02-20
GB8924636D0 (en) 1989-12-20
GB2232532A (en) 1990-12-12
DE3940619A1 (de) 1990-12-13
FR2648288A1 (fr) 1990-12-14
JPH0311980A (ja) 1991-01-21
GB2232532B (en) 1994-03-16
CA2001435C (fr) 1993-09-21
CA2001435A1 (fr) 1990-12-09

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Legal Events

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