FR2553505B1 - Procede pour la determination du diametre de micropores - Google Patents
Procede pour la determination du diametre de microporesInfo
- Publication number
- FR2553505B1 FR2553505B1 FR848404017A FR8404017A FR2553505B1 FR 2553505 B1 FR2553505 B1 FR 2553505B1 FR 848404017 A FR848404017 A FR 848404017A FR 8404017 A FR8404017 A FR 8404017A FR 2553505 B1 FR2553505 B1 FR 2553505B1
- Authority
- FR
- France
- Prior art keywords
- micropores
- determining
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Dispersion Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833337227 DE3337227A1 (de) | 1983-10-13 | 1983-10-13 | Verfahren zum bestimmen des durchmessers von mikroloechern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2553505A1 FR2553505A1 (fr) | 1985-04-19 |
| FR2553505B1 true FR2553505B1 (fr) | 1991-12-13 |
Family
ID=6211717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR848404017A Expired - Lifetime FR2553505B1 (fr) | 1983-10-13 | 1984-03-15 | Procede pour la determination du diametre de micropores |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4725332A (enExample) |
| DE (1) | DE3337227A1 (enExample) |
| FR (1) | FR2553505B1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6199249A (ja) * | 1984-10-18 | 1986-05-17 | Matsushita Electronics Corp | 受像管装置 |
| DE68925774T2 (de) * | 1988-10-02 | 1996-08-08 | Canon Kk | Feinbearbeitungsmethode für kristallines Material |
| US5086248A (en) * | 1989-08-18 | 1992-02-04 | Galileo Electro-Optics Corporation | Microchannel electron multipliers |
| US5205902A (en) * | 1989-08-18 | 1993-04-27 | Galileo Electro-Optics Corporation | Method of manufacturing microchannel electron multipliers |
| US4988877A (en) * | 1989-10-03 | 1991-01-29 | Tencor Instruments | Via hole checker |
| US5296090A (en) * | 1991-12-03 | 1994-03-22 | New England Medical Center Hospitals, Inc. | High resolution track etch autoradiography |
| US5264328A (en) * | 1992-04-24 | 1993-11-23 | International Business Machines Corporation | Resist development endpoint detection for X-ray lithography |
| US5458731A (en) * | 1994-02-04 | 1995-10-17 | Fujitsu Limited | Method for fast and non-destructive examination of etched features |
| US5904846A (en) * | 1996-01-16 | 1999-05-18 | Corning Costar Corporation | Filter cartridge having track etched membranes and methods of making same |
| JP2873930B2 (ja) * | 1996-02-13 | 1999-03-24 | 工業技術院長 | カーボンナノチューブを有する炭素質固体構造体、炭素質固体構造体からなる電子線源素子用電子放出体、及び炭素質固体構造体の製造方法 |
| US7154086B2 (en) * | 2003-03-19 | 2006-12-26 | Burle Technologies, Inc. | Conductive tube for use as a reflectron lens |
| US20080073516A1 (en) * | 2006-03-10 | 2008-03-27 | Laprade Bruce N | Resistive glass structures used to shape electric fields in analytical instruments |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3303085A (en) * | 1962-02-28 | 1967-02-07 | Gen Electric | Molecular sieves and methods for producing same |
| US3612871A (en) * | 1969-04-01 | 1971-10-12 | Gen Electric | Method for making visible radiation damage tracks in track registration materials |
| US3852134A (en) * | 1969-05-05 | 1974-12-03 | Gen Electric | Method for forming selectively perforate bodies |
| US3677844A (en) * | 1970-11-19 | 1972-07-18 | Gen Electric | Process for making an elastic stretchy sheet containing apertures having a diameter of at least five angstroms and being suitable as a molecular sieve |
| DE2717400C2 (de) * | 1977-04-20 | 1979-06-21 | Gesellschaft Fuer Schwerionenforschung Mbh, 6100 Darmstadt | Ätzverfahren zur Herstellung von Strukturen unterschiedlicher Höhe |
| DD149845A3 (de) * | 1979-04-05 | 1981-08-05 | Hans B Lueck | Verfahren zur steuerung der porendurchmesser bei der aetzung von teilchenspuren |
| DE2951376C2 (de) * | 1979-12-20 | 1983-09-15 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Verfahren zur Erzeugung einer Kernspur oder einer Vielzahl von Kernspuren von schweren Ionen und von aus den Kernspuren durch Ätzung gebildeten Mikrolöchern, sowie Vorrichtung zur Durchführung des Verfahrens |
-
1983
- 1983-10-13 DE DE19833337227 patent/DE3337227A1/de active Granted
-
1984
- 1984-03-15 FR FR848404017A patent/FR2553505B1/fr not_active Expired - Lifetime
-
1986
- 1986-11-20 US US06/933,279 patent/US4725332A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US4725332A (en) | 1988-02-16 |
| DE3337227A1 (de) | 1985-04-25 |
| DE3337227C2 (enExample) | 1988-03-10 |
| FR2553505A1 (fr) | 1985-04-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |