FR2545839B1 - Procede et appareillage pour le revetement d'un substrat avec une matiere transformee electriquement en phase gazeuse - Google Patents

Procede et appareillage pour le revetement d'un substrat avec une matiere transformee electriquement en phase gazeuse

Info

Publication number
FR2545839B1
FR2545839B1 FR8407826A FR8407826A FR2545839B1 FR 2545839 B1 FR2545839 B1 FR 2545839B1 FR 8407826 A FR8407826 A FR 8407826A FR 8407826 A FR8407826 A FR 8407826A FR 2545839 B1 FR2545839 B1 FR 2545839B1
Authority
FR
France
Prior art keywords
coating
substrate
gaseous phase
material electrically
electrically transformed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8407826A
Other languages
English (en)
Other versions
FR2545839A1 (fr
Inventor
Eduard Pinkhasov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wedtech Corp
Original Assignee
Wedtech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wedtech Corp filed Critical Wedtech Corp
Publication of FR2545839A1 publication Critical patent/FR2545839A1/fr
Application granted granted Critical
Publication of FR2545839B1 publication Critical patent/FR2545839B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR8407826A 1983-05-13 1984-05-11 Procede et appareillage pour le revetement d'un substrat avec une matiere transformee electriquement en phase gazeuse Expired FR2545839B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06494302 US4609564C2 (en) 1981-02-24 1983-05-13 Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase

Publications (2)

Publication Number Publication Date
FR2545839A1 FR2545839A1 (fr) 1984-11-16
FR2545839B1 true FR2545839B1 (fr) 1988-01-15

Family

ID=23963918

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8407826A Expired FR2545839B1 (fr) 1983-05-13 1984-05-11 Procede et appareillage pour le revetement d'un substrat avec une matiere transformee electriquement en phase gazeuse

Country Status (10)

Country Link
US (2) US4609564C2 (fr)
JP (1) JPS59211574A (fr)
CA (1) CA1213852A (fr)
CH (1) CH662823A5 (fr)
DE (1) DE3417462C3 (fr)
FR (1) FR2545839B1 (fr)
GB (1) GB2139648B (fr)
IL (1) IL71643A (fr)
IT (1) IT1173587B (fr)
SE (1) SE458205B (fr)

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IL74360A (en) * 1984-05-25 1989-01-31 Wedtech Corp Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase
US4628174A (en) * 1984-09-17 1986-12-09 General Electric Company Forming electrical conductors in long microdiameter holes
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DE3700633C2 (de) * 1987-01-12 1997-02-20 Reinar Dr Gruen Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma
GB2202237A (en) * 1987-03-12 1988-09-21 Vac Tec Syst Cathodic arc plasma deposition of hard coatings
DE3781551T2 (de) * 1987-06-29 1993-04-08 Hauzer Holding Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.
US4869203A (en) * 1988-07-18 1989-09-26 Vapor Technologies Inc. Apparatus for coating a metal gas-pressure bottle or tank
US4859489A (en) * 1988-07-18 1989-08-22 Vapor Technologies Inc. Method of coating a metal gas-pressure bottle or tank
US4898623A (en) * 1988-12-09 1990-02-06 Vapor Technologies Inc. Method of shaping hard difficult-to-roll alloys
US5194128A (en) * 1989-07-12 1993-03-16 Thermo Electron Technologies Corporation Method for manufacturing ultrafine particles
US5062936A (en) * 1989-07-12 1991-11-05 Thermo Electron Technologies Corporation Method and apparatus for manufacturing ultrafine particles
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
US5393575A (en) * 1992-03-03 1995-02-28 Esterlis; Moisei Method for carrying out surface processes
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
US5830540A (en) * 1994-09-15 1998-11-03 Eltron Research, Inc. Method and apparatus for reactive plasma surfacing
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US6358323B1 (en) * 1998-07-21 2002-03-19 Applied Materials, Inc. Method and apparatus for improved control of process and purge material in a substrate processing system
US6735854B1 (en) * 1998-07-27 2004-05-18 Honeywell International, Inc. Method for forming an electro-mechanical device
US6096391A (en) * 1998-10-16 2000-08-01 Wilson Greatbatch Ltd. Method for improving electrical conductivity of metals, metal alloys and metal oxides
US6187089B1 (en) * 1999-02-05 2001-02-13 Memc Electronic Materials, Inc. Tungsten doped crucible and method for preparing same
AUPR054000A0 (en) * 2000-10-04 2000-10-26 Austai Motors Designing Pty Ltd A planetary gear apparatus
US6395151B1 (en) * 2000-10-26 2002-05-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Vacuum ARC vapor deposition method and apparatus for applying identification symbols to substrates
WO2002040732A1 (fr) 2000-11-15 2002-05-23 G.T. Equipment Technologies Inc. Couche de protection destinee a des creusets en quartz utilises dans la cristallisation de silicium
US20040118156A1 (en) * 2001-03-08 2004-06-24 Gabriele Korus Method of producing a quartz glass crucible
GB2375725A (en) * 2001-05-26 2002-11-27 Siemens Ag Blasting metallic surfaces
US6749685B2 (en) * 2001-08-16 2004-06-15 Cree, Inc. Silicon carbide sublimation systems and associated methods
US6866752B2 (en) * 2001-08-23 2005-03-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of forming ultra thin film devices by vacuum arc vapor deposition
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
EP1841455A1 (fr) * 2005-01-24 2007-10-10 Amgen Inc. Anticorps anti-amyloide humanise
US20080210565A1 (en) * 2005-08-08 2008-09-04 Shou-Hui Chen Method of Surface Treatment for Metal and Nonmetal Surfaces
US7524385B2 (en) * 2006-10-03 2009-04-28 Elemetric, Llc Controlled phase transition of metals
EP2235058A2 (fr) 2007-12-21 2010-10-06 Amgen, Inc Anticorps anti-amyloïde et utilisations de ceux-ci
WO2011099110A1 (fr) * 2010-02-09 2011-08-18 Kaneko Kyojiro Procédé de fusion sous vide de silicium
ES2592814T3 (es) * 2011-08-26 2016-12-01 Consarc Corporation Purificación de un metaloide mediante proceso de refundición por arco en vacío de electrodo consumible
EP2602354A1 (fr) 2011-12-05 2013-06-12 Pivot a.s. Appareil et procédé de dépôt sous vide par arc cathodique filtré et procédé
KR101879274B1 (ko) * 2012-01-09 2018-08-20 삼성디스플레이 주식회사 저온 증착 장치

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Also Published As

Publication number Publication date
GB8412124D0 (en) 1984-06-20
IL71643A0 (en) 1984-07-31
GB2139648B (en) 1987-04-08
US4505948A (en) 1985-03-19
DE3417462C3 (de) 1996-02-08
US4609564A (en) 1986-09-02
SE8402153L (sv) 1984-11-14
DE3417462C2 (fr) 1992-10-15
SE458205B (sv) 1989-03-06
DE3417462A1 (de) 1984-11-15
SE8402153D0 (sv) 1984-04-18
US4609564B1 (en) 1998-04-14
IT1173587B (it) 1987-06-24
CA1213852A (fr) 1986-11-12
JPS59211574A (ja) 1984-11-30
IL71643A (en) 1987-10-20
CH662823A5 (de) 1987-10-30
IT8420832A0 (it) 1984-05-08
JPH0373631B2 (fr) 1991-11-22
GB2139648A (en) 1984-11-14
IT8420832A1 (it) 1985-11-08
US4609564C2 (en) 2001-10-09
FR2545839A1 (fr) 1984-11-16

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