FR2504288B1 - Procede et appareil d'alignement d'une tranche de semi-conducteur - Google Patents

Procede et appareil d'alignement d'une tranche de semi-conducteur

Info

Publication number
FR2504288B1
FR2504288B1 FR8206159A FR8206159A FR2504288B1 FR 2504288 B1 FR2504288 B1 FR 2504288B1 FR 8206159 A FR8206159 A FR 8206159A FR 8206159 A FR8206159 A FR 8206159A FR 2504288 B1 FR2504288 B1 FR 2504288B1
Authority
FR
France
Prior art keywords
aligning
semiconductor wafer
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8206159A
Other languages
English (en)
French (fr)
Other versions
FR2504288A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of FR2504288A1 publication Critical patent/FR2504288A1/fr
Application granted granted Critical
Publication of FR2504288B1 publication Critical patent/FR2504288B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR8206159A 1981-04-15 1982-04-08 Procede et appareil d'alignement d'une tranche de semi-conducteur Expired FR2504288B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/254,486 US4398824A (en) 1981-04-15 1981-04-15 Wafer tilt compensation in zone plate alignment system

Publications (2)

Publication Number Publication Date
FR2504288A1 FR2504288A1 (fr) 1982-10-22
FR2504288B1 true FR2504288B1 (fr) 1985-06-28

Family

ID=22964476

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8206159A Expired FR2504288B1 (fr) 1981-04-15 1982-04-08 Procede et appareil d'alignement d'une tranche de semi-conducteur

Country Status (10)

Country Link
US (1) US4398824A (enExample)
JP (1) JPS57178343A (enExample)
BE (1) BE892840A (enExample)
CA (1) CA1166363A (enExample)
DE (1) DE3213338C2 (enExample)
FR (1) FR2504288B1 (enExample)
GB (1) GB2098728B (enExample)
HK (1) HK7486A (enExample)
IT (1) IT1205252B (enExample)
NL (1) NL8201571A (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3306840A1 (de) * 1983-02-26 1984-09-06 GdA Gesellschaft für digitale Automation mbH, 8000 München Messanordnung zum justieren des werkzeugflansches eines industrieroboters
US4636080A (en) * 1984-05-07 1987-01-13 At&T Bell Laboratories Two-dimensional imaging with line arrays
JPH0814484B2 (ja) * 1985-04-09 1996-02-14 株式会社ニコン パタ−ン位置測定装置
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US5327221A (en) * 1988-02-16 1994-07-05 Canon Kabushiki Kaisha Device for detecting positional relationship between two objects
US5325176A (en) * 1988-02-16 1994-06-28 Canon Kabushiki Kaisha Position detecting method and apparatus including Fraunhofer diffraction detector
US5294980A (en) * 1988-03-24 1994-03-15 Canon Kabushiki Kaisha Positioning detecting method and apparatus
US5235408A (en) * 1988-09-05 1993-08-10 Canon Kabushiki Kaisha Position detecting method and apparatus
EP0358511B1 (en) * 1988-09-09 2001-07-18 Canon Kabushiki Kaisha Device for detecting positional relationship between two objects
JP2626076B2 (ja) * 1988-09-09 1997-07-02 キヤノン株式会社 位置検出装置
JP2546350B2 (ja) * 1988-09-09 1996-10-23 キヤノン株式会社 位置合わせ装置
US5155370A (en) * 1988-09-09 1992-10-13 Canon Kabushiki Kaisha Device for detecting the relative position of first and second objects
JP2734004B2 (ja) * 1988-09-30 1998-03-30 キヤノン株式会社 位置合わせ装置
JP2704001B2 (ja) * 1989-07-18 1998-01-26 キヤノン株式会社 位置検出装置
EP0411966B1 (en) * 1989-08-04 1994-11-02 Canon Kabushiki Kaisha Position detection method and apparatus
DE4135959C2 (de) * 1991-10-31 1994-01-20 Leica Ag Heerbrugg Verfahren zur Messung der Neigungen von Grenzflächen in einem optischen System
FR2789068B1 (fr) * 1999-02-03 2001-03-16 Optique Et Microsystemes Sa Dispositif d'alignement pour l'assemblage de microsystemes et pour la micro distribution sur microsystemes ou sur microcomposants biotechnologiques
DE19963345A1 (de) 1999-12-27 2001-07-05 Leica Microsystems Optische Messanordnung und Verfahren zur Neigungsmessung
US6778266B2 (en) * 2002-01-12 2004-08-17 Taiwan Semiconductor Manufacturing Co., Ltd Semiconductor wafer tilt monitoring on semiconductor fabrication equipment plate
SG125923A1 (en) * 2002-09-20 2006-10-30 Asml Netherlands Bv Lithographic marker structure, lithographic projection apparatus comprising such a lithographic marker structure and method for substrate alignment using such a lithographic marker structure
JP4773329B2 (ja) * 2005-12-22 2011-09-14 パナソニック株式会社 界面位置測定方法および測定装置、層厚測定方法および測定装置、並びに、光ディスクの製造方法および製造装置
DE102013207243B4 (de) * 2013-04-22 2019-10-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und verfahren zur herstellung einer struktur aus aushärtbarem material durch abformung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3990798A (en) * 1975-03-07 1976-11-09 Bell Telephone Laboratories, Incorporated Method and apparatus for aligning mask and wafer
US4037969A (en) * 1976-04-02 1977-07-26 Bell Telephone Laboratories, Incorporated Zone plate alignment marks
US4326805A (en) * 1980-04-11 1982-04-27 Bell Telephone Laboratories, Incorporated Method and apparatus for aligning mask and wafer members

Also Published As

Publication number Publication date
GB2098728A (en) 1982-11-24
IT1205252B (it) 1989-03-15
DE3213338A1 (de) 1982-11-04
US4398824A (en) 1983-08-16
IT8220712A0 (it) 1982-04-13
BE892840A (fr) 1982-08-02
DE3213338C2 (de) 1986-07-10
HK7486A (en) 1986-02-07
JPH0145736B2 (enExample) 1989-10-04
NL8201571A (nl) 1982-11-01
CA1166363A (en) 1984-04-24
GB2098728B (en) 1985-06-05
FR2504288A1 (fr) 1982-10-22
JPS57178343A (en) 1982-11-02

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Legal Events

Date Code Title Description
ST Notification of lapse
RC Opposition against decision of lapse
DA Annulment of decision of lapse
ST Notification of lapse