FR2484124B1 - - Google Patents

Info

Publication number
FR2484124B1
FR2484124B1 FR8111042A FR8111042A FR2484124B1 FR 2484124 B1 FR2484124 B1 FR 2484124B1 FR 8111042 A FR8111042 A FR 8111042A FR 8111042 A FR8111042 A FR 8111042A FR 2484124 B1 FR2484124 B1 FR 2484124B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8111042A
Other versions
FR2484124A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
ATES Componenti Elettronici SpA
SGS ATES Componenti Elettronici SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ATES Componenti Elettronici SpA, SGS ATES Componenti Elettronici SpA filed Critical ATES Componenti Elettronici SpA
Publication of FR2484124A1 publication Critical patent/FR2484124A1/fr
Application granted granted Critical
Publication of FR2484124B1 publication Critical patent/FR2484124B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0425—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a merged floating gate and select transistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/401—Multistep manufacturing processes
    • H01L29/4011—Multistep manufacturing processes for data storage electrodes
    • H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
    • H01L29/7885—Hot carrier injection from the channel

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
FR8111042A 1980-06-04 1981-06-04 Cellule de memoire remanente a " gachette " flottante, modifiable electriquement Granted FR2484124A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8022538A IT1209227B (it) 1980-06-04 1980-06-04 Cella di memoria non volatile a 'gate' flottante elettricamente alterabile.

Publications (2)

Publication Number Publication Date
FR2484124A1 FR2484124A1 (fr) 1981-12-11
FR2484124B1 true FR2484124B1 (fr) 1985-03-22

Family

ID=11197578

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8111042A Granted FR2484124A1 (fr) 1980-06-04 1981-06-04 Cellule de memoire remanente a " gachette " flottante, modifiable electriquement

Country Status (6)

Country Link
US (1) US4412311A (fr)
JP (1) JPS5752171A (fr)
DE (1) DE3121753A1 (fr)
FR (1) FR2484124A1 (fr)
GB (1) GB2077492B (fr)
IT (1) IT1209227B (fr)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864068A (ja) * 1981-10-14 1983-04-16 Agency Of Ind Science & Technol 不揮発性半導体メモリの書き込み方法
DE3141390A1 (de) * 1981-10-19 1983-04-28 Deutsche Itt Industries Gmbh, 7800 Freiburg Floating-gate-speicherzelle, bei der das schreiben und loeschen durch injektion heisser ladungstraeger erfolgt
DE3482847D1 (de) * 1983-04-18 1990-09-06 Toshiba Kawasaki Kk Halbleiterspeichervorrichtung mit einem schwebenden gate.
JPS6038799A (ja) * 1983-08-11 1985-02-28 Seiko Instr & Electronics Ltd 半導体不揮発性メモリ用読み出し回路
JPS60182174A (ja) * 1984-02-28 1985-09-17 Nec Corp 不揮発性半導体メモリ
US4639893A (en) * 1984-05-15 1987-01-27 Wafer Scale Integration, Inc. Self-aligned split gate EPROM
US4795719A (en) * 1984-05-15 1989-01-03 Waferscale Integration, Inc. Self-aligned split gate eprom process
US4868629A (en) * 1984-05-15 1989-09-19 Waferscale Integration, Inc. Self-aligned split gate EPROM
JPH0760864B2 (ja) * 1984-07-13 1995-06-28 株式会社日立製作所 半導体集積回路装置
US4599706A (en) * 1985-05-14 1986-07-08 Xicor, Inc. Nonvolatile electrically alterable memory
US4939558A (en) * 1985-09-27 1990-07-03 Texas Instruments Incorporated EEPROM memory cell and driving circuitry
US4783766A (en) * 1986-05-30 1988-11-08 Seeq Technology, Inc. Block electrically erasable EEPROM
GB2200795B (en) * 1987-02-02 1990-10-03 Intel Corp Eprom cell with integral select transistor
US4814286A (en) * 1987-02-02 1989-03-21 Intel Corporation EEPROM cell with integral select transistor
US4949140A (en) * 1987-02-02 1990-08-14 Intel Corporation EEPROM cell with integral select transistor
US5066995A (en) * 1987-03-13 1991-11-19 Harris Corporation Double level conductor structure
US5168465A (en) * 1988-06-08 1992-12-01 Eliyahou Harari Highly compact EPROM and flash EEPROM devices
US5268319A (en) * 1988-06-08 1993-12-07 Eliyahou Harari Highly compact EPROM and flash EEPROM devices
US5268318A (en) * 1988-06-08 1993-12-07 Eliyahou Harari Highly compact EPROM and flash EEPROM devices
US5095344A (en) * 1988-06-08 1992-03-10 Eliyahou Harari Highly compact eprom and flash eeprom devices
KR910007434B1 (ko) * 1988-12-15 1991-09-26 삼성전자 주식회사 전기적으로 소거 및 프로그램 가능한 반도체 메모리장치 및 그 소거 및 프로그램 방법
US5045488A (en) * 1990-01-22 1991-09-03 Silicon Storage Technology, Inc. Method of manufacturing a single transistor non-volatile, electrically alterable semiconductor memory device
DE69133003T2 (de) * 1990-01-22 2002-12-12 Silicon Storage Technology, Inc. Nichtflüchtige elektrisch veränderbare eintransistor-halbleiterspeicheranordnung mit rekristallisiertem schwebendem gate
JPH0424969A (ja) * 1990-05-15 1992-01-28 Toshiba Corp 半導体記憶装置
JPH04289593A (ja) * 1991-03-19 1992-10-14 Fujitsu Ltd 不揮発性半導体記憶装置
US5317179A (en) * 1991-09-23 1994-05-31 Integrated Silicon Solution, Inc. Non-volatile semiconductor memory cell
FR2683664A1 (fr) * 1991-11-13 1993-05-14 Sgs Thomson Microelectronics Memoire integree electriquement programmable a un seuil transistor.
JPH0745730A (ja) * 1993-02-19 1995-02-14 Sgs Thomson Microelettronica Spa ２レベルのポリシリコンｅｅｐｒｏｍメモリ・セル並びにそのプログラミング方法及び製造方法、集積されたｅｅｐｒｏｍ記憶回路、ｅｅｐｒｏｍメモリ・セル及びそのプログラミング方法
US5479368A (en) * 1993-09-30 1995-12-26 Cirrus Logic, Inc. Spacer flash cell device with vertically oriented floating gate
US5640031A (en) * 1993-09-30 1997-06-17 Keshtbod; Parviz Spacer flash cell process
US5455791A (en) * 1994-06-01 1995-10-03 Zaleski; Andrzei Method for erasing data in EEPROM devices on SOI substrates and device therefor
US5455792A (en) * 1994-09-09 1995-10-03 Yi; Yong-Wan Flash EEPROM devices employing mid channel injection
DE60041313D1 (de) * 1999-10-25 2009-02-26 Imec Inter Uni Micro Electr Elektrisch programmierbares und löschbares Gerät und ein Verfahren zu seinem Betrieb
US7782668B2 (en) * 2007-11-01 2010-08-24 Jonker Llc Integrated circuit embedded with non-volatile one-time-programmable and multiple-time programmable memory
US7876615B2 (en) 2007-11-14 2011-01-25 Jonker Llc Method of operating integrated circuit embedded with non-volatile programmable memory having variable coupling related application data
US8580622B2 (en) 2007-11-14 2013-11-12 Invensas Corporation Method of making integrated circuit embedded with non-volatile programmable memory having variable coupling
US7787295B2 (en) * 2007-11-14 2010-08-31 Jonker Llc Integrated circuit embedded with non-volatile multiple-time programmable memory having variable coupling
US7852672B2 (en) * 2007-11-14 2010-12-14 Jonker Llc Integrated circuit embedded with non-volatile programmable memory having variable coupling
US8305805B2 (en) * 2008-11-03 2012-11-06 Invensas Corporation Common drain non-volatile multiple-time programmable memory
US8203861B2 (en) 2008-12-30 2012-06-19 Invensas Corporation Non-volatile one-time—programmable and multiple-time programmable memory configuration circuit
US8988103B2 (en) 2010-09-15 2015-03-24 David K. Y. Liu Capacitively coupled logic gate
WO2012154973A1 (fr) 2011-05-10 2012-11-15 Jonker, Llc Cellule de mémoire non volatile gratuite utilisant des dispositifs haute tension dans un processus analogique

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4087795A (en) * 1974-09-20 1978-05-02 Siemens Aktiengesellschaft Memory field effect storage device
US4132904A (en) * 1977-07-28 1979-01-02 Hughes Aircraft Company Volatile/non-volatile logic latch circuit
JPS5519851A (en) * 1978-07-31 1980-02-12 Hitachi Ltd Manufacture of non-volatile memories
JPS5552592A (en) * 1978-10-13 1980-04-17 Sanyo Electric Co Ltd Data writing method and field effect transistor used for fulfillment
US4274012A (en) * 1979-01-24 1981-06-16 Xicor, Inc. Substrate coupled floating gate memory cell
US4257056A (en) * 1979-06-27 1981-03-17 National Semiconductor Corporation Electrically erasable read only memory
US4328565A (en) * 1980-04-07 1982-05-04 Eliyahou Harari Non-volatile eprom with increased efficiency
US4375087C1 (en) * 1980-04-09 2002-01-01 Hughes Aircraft Co Electrically erasable programmable read-only memory

Also Published As

Publication number Publication date
IT8022538A0 (it) 1980-06-04
IT1209227B (it) 1989-07-16
FR2484124A1 (fr) 1981-12-11
DE3121753A1 (de) 1982-06-03
GB2077492A (en) 1981-12-16
JPS5752171A (en) 1982-03-27
GB2077492B (en) 1984-01-25
DE3121753C2 (fr) 1988-10-20
US4412311A (en) 1983-10-25

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