FR2641436A1 - - Google Patents

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Publication number
FR2641436A1
FR2641436A1 FR8817496A FR8817496A FR2641436A1 FR 2641436 A1 FR2641436 A1 FR 2641436A1 FR 8817496 A FR8817496 A FR 8817496A FR 8817496 A FR8817496 A FR 8817496A FR 2641436 A1 FR2641436 A1 FR 2641436A1
Authority
FR
France
Prior art keywords
tracks
disc
refractory
frame
mount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR8817496A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laboratoires dElectronique Philips SAS
Original Assignee
Laboratoires dElectronique et de Physique Appliquee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laboratoires dElectronique et de Physique Appliquee filed Critical Laboratoires dElectronique et de Physique Appliquee
Priority to FR8817496A priority Critical patent/FR2641436A1/fr
Priority to EP89203264A priority patent/EP0376387A1/fr
Priority to US07/462,872 priority patent/US5105066A/en
Priority to JP1344977A priority patent/JPH02232363A/ja
Publication of FR2641436A1 publication Critical patent/FR2641436A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7624—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0432—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/10—Arrangements for heating

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Surface Heating Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
FR8817496A 1988-12-30 1988-12-30 Withdrawn FR2641436A1 (https=)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8817496A FR2641436A1 (https=) 1988-12-30 1988-12-30
EP89203264A EP0376387A1 (fr) 1988-12-30 1989-12-20 Dispositif incluant un porte-échantillons chauffant
US07/462,872 US5105066A (en) 1988-12-30 1989-12-28 Device comprising a heating sample carrier
JP1344977A JPH02232363A (ja) 1988-12-30 1989-12-29 加熱サンプルキャリヤ付き装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8817496A FR2641436A1 (https=) 1988-12-30 1988-12-30

Publications (1)

Publication Number Publication Date
FR2641436A1 true FR2641436A1 (https=) 1990-07-06

Family

ID=9373633

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8817496A Withdrawn FR2641436A1 (https=) 1988-12-30 1988-12-30

Country Status (4)

Country Link
US (1) US5105066A (https=)
EP (1) EP0376387A1 (https=)
JP (1) JPH02232363A (https=)
FR (1) FR2641436A1 (https=)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69111493T2 (de) * 1990-03-12 1996-03-21 Ngk Insulators Ltd Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten.
US5166856A (en) * 1991-01-31 1992-11-24 International Business Machines Corporation Electrostatic chuck with diamond coating
US5191506A (en) * 1991-05-02 1993-03-02 International Business Machines Corporation Ceramic electrostatic chuck
US5155652A (en) * 1991-05-02 1992-10-13 International Business Machines Corporation Temperature cycling ceramic electrostatic chuck
US6180061B1 (en) 1992-05-11 2001-01-30 Cytologix Corporation Moving platform slide stainer with heating elements
US20040191128A1 (en) * 1992-05-11 2004-09-30 Cytologix Corporation Slide stainer with heating
US5237267A (en) * 1992-05-29 1993-08-17 Cascade Microtech, Inc. Wafer probe station having auxiliary chucks
US6582962B1 (en) * 1998-02-27 2003-06-24 Ventana Medical Systems, Inc. Automated molecular pathology apparatus having independent slide heaters
US6183693B1 (en) * 1998-02-27 2001-02-06 Cytologix Corporation Random access slide stainer with independent slide heating regulation
ES2354598T3 (es) 1998-02-27 2011-03-16 Ventana Medical Systems, Inc. Aparato de patología molecular automatizado que tiene calefactores de portaobjetos independientes.
US6242722B1 (en) * 1999-07-01 2001-06-05 Thermostone Usa, Llc Temperature controlled thin film circular heater
JP4398064B2 (ja) * 2000-05-12 2010-01-13 日本発條株式会社 加熱装置
JP4573980B2 (ja) * 2000-09-28 2010-11-04 京セラ株式会社 加熱装置およびウエハ処理装置
US7425306B1 (en) 2001-09-11 2008-09-16 Ventana Medical Systems, Inc. Slide heater
US7270785B1 (en) * 2001-11-02 2007-09-18 Ventana Medical Systems, Inc. Automated molecular pathology apparatus having fixed slide platforms
AU2003224987B2 (en) 2002-04-15 2009-09-10 Ventana Medical Systems, Inc. Automated high volume slide staining system
US7468161B2 (en) 2002-04-15 2008-12-23 Ventana Medical Systems, Inc. Automated high volume slide processing system
US11249095B2 (en) 2002-04-15 2022-02-15 Ventana Medical Systems, Inc. Automated high volume slide processing system
JP4091599B2 (ja) * 2002-04-26 2008-05-28 ヴェンタナ メディカル システムズ インコーポレイテッド 固定スライドプラットホームを有する自動化された分子病理学装置
US7025893B2 (en) * 2003-08-12 2006-04-11 Thermo Stone Usa, Llc Structure and method to compensate for thermal edge loss in thin film heaters
EP1697719B1 (en) 2003-12-23 2018-09-19 Ventana Medical Systems, Inc. Method and apparatus for efficient thin film fluid processing of flat surfaces
DE102006038925A1 (de) * 2006-08-18 2008-02-21 Forschungszentrum Jülich GmbH Vorrichtung zum Heizen einer Probe
ITUD20070156A1 (it) * 2007-09-04 2009-03-05 Baccini S P A Disositivo di posizionamento per posizionare uno o piu' wafer a base di silicio, in particolare per celle fotovoltaiche, in un'unita' di deposizione del metallo
ITUD20070198A1 (it) * 2007-10-24 2009-04-25 Baccini S P A Dispositivo di posizionamento per posizionare una o piu' piastre di circuiti elettronici, in un'unita' di deposizione del metallo, e relativo procedimento
ITUD20080141A1 (it) * 2008-06-19 2009-12-20 Baccini S P A Sistema di trasporto di precisione per stampa serigrafica
AU2009313985B2 (en) 2008-11-12 2014-07-31 Ventana Medical Systems, Inc. Methods and apparatuses for heating slides carrying specimens
EP3080579B1 (en) 2013-12-13 2022-07-27 Ventana Medical Systems, Inc. Automated slide processing apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59124140A (ja) * 1982-12-29 1984-07-18 Fujitsu Ltd 静電吸着装置
US4491173A (en) * 1982-05-28 1985-01-01 Temptronic Corporation Rotatable inspection table

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1406850A (en) * 1915-07-31 1922-02-14 Jr William S Hadaway Electric stove or heater
US1639382A (en) * 1926-06-08 1927-08-16 Frederick W Moffat Electric heating element
US2261496A (en) * 1938-11-23 1941-11-04 Arthur H Happe Electric heating unit
US2269689A (en) * 1941-01-08 1942-01-13 Reichold Ludwig Electric cooking vessel and stand
US2456202A (en) * 1945-11-26 1948-12-14 Lee Hoard Heating unit
US3047702A (en) * 1958-10-03 1962-07-31 Fredrick L Lefebvre Plate heater
DE2205132C3 (de) * 1972-02-03 1980-09-04 E.G.O. Elektro-Geraete Blanc U. Fischer, 7519 Oberderdingen Elektrokochgerät
US4196338A (en) * 1974-04-29 1980-04-01 Saint-Gobain Industries Electrically heated vehicle window
US4054939A (en) * 1975-06-06 1977-10-18 Elfab Corporation Multi-layer backpanel including metal plate ground and voltage planes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4491173A (en) * 1982-05-28 1985-01-01 Temptronic Corporation Rotatable inspection table
JPS59124140A (ja) * 1982-12-29 1984-07-18 Fujitsu Ltd 静電吸着装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 8, no. 247 (E-278)(1684) 13 novembre 1984, & JP-A-59 124140 (FUJITSU K.K.) 18 juillet 1984, *

Also Published As

Publication number Publication date
US5105066A (en) 1992-04-14
JPH02232363A (ja) 1990-09-14
EP0376387A1 (fr) 1990-07-04

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Legal Events

Date Code Title Description
CA Change of address
CD Change of name or company name
ER Errata listed in the french official journal (bopi)

Free format text: 27/90

ST Notification of lapse