GB1088793A - Electromechanical transducer - Google Patents
Electromechanical transducerInfo
- Publication number
- GB1088793A GB1088793A GB5222564A GB5222564A GB1088793A GB 1088793 A GB1088793 A GB 1088793A GB 5222564 A GB5222564 A GB 5222564A GB 5222564 A GB5222564 A GB 5222564A GB 1088793 A GB1088793 A GB 1088793A
- Authority
- GB
- United Kingdom
- Prior art keywords
- biased
- electrode
- diaphragm
- junction
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004411 aluminium Substances 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000005513 bias potential Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 230000005686 electrostatic field Effects 0.000 abstract 1
- 230000005669 field effect Effects 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
Abstract
1,088,793. Semi-conductor devices. STANDARD TELEPHONES & CABLES Ltd. Dec. 17, 1965 [Dec. 23, 1964], No. 52225/64. Heading H1K. [Also in Division H4] A microphone or other transducer comprises a semi-conductor element biased for flow of electric current therein and a movable member spaced from the element, the member being biased with respect to the element to cause an electrostatic field to be set up in the element. Means responsive to an applied mechanical force is provided to vary the spacing of the member from the element. The strength of the field in the element varies in accordance with the spacing of the member from the element and so varies the value of the electric current flowing in the element. In one microphone (Fig. 3) a field effect transistor has a movable gate electrode comprising an aluminium layer 21 evaporated on a dielectric diaphragm 22 fastened at its edge to the microphone enclosure. Two P-type regions 16, of side-by-side strip configuration (Fig. 6, not shown), are diffused in an N-type block 14 and block 14 is covered by slicon oxide insulation 17, as is half of each region 16. A metal coating 18 connects one P-type region 16 to a positive potential 19 (source) to which is also connected block 14. The other P-type region is connected to a negative potential 20 (drain). In a modification, Figs. 4, 5 (not shown) the P-type regions are formed as a central region (16a) and a surrounding annular region (16b). The gate electrode is an annular layer (21). In each embodiment an aluminium strip 23 extends from the layer 21 to the edge of the diaphragm 22 for connection to a bias potential 24. In another embodiment, Fig. 1 (not shown) the reverse biased P-N junction of a planar epitaxial transistor has a biased electrode (4) near the base-collector junction. The biased electrode (4) is coupled to a diaphragm. An electrical output signal is taken from a resistor (6) in series between base (1) and collector (2). A similar effect is obtained by using the junction between emitter (7) and base (1). Alternatively a P-N junction diode (8), Fig. 2 (not shown, is reverse biased by a battery (9). A movable electrode (10) fastened to a diaphragm (11) is biased by a battery (12) and an ou put signal responsive to the modulation of the spacing of the electrode (10) is taken from a resistance (13) in series between the positive and negative electrodes of the diode.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1017267A GB1088794A (en) | 1964-12-23 | 1964-12-23 | Improvements in or relating to semiconductor devices |
GB5222564A GB1088793A (en) | 1964-12-23 | 1964-12-23 | Electromechanical transducer |
DE19651462161 DE1462161B2 (en) | 1964-12-23 | 1965-12-07 | Pressure sensitive semiconductor device |
CH1758465A CH460956A (en) | 1964-12-23 | 1965-12-21 | Field effect semiconductor device and its use as an electromechanical converter |
BE674221D BE674221A (en) | 1964-12-23 | 1965-12-23 | |
FR43495A FR1461244A (en) | 1964-12-23 | 1965-12-23 | Improvements to electromechanical transducers |
NL6516784A NL6516784A (en) | 1964-12-23 | 1965-12-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5222564A GB1088793A (en) | 1964-12-23 | 1964-12-23 | Electromechanical transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1088793A true GB1088793A (en) | 1967-10-25 |
Family
ID=10463108
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1017267A Expired GB1088794A (en) | 1964-12-23 | 1964-12-23 | Improvements in or relating to semiconductor devices |
GB5222564A Expired GB1088793A (en) | 1964-12-23 | 1964-12-23 | Electromechanical transducer |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1017267A Expired GB1088794A (en) | 1964-12-23 | 1964-12-23 | Improvements in or relating to semiconductor devices |
Country Status (6)
Country | Link |
---|---|
BE (1) | BE674221A (en) |
CH (1) | CH460956A (en) |
DE (1) | DE1462161B2 (en) |
FR (1) | FR1461244A (en) |
GB (2) | GB1088794A (en) |
NL (1) | NL6516784A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4480488A (en) * | 1982-02-19 | 1984-11-06 | The General Electric Company, P.L.C. | Force sensor with a piezoelectric FET |
GB2175744A (en) * | 1985-04-27 | 1986-12-03 | Messerschmitt Boelkow Blohm | An electrical transmitter for measuring mechanical variables |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8503574A (en) * | 1985-12-24 | 1987-07-16 | Sentron V O F | PRESSURE SENSOR. |
US4767973A (en) * | 1987-07-06 | 1988-08-30 | Sarcos Incorporated | Systems and methods for sensing position and movement |
US5198740A (en) * | 1989-10-04 | 1993-03-30 | University Of Utah Research Foundation | Sliding contact mechanical/electrical displacement transducer |
-
1964
- 1964-12-23 GB GB1017267A patent/GB1088794A/en not_active Expired
- 1964-12-23 GB GB5222564A patent/GB1088793A/en not_active Expired
-
1965
- 1965-12-07 DE DE19651462161 patent/DE1462161B2/en active Pending
- 1965-12-21 CH CH1758465A patent/CH460956A/en unknown
- 1965-12-23 FR FR43495A patent/FR1461244A/en not_active Expired
- 1965-12-23 NL NL6516784A patent/NL6516784A/xx unknown
- 1965-12-23 BE BE674221D patent/BE674221A/xx unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4480488A (en) * | 1982-02-19 | 1984-11-06 | The General Electric Company, P.L.C. | Force sensor with a piezoelectric FET |
GB2175744A (en) * | 1985-04-27 | 1986-12-03 | Messerschmitt Boelkow Blohm | An electrical transmitter for measuring mechanical variables |
US4772928A (en) * | 1985-04-27 | 1988-09-20 | Messerschmitt-Bolkow-Blohm Gmbh | Electric transducer for measuring mechanical quantities |
Also Published As
Publication number | Publication date |
---|---|
BE674221A (en) | 1966-06-23 |
NL6516784A (en) | 1966-06-24 |
DE1462161B2 (en) | 1970-05-21 |
DE1462161A1 (en) | 1969-04-17 |
FR1461244A (en) | 1966-12-10 |
CH460956A (en) | 1968-08-15 |
GB1088794A (en) | 1967-10-25 |
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