FR2530014B1 - Procede et dispositif de mesure thermique du debit-masse - Google Patents

Procede et dispositif de mesure thermique du debit-masse

Info

Publication number
FR2530014B1
FR2530014B1 FR8308688A FR8308688A FR2530014B1 FR 2530014 B1 FR2530014 B1 FR 2530014B1 FR 8308688 A FR8308688 A FR 8308688A FR 8308688 A FR8308688 A FR 8308688A FR 2530014 B1 FR2530014 B1 FR 2530014B1
Authority
FR
France
Prior art keywords
flow rate
mass flow
thermal measurement
thermal
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8308688A
Other languages
English (en)
Other versions
FR2530014A1 (fr
Inventor
James H Ewing
Fred G Ramberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of FR2530014A1 publication Critical patent/FR2530014A1/fr
Application granted granted Critical
Publication of FR2530014B1 publication Critical patent/FR2530014B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
FR8308688A 1982-07-12 1983-05-26 Procede et dispositif de mesure thermique du debit-masse Expired FR2530014B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/397,109 US4464932A (en) 1982-07-12 1982-07-12 Thermal mass flowmetering

Publications (2)

Publication Number Publication Date
FR2530014A1 FR2530014A1 (fr) 1984-01-13
FR2530014B1 true FR2530014B1 (fr) 1988-12-02

Family

ID=23569861

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8308688A Expired FR2530014B1 (fr) 1982-07-12 1983-05-26 Procede et dispositif de mesure thermique du debit-masse

Country Status (9)

Country Link
US (1) US4464932A (fr)
JP (1) JPS5918423A (fr)
CA (1) CA1207408A (fr)
CH (1) CH669255A5 (fr)
DE (1) DE3320561C2 (fr)
FR (1) FR2530014B1 (fr)
GB (1) GB2123960B (fr)
IT (1) IT1169746B (fr)
NL (1) NL192467C (fr)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4679585A (en) * 1986-01-10 1987-07-14 Mks Instruments, Inc. Flowmeter-controlled valving
US4779458A (en) * 1986-12-29 1988-10-25 Mawardi Osman K Flow sensor
US4847469A (en) * 1987-07-15 1989-07-11 The Boc Group, Inc. Controlled flow vaporizer
JP2631481B2 (ja) * 1987-12-08 1997-07-16 株式会社 リンテック 質量流量計とその計測方法
US5158534A (en) * 1990-07-03 1992-10-27 Cardiopulmonics, Inc. Automated gas delivery system for blood gas exchange devices
US5100100A (en) * 1990-09-12 1992-03-31 Mks Instruments, Inc. Fluid control and shut off valve
US5359878A (en) * 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
US5161410A (en) * 1991-02-27 1992-11-10 Intertech Development Company Mass flow sensor for very low fluid flows
US5142907A (en) * 1991-04-17 1992-09-01 Mks Instruments, Inc. Constant temperature gradient fluid mass flow transducer
DE4219551C2 (de) * 1991-06-13 1996-04-18 Mks Japan Inc Massenströmungssensor
US5295394A (en) * 1991-06-13 1994-03-22 Mks Japan Inc. Bypass unit for a flowmeter sensor
JP2643665B2 (ja) * 1991-06-13 1997-08-20 日本エム・ケー・エス 株式会社 流量センサ
KR940011791B1 (ko) * 1992-04-15 1994-12-26 금성일렉트론주식회사 온도안정화 매스 플로우 컨트롤러 센서
US5314164A (en) * 1992-07-17 1994-05-24 Mks Instruments, Inc. Pivotal diaphragm, flow control valve
US5361637A (en) * 1992-11-06 1994-11-08 Mks Instruments, Inc. Temperature compensation circuitry employing a single temperature compensation element
US5571396A (en) * 1993-07-12 1996-11-05 Dade International Inc. Fluid analysis system and sensing electrode, electrode assembly, and sensing module components
DE4335332A1 (de) * 1993-10-18 1995-04-20 Bitop Gmbh Verfahren und Vorrichtung zur insbesondere nicht invasiven Ermittlung mindestens eines interessierenden Parameters eines Fluid-Rohr-Systems
US5764539A (en) * 1994-01-21 1998-06-09 Novartis Nutrition Ag Non-invasive system and method for a fluid flow monitoring system
US5461913A (en) * 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer
US5460039A (en) * 1994-07-12 1995-10-24 Bear Medical Systems, Inc. Flow sensor system
US5804717A (en) * 1996-04-05 1998-09-08 Mks Instruments, Inc. Mass flow transducer having extended flow rate measurement range
US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
US5693880A (en) * 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US6125695A (en) * 1997-10-13 2000-10-03 Teledyne Brown Engineering, Inc. Method and apparatus for measuring a fluid
US6397944B1 (en) * 2000-01-28 2002-06-04 Lsi Logic Corporation Heat dissipating apparatus and method for electronic components
KR100395656B1 (ko) * 2001-12-19 2003-08-21 김욱현 질량유량제어기의 질량유량측정센서
US6668641B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal dissipation in a thermal mass flow sensor
US6779394B2 (en) 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
US6668642B2 (en) 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal isolation of thermal mass flow sensor
JP2004317268A (ja) * 2003-04-16 2004-11-11 Hitachi Ltd 車載電子装置，熱式流量計及び電子回路基板
US20040246649A1 (en) * 2003-06-03 2004-12-09 Mks Instruments, Inc. Flow control valve with magnetic field sensor
US8302471B2 (en) 2005-12-02 2012-11-06 Melexis Nv Calorimetric flow meter having high heat conductivity strips
JP4859107B2 (ja) * 2006-03-15 2012-01-25 株式会社山武 熱式流量計
US8136983B2 (en) * 2009-01-01 2012-03-20 Mahmoud Razzaghi Sensor and control system
US8571798B2 (en) * 2009-03-03 2013-10-29 Baker Hughes Incorporated System and method for monitoring fluid flow through an electrical submersible pump
DE102011120899B4 (de) * 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids
DE102014101792A1 (de) * 2014-02-13 2015-08-13 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen
CN106133484B (zh) * 2014-03-31 2019-10-15 日立金属株式会社 热式质量流量测定方法、流量计以及流量控制装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE854105C (de) * 1946-05-21 1952-10-30 Charles Engelhard Stroemungsmesser
FR911680A (fr) * 1950-03-10 1946-07-17 Pyrometrie Ind Procédé et dispositif de mesure et de réglage du débit d'un fluide
US2994222A (en) * 1958-10-09 1961-08-01 John H Laub Thermal flowmeter
US3352154A (en) * 1965-06-16 1967-11-14 Robert S Djorup Heated element fluid flow sensor
US3680377A (en) * 1970-08-17 1972-08-01 Hewlett Packard Co Fluid flow meter
US3938384A (en) * 1972-10-13 1976-02-17 Tylan Corporation Mass flow meter with reduced attitude sensitivity
DE2311103C2 (de) * 1973-03-06 1984-01-12 Helmut Dipl.-Chem. 8000 München Ulrich Einrichtung zur Messung der Durchflußrate eines Strömungsmittels
US3942378A (en) * 1974-06-28 1976-03-09 Rca Corporation Fluid flow measuring system
GB1512850A (en) * 1974-12-28 1978-06-01 Osaka Denki Co Ltd Method of and apparatus for monitoring an arc atmosphere
GB1512290A (en) * 1975-11-24 1978-06-01 Agar J Instrumentation Ltd Method and apparatus for determining fluid flow rate and/or for exercising a control in dependence thereon
US4043196A (en) * 1976-02-09 1977-08-23 Technology Incorporated Method and apparatus for effecting fluid flow measurement in a single sensor
JPS5412766A (en) * 1977-06-29 1979-01-30 Toshiba Corp Hot-wire flow meter
JPS55140109A (en) * 1979-04-20 1980-11-01 Nippon Atom Ind Group Co Ltd Flowmeter
DE2929427A1 (de) * 1979-07-20 1981-02-05 Bosch Gmbh Robert Einrichtung zur luftmassenmessung im luftansaugrohr einer brennkraftmaschine
JPS6050289B2 (ja) * 1979-11-20 1985-11-07 元 加野 熱式流量計
DE3135793A1 (de) * 1981-09-10 1983-03-24 Robert Bosch Gmbh, 7000 Stuttgart Verfahren und vorrichtung zur messung der masse eines in einem stroemungsquerschnitt stroemenden pulsierenden mediums

Also Published As

Publication number Publication date
CH669255A5 (de) 1989-02-28
GB2123960A (en) 1984-02-08
JPS5918423A (ja) 1984-01-30
NL192467C (nl) 1997-08-04
CA1207408A (fr) 1986-07-08
DE3320561C2 (de) 1994-08-11
GB2123960B (en) 1985-11-27
JPH0534608B2 (fr) 1993-05-24
US4464932A (en) 1984-08-14
IT8322022A0 (it) 1983-07-12
GB8313531D0 (en) 1983-06-22
DE3320561A1 (de) 1984-01-12
NL8302378A (nl) 1984-02-01
FR2530014A1 (fr) 1984-01-13
IT1169746B (it) 1987-06-03
NL192467B (nl) 1997-04-01

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Legal Events

Date Code Title Description
ST Notification of lapse