FR2548449A1 - Chariot de transport de cassettes de plaquettes semi-conductrices avec acces a travers la base - Google Patents

Chariot de transport de cassettes de plaquettes semi-conductrices avec acces a travers la base Download PDF

Info

Publication number
FR2548449A1
FR2548449A1 FR8407895A FR8407895A FR2548449A1 FR 2548449 A1 FR2548449 A1 FR 2548449A1 FR 8407895 A FR8407895 A FR 8407895A FR 8407895 A FR8407895 A FR 8407895A FR 2548449 A1 FR2548449 A1 FR 2548449A1
Authority
FR
France
Prior art keywords
cassette
trolley according
rails
trolley
linear bearings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR8407895A
Other languages
English (en)
French (fr)
Inventor
Martin Albert Hutchinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of FR2548449A1 publication Critical patent/FR2548449A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Conveyors (AREA)
FR8407895A 1983-05-20 1984-05-21 Chariot de transport de cassettes de plaquettes semi-conductrices avec acces a travers la base Withdrawn FR2548449A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49676883A 1983-05-20 1983-05-20

Publications (1)

Publication Number Publication Date
FR2548449A1 true FR2548449A1 (fr) 1985-01-04

Family

ID=23974053

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8407895A Withdrawn FR2548449A1 (fr) 1983-05-20 1984-05-21 Chariot de transport de cassettes de plaquettes semi-conductrices avec acces a travers la base

Country Status (4)

Country Link
JP (1) JPS59220445A (ja)
DE (1) DE3418244A1 (ja)
FR (1) FR2548449A1 (ja)
GB (1) GB2141681A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0250990A1 (en) * 1986-06-26 1988-01-07 Fujitsu Limited Wafer transfer apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0261410A1 (de) * 1986-08-22 1988-03-30 Trapp, Hans-Jürgen, Dr.-Ing. Vorrichtung zum Lagern von Datenträger-Einheiten, wie Magnetband-Kassetten, in einer Regaleinrichtung
ES2043946T3 (es) * 1988-06-02 1994-01-01 Trapp Hans Juergen Dispositivo para el almacenamiento de articulos.
GB9303740D0 (en) * 1993-02-24 1993-04-14 H W F Number Two Hundred And T Apparatus for remotely deploying a camera
DE19845504A1 (de) 1998-10-02 2000-04-20 Wacker Siltronic Halbleitermat Hordenaufnahmevorrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2136421A5 (ja) * 1971-04-15 1972-12-22 Mij Voor Ind
GB2066570A (en) * 1979-12-21 1981-07-08 Varian Associates Wafer transfer system
DE3227525A1 (de) * 1981-10-01 1983-04-21 Jenoptik Jena Gmbh, Ddr 6900 Jena Reibraedergetriebe zum antrieb eines rotierenden oder laengsverschieblichen teils

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2453751C3 (de) * 1974-11-13 1978-05-24 Maschinenfabrik Scharf Gmbh, 4700 Hamm Schienenhängebahn für das Befahren von Bergbaustrecken
US4435724A (en) * 1981-09-10 1984-03-06 Wells Electronics, Inc. Single piece carrier for integrated circuit devices

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2136421A5 (ja) * 1971-04-15 1972-12-22 Mij Voor Ind
GB2066570A (en) * 1979-12-21 1981-07-08 Varian Associates Wafer transfer system
DE3227525A1 (de) * 1981-10-01 1983-04-21 Jenoptik Jena Gmbh, Ddr 6900 Jena Reibraedergetriebe zum antrieb eines rotierenden oder laengsverschieblichen teils

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0250990A1 (en) * 1986-06-26 1988-01-07 Fujitsu Limited Wafer transfer apparatus
US4744715A (en) * 1986-06-26 1988-05-17 Fujitsu Limited Wafer transfer apparatus

Also Published As

Publication number Publication date
JPS59220445A (ja) 1984-12-11
GB2141681A (en) 1985-01-03
GB8412730D0 (en) 1984-06-27
DE3418244A1 (de) 1984-11-22

Similar Documents

Publication Publication Date Title
US6435330B1 (en) In/out load port transfer mechanism
US6494308B2 (en) Integrated roller transport pod and asynchronous conveyor
WO1986006245A1 (fr) Installation de manutention d'objets fragiles en atmosphere a empoussierement controle
EP0091058B1 (fr) Dispositif et procédé pour le rangement et/ou la mise à disposition d'objets
US4597708A (en) Wafer handling apparatus
FR2559139A1 (fr) Chariot, en particulier pour machines de triage, avec plateau inclinable actionne independamment
US20020108842A1 (en) Integrated transport carrier and conveyor system
CA3010672C (fr) Systeme de convoyage de supports pour recipients d'echantillons de liquide biologique, et systeme d'analyse automatique comprenant un tel systeme de convoyage
FR2568838A1 (fr) Installation de triage de produits avec chariots autotractes
EP0593367B1 (fr) Système de stockage et de transport d'objets plats tels que des boítes extra-plates et son ratelier portatif
FR2546328A1 (fr) Dispositif de transport automatique de cassettes avec filtration des particules a haute efficacite
FR2518906A1 (fr) Dispositif de selection et de triage avec elements transporteurs, commandes independamment, pour un dechargement
FR2548449A1 (fr) Chariot de transport de cassettes de plaquettes semi-conductrices avec acces a travers la base
JPH11180505A (ja) 有軌道台車システム
EP0454555B1 (fr) Rampe soufflante
FR2735150A1 (fr) Systeme convoyeur de pots
FR2667101A1 (fr) Systeme de stockage, applicable aux parcs de stationnement, et procede de transfert.
BE1003960A7 (fr) Procede et ensemble transporteur pour l'assemblage d'elements sur une base.
FR2593941A1 (fr) Appareil et procede pour commander un chariot a commande automatique
JP2003118826A (ja) 吊り下げ搬送装置
FR2661923A1 (fr) Systeme de transport de pots entre deux machines de filature telles qu'une carde et un etirage.
FR2723689A1 (fr) Procede et dispositif de stockage temporaire et de distribution de vetements
EP0211747A1 (fr) Installation pour convoyer des pièces de monnaie entre une machine de paiement automatique et un poste de traitement des pièces de monnaie
FR2564192A1 (fr) Dispositif pour mesurer du bois en grume
FR2491899A1 (fr) Appareil pour transferer des plateaux ou autres

Legal Events

Date Code Title Description
ST Notification of lapse