FR2534089B1 - Dispositif a onde acoustique de surface - Google Patents

Dispositif a onde acoustique de surface

Info

Publication number
FR2534089B1
FR2534089B1 FR8315873A FR8315873A FR2534089B1 FR 2534089 B1 FR2534089 B1 FR 2534089B1 FR 8315873 A FR8315873 A FR 8315873A FR 8315873 A FR8315873 A FR 8315873A FR 2534089 B1 FR2534089 B1 FR 2534089B1
Authority
FR
France
Prior art keywords
acoustic wave
surface acoustic
wave device
wave
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8315873A
Other languages
English (en)
Other versions
FR2534089A1 (fr
Inventor
Nobuo Mikoshiba
Kazuo Tsubouchi
Kazuyoshi Sugai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2534089A1 publication Critical patent/FR2534089A1/fr
Application granted granted Critical
Publication of FR2534089B1 publication Critical patent/FR2534089B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
FR8315873A 1982-10-05 1983-10-05 Dispositif a onde acoustique de surface Expired FR2534089B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57175203A JPS5964908A (ja) 1982-10-05 1982-10-05 弾性表面波素子

Publications (2)

Publication Number Publication Date
FR2534089A1 FR2534089A1 (fr) 1984-04-06
FR2534089B1 true FR2534089B1 (fr) 1988-11-04

Family

ID=15992090

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8315873A Expired FR2534089B1 (fr) 1982-10-05 1983-10-05 Dispositif a onde acoustique de surface

Country Status (5)

Country Link
US (1) US4516049A (fr)
JP (1) JPS5964908A (fr)
DE (1) DE3336281C2 (fr)
FR (1) FR2534089B1 (fr)
GB (1) GB2130452A (fr)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2181917B (en) * 1982-03-11 1987-11-18 Nobuo Mikoshiba Surface acoustic wave device
GB2181918B (en) * 1982-03-11 1987-11-18 Nobuo Mikoshiba Surface acoustic wave device
JPS60119114A (ja) * 1983-11-30 1985-06-26 Murata Mfg Co Ltd 表面波装置
US4695986A (en) * 1985-03-28 1987-09-22 Ultrasonic Arrays, Inc. Ultrasonic transducer component and process for making the same and assembly
JPS6362281A (ja) * 1986-09-02 1988-03-18 Clarion Co Ltd 弾性表面波コンボルバ
JPH01233819A (ja) * 1988-03-15 1989-09-19 Fujitsu Ltd 弾性表面波ディバイス
US5235233A (en) * 1988-03-17 1993-08-10 Fanuc Ltd. Surface acoustic wave device
EP0363495A4 (en) * 1988-03-17 1991-03-20 Fujitsu Limited Surface acoustic wave device
JPH01236712A (ja) * 1988-03-17 1989-09-21 Fujitsu Ltd 弾性表面波ディバイス
JPH0217707A (ja) * 1988-07-05 1990-01-22 Clarion Co Ltd 広帯域弾性表面波フィルタ
US5215546A (en) * 1990-09-04 1993-06-01 Motorola, Inc. Method and apparatus for SAW device passivation
JPH04343514A (ja) * 1991-05-20 1992-11-30 Clarion Co Ltd 弾性表面波素子
US5453652A (en) * 1992-12-17 1995-09-26 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
US5446330A (en) * 1993-03-15 1995-08-29 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device having a lamination structure
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices
DE69611771T2 (de) * 1995-09-01 2001-06-28 Murata Mfg. Co., Ltd. Akustische Oberflächenwellenanordnung
US5831492A (en) * 1995-09-15 1998-11-03 Sawtek Inc. Weighted tapered spudt saw device
US5818310A (en) * 1996-08-27 1998-10-06 Sawtek Inc. Series-block and line-width weighted saw filter device
US6049155A (en) * 1997-10-27 2000-04-11 Lucent Technologies Inc. Thermally tunable surface acoustic wave devices
DE10119293A1 (de) * 2001-04-19 2002-11-21 Stiftung Caesar Berührungslose magnetoelastische Sensoren
JP2005176152A (ja) * 2003-12-15 2005-06-30 Alps Electric Co Ltd 弾性表面波素子及びその製造方法
JP4279271B2 (ja) 2005-06-01 2009-06-17 アルプス電気株式会社 弾性表面波素子及びその製造方法
DE112009000281T5 (de) * 2008-02-05 2011-02-17 Murata Mfg. Co., Ltd., Nagaokakyo-shi Rand-Schallwellenvorrichtung
TWI381060B (zh) * 2008-08-12 2013-01-01 Univ Tatung High frequency surface acoustic wave elements and their substrates
US8058769B2 (en) 2008-12-17 2011-11-15 Sand9, Inc. Mechanical resonating structures including a temperature compensation structure
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
JP2010187373A (ja) * 2009-01-19 2010-08-26 Ngk Insulators Ltd 複合基板及びそれを用いた弾性波デバイス
US9232315B2 (en) 2011-03-16 2016-01-05 Phonon Corporation Monolithically applied heating elements on saw substrate
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
US11722121B2 (en) * 2017-02-14 2023-08-08 Kyocera Corporation Acoustic wave element
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1363519A (en) * 1972-08-17 1974-08-14 Standard Telephones Cables Ltd Acoustic surface wave device
GB1440950A (en) * 1973-10-12 1976-06-30 Mullard Ltd Acoustic surface-wave devices
US3965444A (en) * 1975-01-03 1976-06-22 Raytheon Company Temperature compensated surface acoustic wave devices
DE2607837C2 (de) * 1975-03-04 1984-09-13 Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto Mehrschichten-Interdigital-Wandler für akustische Oberflächenwellen
US4037176A (en) * 1975-03-18 1977-07-19 Matsushita Electric Industrial Co., Ltd. Multi-layered substrate for a surface-acoustic-wave device
US4194171A (en) * 1978-07-07 1980-03-18 The United States Of America As Represented By The Secretary Of The Navy Zinc oxide on silicon device for parallel in, serial out, discrete fourier transform
JPS55158720A (en) * 1979-05-28 1980-12-10 Clarion Co Ltd Surface elastic wave device
SU805918A1 (ru) * 1979-09-28 1982-03-30 Ордена Трудового Красного Знамени Институт Радиотехники И Электроники Ан Ссср Преобразователь поверхностных акустических волн
JPS56100510A (en) * 1980-01-16 1981-08-12 Clarion Co Ltd Elastic surface wave device
US4358745A (en) * 1981-03-16 1982-11-09 International Business Machines Corporation Semiconductor surface acoustic wave device
GB2120037B (en) * 1982-03-11 1987-11-18 Nobuo Mikoshiba Surface acoustic wave device

Also Published As

Publication number Publication date
JPS5964908A (ja) 1984-04-13
FR2534089A1 (fr) 1984-04-06
DE3336281A1 (de) 1984-04-05
US4516049A (en) 1985-05-07
DE3336281C2 (de) 1995-04-20
GB8326084D0 (en) 1983-11-02
JPH0218614B2 (fr) 1990-04-26
GB2130452A (en) 1984-05-31

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse