GB8412730D0 - Cassette trolley - Google Patents

Cassette trolley

Info

Publication number
GB8412730D0
GB8412730D0 GB848412730A GB8412730A GB8412730D0 GB 8412730 D0 GB8412730 D0 GB 8412730D0 GB 848412730 A GB848412730 A GB 848412730A GB 8412730 A GB8412730 A GB 8412730A GB 8412730 D0 GB8412730 D0 GB 8412730D0
Authority
GB
United Kingdom
Prior art keywords
cassette trolley
trolley
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB848412730A
Other versions
GB2141681A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB8412730D0 publication Critical patent/GB8412730D0/en
Publication of GB2141681A publication Critical patent/GB2141681A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Conveyors (AREA)
GB08412730A 1983-05-20 1984-05-18 Cassette trolley with access through the base Withdrawn GB2141681A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49676883A 1983-05-20 1983-05-20

Publications (2)

Publication Number Publication Date
GB8412730D0 true GB8412730D0 (en) 1984-06-27
GB2141681A GB2141681A (en) 1985-01-03

Family

ID=23974053

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08412730A Withdrawn GB2141681A (en) 1983-05-20 1984-05-18 Cassette trolley with access through the base

Country Status (4)

Country Link
JP (1) JPS59220445A (en)
DE (1) DE3418244A1 (en)
FR (1) FR2548449A1 (en)
GB (1) GB2141681A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636857A (en) * 1986-06-26 1988-01-12 Fujitsu Ltd Wafer transfer device
EP0261410A1 (en) * 1986-08-22 1988-03-30 Trapp, Hans-Jürgen, Dr.-Ing. Device for storing data carrier units, like magnetic tape cassettes, within a shelf appliance
EP0344573B1 (en) * 1988-06-02 1993-10-13 Hans-Jürgen Dr.-Ing. Trapp Storage device for articles
GB9303740D0 (en) * 1993-02-24 1993-04-14 H W F Number Two Hundred And T Apparatus for remotely deploying a camera
DE19845504A1 (en) 1998-10-02 2000-04-20 Wacker Siltronic Halbleitermat Horde cradle

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7105013A (en) * 1971-04-15 1972-10-17
DE2453751C3 (en) * 1974-11-13 1978-05-24 Maschinenfabrik Scharf Gmbh, 4700 Hamm Overhead rail track for driving on mining routes
US4311427A (en) * 1979-12-21 1982-01-19 Varian Associates, Inc. Wafer transfer system
US4435724A (en) * 1981-09-10 1984-03-06 Wells Electronics, Inc. Single piece carrier for integrated circuit devices
DD200120A1 (en) * 1981-10-01 1983-03-23 Wilfried Mueller REIBLE GEAR DRIVE FOR DRIVING A ROTATING OR LENGTH-RELATED PART

Also Published As

Publication number Publication date
JPS59220445A (en) 1984-12-11
FR2548449A1 (en) 1985-01-04
DE3418244A1 (en) 1984-11-22
GB2141681A (en) 1985-01-03

Similar Documents

Publication Publication Date Title
GB2143729B (en) Caster
GB2150826B (en) Caster
GB8430901D0 (en) Tape cassette
GB2145999B (en) Tape cassette
GB2143728B (en) Caster
DE3475448D1 (en) Tape cassette
GB2136363B (en) Trolley
SG7688G (en) Improved caster
GB8422260D0 (en) Cassette tape
GB8418338D0 (en) Trolley
GB8412730D0 (en) Cassette trolley
HK74294A (en) Tape cassette
GB8413803D0 (en) Cassette
GB8400066D0 (en) Cassette case
AU3306284A (en) Trolley
GB8305071D0 (en) Cassette
GB8407324D0 (en) Trolleys
GB8407323D0 (en) Trolleys
GB8508485D0 (en) Tape
GB8409298D0 (en) Tape syncmate
SU1154636A1 (en) Cassette
GB8314559D0 (en) Tape cassette
GB8426872D0 (en) Tape cassette
GB8333260D0 (en) Trolley
GB8316028D0 (en) Trolley

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)