FR2581178A1 - Capteur electrique pour mesurer des grandeurs mecaniques - Google Patents

Capteur electrique pour mesurer des grandeurs mecaniques Download PDF

Info

Publication number
FR2581178A1
FR2581178A1 FR8605976A FR8605976A FR2581178A1 FR 2581178 A1 FR2581178 A1 FR 2581178A1 FR 8605976 A FR8605976 A FR 8605976A FR 8605976 A FR8605976 A FR 8605976A FR 2581178 A1 FR2581178 A1 FR 2581178A1
Authority
FR
France
Prior art keywords
tongue
sensor according
source
sensor
carcass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8605976A
Other languages
English (en)
French (fr)
Inventor
Klaus Dietrich
Walter Kroy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
Messerschmitt Bolkow Blohm AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Messerschmitt Bolkow Blohm AG filed Critical Messerschmitt Bolkow Blohm AG
Publication of FR2581178A1 publication Critical patent/FR2581178A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/124—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by semiconductor devices comprising at least one PN junction, e.g. transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR8605976A 1985-04-27 1986-04-24 Capteur electrique pour mesurer des grandeurs mecaniques Pending FR2581178A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853515349 DE3515349A1 (de) 1985-04-27 1985-04-27 Elektrischer geber zur messung mechanischer groessen

Publications (1)

Publication Number Publication Date
FR2581178A1 true FR2581178A1 (fr) 1986-10-31

Family

ID=6269352

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8605976A Pending FR2581178A1 (fr) 1985-04-27 1986-04-24 Capteur electrique pour mesurer des grandeurs mecaniques

Country Status (4)

Country Link
US (1) US4772928A (enrdf_load_stackoverflow)
DE (1) DE3515349A1 (enrdf_load_stackoverflow)
FR (1) FR2581178A1 (enrdf_load_stackoverflow)
GB (1) GB2175744B (enrdf_load_stackoverflow)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4873871A (en) * 1988-06-17 1989-10-17 Motorola, Inc. Mechanical field effect transistor sensor
US5149673A (en) * 1989-02-21 1992-09-22 Cornell Research Foundation, Inc. Selective chemical vapor deposition of tungsten for microdynamic structures
US5072288A (en) * 1989-02-21 1991-12-10 Cornell Research Foundation, Inc. Microdynamic release structure
US4995261A (en) * 1989-04-03 1991-02-26 Sarcos Group Field-based movement sensing apparatus
US4964306A (en) * 1989-04-03 1990-10-23 Sarcos Group Field-based movement sensor
JP2532149B2 (ja) * 1990-02-06 1996-09-11 本田技研工業株式会社 半導体センサ
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
EP0543901B1 (en) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithic accelerometer
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5103279A (en) * 1990-10-18 1992-04-07 Motorola, Inc. Field effect transistor with acceleration dependent gain
US5481184A (en) * 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
JP2587147B2 (ja) * 1991-05-17 1997-03-05 本田技研工業株式会社 半導体センサ
US5223541A (en) * 1991-09-13 1993-06-29 Mcneilab, Inc. Tramadol n-oxide material, enantiomers and compositions thereof, and their use
US5397904A (en) * 1992-07-02 1995-03-14 Cornell Research Foundation, Inc. Transistor microstructure
US5399415A (en) * 1993-02-05 1995-03-21 Cornell Research Foundation, Inc. Isolated tungsten microelectromechanical structures
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US6199874B1 (en) 1993-05-26 2001-03-13 Cornell Research Foundation Inc. Microelectromechanical accelerometer for automotive applications
US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
DE4334080C2 (de) * 1993-10-06 1996-05-02 Telefunken Microelectron Piezoresistive Sensorstruktur
US5508231A (en) * 1994-03-07 1996-04-16 National Semiconductor Corporation Apparatus and method for achieving mechanical and thermal isolation of portions of integrated monolithic circuits
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
DE19529254A1 (de) * 1995-08-09 1997-02-13 Telefunken Microelectron Mikromechanischer Schalter
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
GB9800676D0 (en) * 1998-01-13 1998-03-11 Inertia Switch Ltd Acceleration responsive device
US6063200A (en) * 1998-02-10 2000-05-16 Sarcos L.C. Three-dimensional micro fabrication device for filamentary substrates
DE10029501C1 (de) * 2000-06-21 2001-10-04 Fraunhofer Ges Forschung Vertikal-Transistor mit beweglichen Gate und Verfahren zu dessen Herstelllung
EP3821220B1 (en) 2018-08-22 2024-11-13 University of Utah Research Foundation Force and torque sensor for prosthetic and orthopedic devices
US12070398B2 (en) 2018-08-28 2024-08-27 University Of Utah Research Foundation Variable transmission for assistive prosthesis device
JP7716113B2 (ja) 2020-03-20 2025-07-31 ユニバーシティ オブ ユタ リサーチ ファウンデーション 受動型および動力付き外骨格における自己整列機構

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1497909A (fr) * 1965-10-28 1967-10-13 Westinghouse Electric Corp Transducteur électro-mécanique
DE3013770A1 (de) * 1980-04-10 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Sensor
GB2101336A (en) * 1981-07-02 1983-01-12 Centre Electron Horloger Capacitive accelerometers
FR2558263A1 (fr) * 1984-01-12 1985-07-19 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1165295B (de) * 1960-05-19 1964-03-12 Commissariat Energie Atomique Vorrichtung zum Anzeigen und Registrieren von langsam veraenderlichen, kleinen Messgroessen zugeordneten Signalen
GB1088793A (en) * 1964-12-23 1967-10-25 Standard Telephones Cables Ltd Electromechanical transducer
US3413573A (en) * 1965-06-18 1968-11-26 Westinghouse Electric Corp Microelectronic frequency selective apparatus with vibratory member and means responsive thereto
GB1128318A (en) * 1965-10-28 1968-09-25 Westinghouse Electric Corp Electro-mechanical transducer
DE1251552B (enrdf_load_stackoverflow) * 1965-12-30 1967-10-05
GB1154679A (en) * 1967-03-13 1969-06-11 Ncr Co Magnetic Field Sensing Device.
US3533022A (en) * 1967-08-11 1970-10-06 Gen Electric Magnetically driven electromechanical filter with cantilevered resonator and variable q
US3585466A (en) * 1968-12-10 1971-06-15 Westinghouse Electric Corp Resonant gate transistor with improved gain having a vibratory member disposed in a spaced relationship between a field responsive member and a field plate
US3896309A (en) * 1973-05-21 1975-07-22 Westinghouse Electric Corp Radiation detecting device
DE3008573A1 (de) * 1980-03-06 1981-09-17 Robert Bosch Gmbh, 7000 Stuttgart Druckaufnehmer
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
EP0087264A3 (en) * 1982-02-19 1984-07-11 THE GENERAL ELECTRIC COMPANY, p.l.c. Force sensors
US4480488A (en) * 1982-02-19 1984-11-06 The General Electric Company, P.L.C. Force sensor with a piezoelectric FET
JPS6055655A (ja) * 1983-09-07 1985-03-30 Nissan Motor Co Ltd 梁構造体を有する半導体装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1497909A (fr) * 1965-10-28 1967-10-13 Westinghouse Electric Corp Transducteur électro-mécanique
DE3013770A1 (de) * 1980-04-10 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Sensor
GB2101336A (en) * 1981-07-02 1983-01-12 Centre Electron Horloger Capacitive accelerometers
FR2558263A1 (fr) * 1984-01-12 1985-07-19 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie

Also Published As

Publication number Publication date
GB2175744A (en) 1986-12-03
DE3515349C2 (enrdf_load_stackoverflow) 1990-05-31
DE3515349A1 (de) 1986-10-30
GB2175744B (en) 1988-05-25
US4772928A (en) 1988-09-20
GB8609881D0 (en) 1986-05-29

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