FR2488044A1 - Dispositif pour detecter des electrons secondaires dans un microscope electronique a balayage - Google Patents

Dispositif pour detecter des electrons secondaires dans un microscope electronique a balayage Download PDF

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Publication number
FR2488044A1
FR2488044A1 FR8114891A FR8114891A FR2488044A1 FR 2488044 A1 FR2488044 A1 FR 2488044A1 FR 8114891 A FR8114891 A FR 8114891A FR 8114891 A FR8114891 A FR 8114891A FR 2488044 A1 FR2488044 A1 FR 2488044A1
Authority
FR
France
Prior art keywords
electrode
tube
secondary electrons
sample
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8114891A
Other languages
English (en)
French (fr)
Other versions
FR2488044B1 (OSRAM
Inventor
Tamura Nobuaki
Takashima Susumu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2488044A1 publication Critical patent/FR2488044A1/fr
Application granted granted Critical
Publication of FR2488044B1 publication Critical patent/FR2488044B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D319/00—Heterocyclic compounds containing six-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D319/10—1,4-Dioxanes; Hydrogenated 1,4-dioxanes
    • C07D319/14—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems
    • C07D319/16—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems condensed with one six-membered ring
    • C07D319/18—Ethylenedioxybenzenes, not substituted on the hetero ring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/418—Imaging electron microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/505—Detectors scintillation
    • G01N2223/5055—Detectors scintillation scintillation crystal coupled to PMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR8114891A 1979-06-28 1981-07-30 Dispositif pour detecter des electrons secondaires dans un microscope electronique a balayage Granted FR2488044A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU48510/79A AU521225B2 (en) 1977-04-19 1979-06-28 Alkylenedioxy phenyl derivatives
JP10551680A JPS5730253A (en) 1979-06-28 1980-07-31 Secondary electron detector for scan type electron microscope

Publications (2)

Publication Number Publication Date
FR2488044A1 true FR2488044A1 (fr) 1982-02-05
FR2488044B1 FR2488044B1 (OSRAM) 1985-01-04

Family

ID=25628249

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8114891A Granted FR2488044A1 (fr) 1979-06-28 1981-07-30 Dispositif pour detecter des electrons secondaires dans un microscope electronique a balayage

Country Status (5)

Country Link
JP (1) JPS5730253A (OSRAM)
AU (1) AU521225B2 (OSRAM)
DE (1) DE3126575C2 (OSRAM)
FR (1) FR2488044A1 (OSRAM)
GB (1) GB2081501B (OSRAM)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58161235A (ja) * 1982-03-19 1983-09-24 Internatl Precision Inc 走査型電子線装置
JPS58148867U (ja) * 1982-03-30 1983-10-06 株式会社島津製作所 ２次電子検出装置
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPS60154416A (ja) * 1984-01-23 1985-08-14 昭和電線電纜株式会社 高発泡ポリエチレン絶縁電線の製造方法
JPS60212953A (ja) * 1984-04-06 1985-10-25 Hitachi Ltd 電子線装置
JPH0452888Y2 (OSRAM) * 1985-08-23 1992-12-11
EP0274622B1 (de) * 1986-12-12 1990-11-07 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Detektoranordnung mit einem Detektorobjektiv für Korpuskularstrahlgeräte
JP2620370B2 (ja) * 1989-05-01 1997-06-11 住友電気工業株式会社 絶縁電線とその製造方法並びに同軸の絶縁電線
JPH0755990B2 (ja) * 1989-11-02 1995-06-14 宇部興産株式会社 電線被覆用の発泡性ポリオレフィン樹脂組成物
JP3081393B2 (ja) * 1992-10-15 2000-08-28 株式会社日立製作所 走査電子顕微鏡
DE19729526C2 (de) * 1997-07-10 1999-07-22 Frank Siegelin Beheizbarer Probentisch zur in-situ Abbildung in Rasterelektronenmikroskopen bei hihen Temperaturen
AU756878B2 (en) 1998-09-03 2003-01-23 Kyowa Hakko Kogyo Co. Ltd. Oxygenic heterocyclic compounds
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
GB2442027B (en) * 2006-09-23 2009-08-26 Zeiss Carl Smt Ltd Charged particle beam instrument and method of detecting charged particles
CN115662866B (zh) * 2022-11-29 2023-03-14 北京中科科仪股份有限公司 一种二次电子探测装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
US3694652A (en) * 1969-02-01 1972-09-26 John R Banbury Electron probe apparatus using an electrostatic field to cause secondary electrons to diverge
US3717761A (en) * 1970-04-18 1973-02-20 Jeol Ltd Scanning electron microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
US3694652A (en) * 1969-02-01 1972-09-26 John R Banbury Electron probe apparatus using an electrostatic field to cause secondary electrons to diverge
US3717761A (en) * 1970-04-18 1973-02-20 Jeol Ltd Scanning electron microscope

Also Published As

Publication number Publication date
DE3126575A1 (de) 1982-04-22
FR2488044B1 (OSRAM) 1985-01-04
GB2081501A (en) 1982-02-17
DE3126575C2 (de) 1984-07-26
GB2081501B (en) 1984-05-31
AU4851079A (en) 1979-10-25
JPS5730253A (en) 1982-02-18
AU521225B2 (en) 1982-03-25

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