FR2553505B1 - Procede pour la determination du diametre de micropores - Google Patents

Procede pour la determination du diametre de micropores

Info

Publication number
FR2553505B1
FR2553505B1 FR848404017A FR8404017A FR2553505B1 FR 2553505 B1 FR2553505 B1 FR 2553505B1 FR 848404017 A FR848404017 A FR 848404017A FR 8404017 A FR8404017 A FR 8404017A FR 2553505 B1 FR2553505 B1 FR 2553505B1
Authority
FR
France
Prior art keywords
micropores
determining
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR848404017A
Other languages
English (en)
French (fr)
Other versions
FR2553505A1 (fr
Inventor
Reimar Spohr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GSI Helmholtzzentrum fuer Schwerionenforschung GmbH
Original Assignee
GSI Helmholtzzentrum fuer Schwerionenforschung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GSI Helmholtzzentrum fuer Schwerionenforschung GmbH filed Critical GSI Helmholtzzentrum fuer Schwerionenforschung GmbH
Publication of FR2553505A1 publication Critical patent/FR2553505A1/fr
Application granted granted Critical
Publication of FR2553505B1 publication Critical patent/FR2553505B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
FR848404017A 1983-10-13 1984-03-15 Procede pour la determination du diametre de micropores Expired - Lifetime FR2553505B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833337227 DE3337227A1 (de) 1983-10-13 1983-10-13 Verfahren zum bestimmen des durchmessers von mikroloechern

Publications (2)

Publication Number Publication Date
FR2553505A1 FR2553505A1 (fr) 1985-04-19
FR2553505B1 true FR2553505B1 (fr) 1991-12-13

Family

ID=6211717

Family Applications (1)

Application Number Title Priority Date Filing Date
FR848404017A Expired - Lifetime FR2553505B1 (fr) 1983-10-13 1984-03-15 Procede pour la determination du diametre de micropores

Country Status (3)

Country Link
US (1) US4725332A (enExample)
DE (1) DE3337227A1 (enExample)
FR (1) FR2553505B1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6199249A (ja) * 1984-10-18 1986-05-17 Matsushita Electronics Corp 受像管装置
DE68925774T2 (de) * 1988-10-02 1996-08-08 Canon Kk Feinbearbeitungsmethode für kristallines Material
US5086248A (en) * 1989-08-18 1992-02-04 Galileo Electro-Optics Corporation Microchannel electron multipliers
US5205902A (en) * 1989-08-18 1993-04-27 Galileo Electro-Optics Corporation Method of manufacturing microchannel electron multipliers
US4988877A (en) * 1989-10-03 1991-01-29 Tencor Instruments Via hole checker
US5296090A (en) * 1991-12-03 1994-03-22 New England Medical Center Hospitals, Inc. High resolution track etch autoradiography
US5264328A (en) * 1992-04-24 1993-11-23 International Business Machines Corporation Resist development endpoint detection for X-ray lithography
US5458731A (en) * 1994-02-04 1995-10-17 Fujitsu Limited Method for fast and non-destructive examination of etched features
US5904846A (en) * 1996-01-16 1999-05-18 Corning Costar Corporation Filter cartridge having track etched membranes and methods of making same
JP2873930B2 (ja) * 1996-02-13 1999-03-24 工業技術院長 カーボンナノチューブを有する炭素質固体構造体、炭素質固体構造体からなる電子線源素子用電子放出体、及び炭素質固体構造体の製造方法
US7154086B2 (en) * 2003-03-19 2006-12-26 Burle Technologies, Inc. Conductive tube for use as a reflectron lens
US20080073516A1 (en) * 2006-03-10 2008-03-27 Laprade Bruce N Resistive glass structures used to shape electric fields in analytical instruments

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303085A (en) * 1962-02-28 1967-02-07 Gen Electric Molecular sieves and methods for producing same
US3612871A (en) * 1969-04-01 1971-10-12 Gen Electric Method for making visible radiation damage tracks in track registration materials
US3852134A (en) * 1969-05-05 1974-12-03 Gen Electric Method for forming selectively perforate bodies
US3677844A (en) * 1970-11-19 1972-07-18 Gen Electric Process for making an elastic stretchy sheet containing apertures having a diameter of at least five angstroms and being suitable as a molecular sieve
DE2717400C2 (de) * 1977-04-20 1979-06-21 Gesellschaft Fuer Schwerionenforschung Mbh, 6100 Darmstadt Ätzverfahren zur Herstellung von Strukturen unterschiedlicher Höhe
DD149845A3 (de) * 1979-04-05 1981-08-05 Hans B Lueck Verfahren zur steuerung der porendurchmesser bei der aetzung von teilchenspuren
DE2951376C2 (de) * 1979-12-20 1983-09-15 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Verfahren zur Erzeugung einer Kernspur oder einer Vielzahl von Kernspuren von schweren Ionen und von aus den Kernspuren durch Ätzung gebildeten Mikrolöchern, sowie Vorrichtung zur Durchführung des Verfahrens

Also Published As

Publication number Publication date
US4725332A (en) 1988-02-16
DE3337227A1 (de) 1985-04-25
DE3337227C2 (enExample) 1988-03-10
FR2553505A1 (fr) 1985-04-19

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Legal Events

Date Code Title Description
ST Notification of lapse