FR2468203B1 - - Google Patents

Info

Publication number
FR2468203B1
FR2468203B1 FR8022695A FR8022695A FR2468203B1 FR 2468203 B1 FR2468203 B1 FR 2468203B1 FR 8022695 A FR8022695 A FR 8022695A FR 8022695 A FR8022695 A FR 8022695A FR 2468203 B1 FR2468203 B1 FR 2468203B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8022695A
Other languages
French (fr)
Other versions
FR2468203A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP54136626A external-priority patent/JPS6011417B2/ja
Priority claimed from JP8489880A external-priority patent/JPS5711449A/ja
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of FR2468203A1 publication Critical patent/FR2468203A1/fr
Application granted granted Critical
Publication of FR2468203B1 publication Critical patent/FR2468203B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
FR8022695A 1979-10-23 1980-10-23 Appareil a decharge electrique a cathode creuse Granted FR2468203A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP54136626A JPS6011417B2 (ja) 1979-10-23 1979-10-23 ホロ−カソ−ド放電装置
JP8489880A JPS5711449A (en) 1980-06-23 1980-06-23 Hollow cathode discharge device

Publications (2)

Publication Number Publication Date
FR2468203A1 FR2468203A1 (fr) 1981-04-30
FR2468203B1 true FR2468203B1 (de) 1984-04-06

Family

ID=26425870

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8022695A Granted FR2468203A1 (fr) 1979-10-23 1980-10-23 Appareil a decharge electrique a cathode creuse

Country Status (3)

Country Link
DE (1) DE3039850A1 (de)
FR (1) FR2468203A1 (de)
GB (1) GB2064856B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238337B (it) * 1990-01-23 1993-07-12 Cons Ric Microelettronica Dispositivo per la ionizzazione di metalli ad alta temperatura di fusione, utilizzabile su impiantatori ionici del tipo impiegante sorgenti di ioni di tipo freeman o assimilabili
RU2131176C1 (ru) * 1998-03-31 1999-05-27 Федеральное государственное унитарное предприятие "Исследовательский центр им.М.В.Келдыша" Установка для активного воздействия на ионосферу земли
RU2167466C1 (ru) * 2000-05-30 2001-05-20 Бугров Глеб Эльмирович Плазменный источник ионов и способ его работы
GB0309932D0 (en) 2003-04-30 2003-06-04 Boc Group Plc Apparatus and method for forming a plasma
GB2432039B (en) * 2004-01-09 2009-03-11 Applied Materials Inc Improvements relating to ion implantation
DE102008028166B4 (de) * 2008-06-12 2010-04-08 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Plasma-Jets
DE102012024340A1 (de) * 2012-12-13 2014-06-18 Oerlikon Trading Ag, Trübbach Plasmaquelle
RU2621481C1 (ru) * 2016-02-29 2017-06-06 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Способ определения эффективного потенциала ионизации и эффективного сродства к электрону многокомпонентных ароматических конденсированных сред

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611183A (en) * 1969-01-27 1971-10-05 Rca Corp Double-ended ion laser tube
FR2049663A5 (de) * 1969-06-16 1971-03-26 Cilas
BE759019A (fr) * 1969-11-27 1971-05-17 Cilas Tube a decharge
US3760213A (en) * 1971-04-29 1973-09-18 Coherent Radiation Anode for a discharge tube
FR2161293A5 (en) * 1971-11-19 1973-07-06 Onera (Off Nat Aerospatiale) Plasma generator - with low voltage arc striking device

Also Published As

Publication number Publication date
GB2064856B (en) 1984-06-13
FR2468203A1 (fr) 1981-04-30
DE3039850A1 (de) 1981-05-07
GB2064856A (en) 1981-06-17

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse