FR2563749B1 - Catalyseur de dismutation de chlorosilane et procede de production d'un compose de silane a l'aide d'un tel catalyseur - Google Patents

Catalyseur de dismutation de chlorosilane et procede de production d'un compose de silane a l'aide d'un tel catalyseur

Info

Publication number
FR2563749B1
FR2563749B1 FR8505120A FR8505120A FR2563749B1 FR 2563749 B1 FR2563749 B1 FR 2563749B1 FR 8505120 A FR8505120 A FR 8505120A FR 8505120 A FR8505120 A FR 8505120A FR 2563749 B1 FR2563749 B1 FR 2563749B1
Authority
FR
France
Prior art keywords
catalyst
chlorosilane
producing
silane compound
dismutation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8505120A
Other languages
English (en)
Other versions
FR2563749A1 (fr
Inventor
Mitsunori Yamada
Masaji Ishii
Akira Miyai
Yukihiko Nakajima
Shinsei Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6748884A external-priority patent/JPS60212231A/ja
Priority claimed from JP59067490A external-priority patent/JPS60215513A/ja
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Publication of FR2563749A1 publication Critical patent/FR2563749A1/fr
Application granted granted Critical
Publication of FR2563749B1 publication Critical patent/FR2563749B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14—Fractional distillation or use of a fractionation or rectification column
    • B01D3/32—Other features of fractionating columns ; Constructional details of fractionating columns not provided for in groups B01D3/16 - B01D3/30
    • B01D3/322—Reboiler specifications
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
FR8505120A 1984-04-06 1985-04-04 Catalyseur de dismutation de chlorosilane et procede de production d'un compose de silane a l'aide d'un tel catalyseur Expired - Lifetime FR2563749B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6748884A JPS60212231A (ja) 1984-04-06 1984-04-06 クロルシラン不均化触媒及び不均化方法
JP59067490A JPS60215513A (ja) 1984-04-06 1984-04-06 シラン化合物の連続的製造方法

Publications (2)

Publication Number Publication Date
FR2563749A1 FR2563749A1 (fr) 1985-11-08
FR2563749B1 true FR2563749B1 (fr) 1993-05-28

Family

ID=26408708

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8505120A Expired - Lifetime FR2563749B1 (fr) 1984-04-06 1985-04-04 Catalyseur de dismutation de chlorosilane et procede de production d'un compose de silane a l'aide d'un tel catalyseur

Country Status (2)

Country Link
US (1) US4610858A (fr)
FR (1) FR2563749B1 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0213215B2 (fr) * 1985-08-12 1994-04-13 Denki Kagaku Kogyo Kabushiki Kaisha Catalyseur de dismutation de chlorosilane et procédé de production d'un composé de silane à l'aide d'un tel catalyseur
US5118485A (en) * 1988-03-25 1992-06-02 Hemlock Semiconductor Corporation Recovery of lower-boiling silanes in a cvd process
DE3925357C1 (fr) * 1989-07-31 1991-04-25 Degussa Ag, 6000 Frankfurt, De
US5589116A (en) * 1991-07-18 1996-12-31 Sumitomo Metal Industries, Ltd. Process for preparing a silicon carbide sintered body for use in semiconductor equipment
JP2565024B2 (ja) * 1991-07-18 1996-12-18 住友金属工業株式会社 半導体治具用炭化珪素粉末の製造方法
DE19860146A1 (de) * 1998-12-24 2000-06-29 Bayer Ag Verfahren und Anlage zur Herstellung von Silan
CN101511732B (zh) * 2006-09-27 2011-12-07 电气化学工业株式会社 甲硅烷的连续式制造方法
US20100124525A1 (en) * 2008-11-19 2010-05-20 Kuyen Li ZERO-HEAT-BURDEN FLUIDIZED BED REACTOR FOR HYDRO-CHLORINATION OF SiCl4 and M.G.-Si
US20100150809A1 (en) * 2008-12-11 2010-06-17 Bill Jr Jon M enhancements for a chlorosilane redistribution reactor
MY156599A (en) * 2008-12-25 2016-03-15 Tokuyama Corp Method of producing chlorosilane
DE102009032833A1 (de) * 2009-07-08 2011-01-13 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Monosilan
WO2011094938A1 (fr) * 2010-02-04 2011-08-11 南京工业大学 Procédé de dépoussiérage à sec dans la production de chlorosilanes organiques
EP2426088A1 (fr) 2010-09-03 2012-03-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé pour la production de monosilane à partir de dichlorosilane
US8524048B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Processes for recovering silane from heavy-ends separation operations
US8524044B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Systems for recovering silane from heavy-ends separation operations
US8524045B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Systems for purifying silane
KR102012535B1 (ko) 2011-12-30 2019-08-20 코너 스타 리미티드 실란의 정제를 위한 방법 및 시스템
CN102874817B (zh) * 2012-09-14 2014-10-08 浙江精功新材料技术有限公司 一种二氯二氢硅歧化制备硅烷的方法
EP2991930A4 (fr) 2013-05-04 2016-12-21 Sitec Gmbh Système et procédé de production de silane
US9352971B2 (en) * 2013-06-14 2016-05-31 Rec Silicon Inc Method and apparatus for production of silane and hydrohalosilanes
WO2015006173A1 (fr) * 2013-07-12 2015-01-15 Centrotherm Photovoltaics Usa, Inc. Récupération du chlorosilane dans des courants gazeux
CN113651844B (zh) * 2021-08-20 2023-09-12 唐山偶联硅业有限公司 连续法制备二甲基氢氯硅烷的工艺
EP4317062A1 (fr) 2022-08-02 2024-02-07 Alexander Lygin Procédé optimisé de dépôt de silicium

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2834648A (en) * 1953-03-25 1958-05-13 Union Carbide Corp Disproportionation of chlorosilanes employing amine-type catalysts
GB761205A (en) * 1953-11-13 1956-11-14 Gen Electric Improvements relating to the disproportionation of halogenosilanes
DE2132335A1 (de) * 1970-06-30 1972-01-05 Union Carbide Corp Verfahren zur Herstellung von Umverteilungsprodukten (Disproportionierungsprodukten)von Halogensilanverbindungen
BE784818A (fr) * 1971-06-14 1972-12-13 Westinghouse Electric Corp Etalonnage du profil de deplacement de la position d'un entrainement par moteur
FR2290447A1 (fr) * 1974-11-07 1976-06-04 Rhone Poulenc Ind Dismutation du trichlorosilane en presence de pyrrolidone n substituee
US4395389A (en) * 1982-03-01 1983-07-26 Ethyl Corporation Chlorosilane disproportionation process

Also Published As

Publication number Publication date
US4610858A (en) 1986-09-09
FR2563749A1 (fr) 1985-11-08

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