FR2468203A1 - Appareil a decharge electrique a cathode creuse - Google Patents

Appareil a decharge electrique a cathode creuse Download PDF

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Publication number
FR2468203A1
FR2468203A1 FR8022695A FR8022695A FR2468203A1 FR 2468203 A1 FR2468203 A1 FR 2468203A1 FR 8022695 A FR8022695 A FR 8022695A FR 8022695 A FR8022695 A FR 8022695A FR 2468203 A1 FR2468203 A1 FR 2468203A1
Authority
FR
France
Prior art keywords
hollow cathode
discharge
cathode
hollow
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8022695A
Other languages
English (en)
French (fr)
Other versions
FR2468203B1 (de
Inventor
Osami Morimiya
Setsuo Suzuki
Shigeki Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP54136626A external-priority patent/JPS6011417B2/ja
Priority claimed from JP8489880A external-priority patent/JPS5711449A/ja
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of FR2468203A1 publication Critical patent/FR2468203A1/fr
Application granted granted Critical
Publication of FR2468203B1 publication Critical patent/FR2468203B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
FR8022695A 1979-10-23 1980-10-23 Appareil a decharge electrique a cathode creuse Granted FR2468203A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP54136626A JPS6011417B2 (ja) 1979-10-23 1979-10-23 ホロ−カソ−ド放電装置
JP8489880A JPS5711449A (en) 1980-06-23 1980-06-23 Hollow cathode discharge device

Publications (2)

Publication Number Publication Date
FR2468203A1 true FR2468203A1 (fr) 1981-04-30
FR2468203B1 FR2468203B1 (de) 1984-04-06

Family

ID=26425870

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8022695A Granted FR2468203A1 (fr) 1979-10-23 1980-10-23 Appareil a decharge electrique a cathode creuse

Country Status (3)

Country Link
DE (1) DE3039850A1 (de)
FR (1) FR2468203A1 (de)
GB (1) GB2064856B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0439220A2 (de) * 1990-01-23 1991-07-31 Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno - CoRiMMe Vorrichtung zum Ionisieren von Metallen hoher Schmelzpunkte verwendbar in mit Freeman oder ähnlichen Ionenquellen ausgerüstete Ionenimplantierungsgeräte

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2131176C1 (ru) * 1998-03-31 1999-05-27 Федеральное государственное унитарное предприятие "Исследовательский центр им.М.В.Келдыша" Установка для активного воздействия на ионосферу земли
RU2167466C1 (ru) * 2000-05-30 2001-05-20 Бугров Глеб Эльмирович Плазменный источник ионов и способ его работы
GB0309932D0 (en) 2003-04-30 2003-06-04 Boc Group Plc Apparatus and method for forming a plasma
GB2432039B (en) * 2004-01-09 2009-03-11 Applied Materials Inc Improvements relating to ion implantation
DE102008028166B4 (de) * 2008-06-12 2010-04-08 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Plasma-Jets
DE102012024340A1 (de) * 2012-12-13 2014-06-18 Oerlikon Trading Ag, Trübbach Plasmaquelle
RU2621481C1 (ru) * 2016-02-29 2017-06-06 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Способ определения эффективного потенциала ионизации и эффективного сродства к электрону многокомпонентных ароматических конденсированных сред

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2002374A1 (de) * 1969-01-27 1970-07-30 Rca Corp Gasentladungsroehre fuer einen Laser
FR2049663A5 (de) * 1969-06-16 1971-03-26 Cilas
FR2068096A5 (de) * 1969-11-27 1971-08-20 Cilas
US3760213A (en) * 1971-04-29 1973-09-18 Coherent Radiation Anode for a discharge tube

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2161293A5 (en) * 1971-11-19 1973-07-06 Onera (Off Nat Aerospatiale) Plasma generator - with low voltage arc striking device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2002374A1 (de) * 1969-01-27 1970-07-30 Rca Corp Gasentladungsroehre fuer einen Laser
FR2049663A5 (de) * 1969-06-16 1971-03-26 Cilas
FR2068096A5 (de) * 1969-11-27 1971-08-20 Cilas
US3760213A (en) * 1971-04-29 1973-09-18 Coherent Radiation Anode for a discharge tube

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXRV/77 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0439220A2 (de) * 1990-01-23 1991-07-31 Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno - CoRiMMe Vorrichtung zum Ionisieren von Metallen hoher Schmelzpunkte verwendbar in mit Freeman oder ähnlichen Ionenquellen ausgerüstete Ionenimplantierungsgeräte
EP0439220A3 (en) * 1990-01-23 1991-11-27 Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of freeman or similar type

Also Published As

Publication number Publication date
GB2064856B (en) 1984-06-13
GB2064856A (en) 1981-06-17
DE3039850A1 (de) 1981-05-07
FR2468203B1 (de) 1984-04-06

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