FR2568720A1 - Procede et dispositif de commande de l'etat de focalisation d'un faisceau d'electrons devie - Google Patents

Procede et dispositif de commande de l'etat de focalisation d'un faisceau d'electrons devie Download PDF

Info

Publication number
FR2568720A1
FR2568720A1 FR8511906A FR8511906A FR2568720A1 FR 2568720 A1 FR2568720 A1 FR 2568720A1 FR 8511906 A FR8511906 A FR 8511906A FR 8511906 A FR8511906 A FR 8511906A FR 2568720 A1 FR2568720 A1 FR 2568720A1
Authority
FR
France
Prior art keywords
focusing
positions
electron beam
unit
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8511906A
Other languages
English (en)
French (fr)
Inventor
Volker Bauer
Walter Dietrich
Horst Ranke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2568720A1 publication Critical patent/FR2568720A1/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
FR8511906A 1984-08-04 1985-08-02 Procede et dispositif de commande de l'etat de focalisation d'un faisceau d'electrons devie Pending FR2568720A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843428802 DE3428802A1 (de) 1984-08-04 1984-08-04 Verfahren und vorrichtung zur steuerung des fokussierungszustandes eines abgelenkten elektronenstrahls

Publications (1)

Publication Number Publication Date
FR2568720A1 true FR2568720A1 (fr) 1986-02-07

Family

ID=6242366

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8511906A Pending FR2568720A1 (fr) 1984-08-04 1985-08-02 Procede et dispositif de commande de l'etat de focalisation d'un faisceau d'electrons devie

Country Status (4)

Country Link
JP (1) JPS6142845A (enrdf_load_stackoverflow)
DE (1) DE3428802A1 (enrdf_load_stackoverflow)
FR (1) FR2568720A1 (enrdf_load_stackoverflow)
GB (1) GB2164174B (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE108283T1 (de) * 1988-11-10 1994-07-15 Balzers Hochvakuum Verfahren zur steuerung der verdampfungsratenverteilung eines elektronenstrahls.
GB2241594B (en) * 1990-03-02 1993-09-01 Rolls Royce Plc Improvements in or relating to laser drilling of components
DE4028842C2 (de) * 1990-09-11 1995-10-26 Balzers Hochvakuum Verfahren und Anordnung zur Steuerung der Bedampfungsstromdichte und/oder deren Verteilung
DE4113364C1 (enrdf_load_stackoverflow) * 1991-04-24 1992-04-02 Forschungsgesellschaft Fuer Elektronenstrahl- Und Plasmatechnik Mbh, O-8051 Dresden, De
DE10004389C5 (de) * 2000-02-02 2010-09-09 Pro-Beam Ag & Co. Kgaa Verfahren zum Schweißen mittels Elektronenstrahl
CN106425076B (zh) * 2016-11-29 2017-10-20 桂林狮达机电技术工程有限公司 电子束焊机焊缝示教寻迹方法及系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0030347A2 (en) * 1979-12-10 1981-06-17 Fujitsu Limited Electron beam exposure system and apparatus for carrying out the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1064168B (de) * 1958-06-20 1959-08-27 Zeiss Carl Fa Einrichtung zur Erzeugung und Formung eines Ladungstraegerstrahles
US3582529A (en) * 1969-09-24 1971-06-01 Air Reduction Electron beam heating apparatus and control system therein
DE2519537C2 (de) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen
GB2011765A (en) * 1977-12-29 1979-07-11 Plessey Co Ltd Improvements in or relating to display arrangements
DE2812285C2 (de) * 1978-03-21 1986-05-15 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum Verdampfen von Legierungsschmelzen aus Metallen mit voneinander abweichenden Dampfdrücken
JPS5577144A (en) * 1978-12-07 1980-06-10 Jeol Ltd Electron beam exposure method
JPS5628433A (en) * 1979-08-15 1981-03-20 Erionikusu:Kk Display distortion corrector for electron beam device
JPS5750756A (en) * 1980-09-12 1982-03-25 Jeol Ltd Objective lens current control method for scan type electron microscope
JPS5957431A (ja) * 1982-09-27 1984-04-03 Fujitsu Ltd 電子ビ−ム露光装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0030347A2 (en) * 1979-12-10 1981-06-17 Fujitsu Limited Electron beam exposure system and apparatus for carrying out the same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PROCEEDINGS OF THE SYMPOSIUM ON ELECTRON AND ION BEAM SCIENCE AND TECHNOLOGY, EIGHTH INTERNATIONAL CONFERENCE, vol. 78, no. 5, 1979, pages 44-56, The Electrochemical Society, Inc., Princeton, US; R. VISWANATHAN: "DISTORTION CORRECTION IN SCANNING ELECTRON BEAM SYSTEMS" *
RADIO ENGINEERING AND ELECTRONIC PHYSICS, vol. 14, no. 11, novembre 1969, pages 1804-1807; G.V. DER-SHVARTS et al.: "An electron-optical narrow beam system with magnetic deflection, astigmatism correction and curvature defocusing of the deflected beam" *

Also Published As

Publication number Publication date
GB2164174A (en) 1986-03-12
DE3428802A1 (de) 1986-02-13
GB8515695D0 (en) 1985-07-24
JPS6142845A (ja) 1986-03-01
DE3428802C2 (enrdf_load_stackoverflow) 1992-11-19
GB2164174B (en) 1988-10-05

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