FR2466103A1 - Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede - Google Patents

Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede Download PDF

Info

Publication number
FR2466103A1
FR2466103A1 FR7923204A FR7923204A FR2466103A1 FR 2466103 A1 FR2466103 A1 FR 2466103A1 FR 7923204 A FR7923204 A FR 7923204A FR 7923204 A FR7923204 A FR 7923204A FR 2466103 A1 FR2466103 A1 FR 2466103A1
Authority
FR
France
Prior art keywords
aluminum
layer
interconnection
alumina
network
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7923204A
Other languages
English (en)
French (fr)
Other versions
FR2466103B1 (https=
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR7923204A priority Critical patent/FR2466103A1/fr
Publication of FR2466103A1 publication Critical patent/FR2466103A1/fr
Application granted granted Critical
Publication of FR2466103B1 publication Critical patent/FR2466103B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/467Adding a circuit layer by thin film methods
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/6875Shapes or dispositions thereof being on a metallic substrate, e.g. insulated metal substrates [IMS]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/05Insulated conductive substrates, e.g. insulated metal substrate
    • H05K1/053Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an inorganic insulating layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR7923204A 1979-09-18 1979-09-18 Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede Granted FR2466103A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7923204A FR2466103A1 (fr) 1979-09-18 1979-09-18 Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7923204A FR2466103A1 (fr) 1979-09-18 1979-09-18 Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede

Publications (2)

Publication Number Publication Date
FR2466103A1 true FR2466103A1 (fr) 1981-03-27
FR2466103B1 FR2466103B1 (https=) 1983-07-18

Family

ID=9229735

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7923204A Granted FR2466103A1 (fr) 1979-09-18 1979-09-18 Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede

Country Status (1)

Country Link
FR (1) FR2466103A1 (https=)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545313A1 (fr) * 1983-04-29 1984-11-02 Bbc Brown Boveri & Cie Procede pour fabriquer un circuit a plusieurs couches par stratification et metallisation
FR2557755A1 (fr) * 1983-12-28 1985-07-05 Nec Corp Substrat de cablage multi-couche
EP0170477A3 (en) * 1984-08-01 1987-02-04 Peter Leslie Moran Multilayer systems and their method of production
WO1995008841A1 (en) * 1993-09-20 1995-03-30 Labunov Vladimir A Process for making multilevel interconnections of electronic components
WO1996003771A1 (en) * 1994-07-25 1996-02-08 Micro Components & Systems Ltd. Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
WO1998053499A1 (en) * 1997-05-20 1998-11-26 Micro Components Ltd. Substrate for electronic packaging, pin jig fixture
WO2000031797A3 (en) * 1998-11-25 2000-11-23 Micro Components Ltd Device for electronic packaging, pin jig fixture
NL1033519C2 (nl) * 2007-03-08 2008-09-16 Yun Tai Werkwijze voor warmteoverdracht bij halfgeleiders.
WO2016190737A3 (en) * 2015-05-26 2017-02-09 Metalmembranes.Com B.V. Method to produce electrically isolated or insulated areas in a metal, and a product comprising such area

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3827949A (en) * 1972-03-29 1974-08-06 Ibm Anodic oxide passivated planar aluminum metallurgy system and method of producing
FR2220879A1 (https=) * 1973-03-10 1974-10-04 Tokyo Shibaura Electric Co
US4015987A (en) * 1975-08-13 1977-04-05 The United States Of America As Represented By The Secretary Of The Navy Process for making chip carriers using anodized aluminum

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3827949A (en) * 1972-03-29 1974-08-06 Ibm Anodic oxide passivated planar aluminum metallurgy system and method of producing
FR2220879A1 (https=) * 1973-03-10 1974-10-04 Tokyo Shibaura Electric Co
US4015987A (en) * 1975-08-13 1977-04-05 The United States Of America As Represented By The Secretary Of The Navy Process for making chip carriers using anodized aluminum

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545313A1 (fr) * 1983-04-29 1984-11-02 Bbc Brown Boveri & Cie Procede pour fabriquer un circuit a plusieurs couches par stratification et metallisation
FR2557755A1 (fr) * 1983-12-28 1985-07-05 Nec Corp Substrat de cablage multi-couche
EP0170477A3 (en) * 1984-08-01 1987-02-04 Peter Leslie Moran Multilayer systems and their method of production
WO1995008841A1 (en) * 1993-09-20 1995-03-30 Labunov Vladimir A Process for making multilevel interconnections of electronic components
WO1996003771A1 (en) * 1994-07-25 1996-02-08 Micro Components & Systems Ltd. Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
US5661341A (en) * 1994-07-25 1997-08-26 Microcomponents And Systems Ltd. Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
WO1998053499A1 (en) * 1997-05-20 1998-11-26 Micro Components Ltd. Substrate for electronic packaging, pin jig fixture
US6448510B1 (en) 1997-05-20 2002-09-10 Micro Components Ltd. Substrate for electronic packaging, pin jig fixture
WO2000031797A3 (en) * 1998-11-25 2000-11-23 Micro Components Ltd Device for electronic packaging, pin jig fixture
NL1033519C2 (nl) * 2007-03-08 2008-09-16 Yun Tai Werkwijze voor warmteoverdracht bij halfgeleiders.
WO2016190737A3 (en) * 2015-05-26 2017-02-09 Metalmembranes.Com B.V. Method to produce electrically isolated or insulated areas in a metal, and a product comprising such area
CN107923061A (zh) * 2015-05-26 2018-04-17 金属膜克姆有限公司 在金属中产生电隔离或绝缘区域的方法以及包括这种区域的产品

Also Published As

Publication number Publication date
FR2466103B1 (https=) 1983-07-18

Similar Documents

Publication Publication Date Title
US3386894A (en) Formation of metallic contacts
JPS5828736B2 (ja) 平坦な薄膜の形成方法
JPH09213567A (ja) 薄膜コンデンサおよびその製造方法
FR2555365A1 (fr) Procede de fabrication de circuit integre avec connexions de siliciure de tantale et circuit integre realise selon ce procede
JP3775129B2 (ja) 半導体チップの接続方法
FR2466103A1 (fr) Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede
EP0411985B1 (fr) Procédé de formation du réseau multicouche d'une carte de connexion d'au moins un circuit intégré de haute densité
US3836446A (en) Semiconductor devices manufacture
EP0415806B1 (fr) Procédé de dépôt d'une couche isolante sur une couche conductrice du réseau multicouche d'une carte de connexion de circuit intégré de haute densité, et carte en résultant
US9941858B2 (en) Electricoacoustic component with structured conductor and dielectric layer
CN115151030B (zh) 线路板结构及其制造方法
JPH02277242A (ja) 半導体装置の製造方法
JP2004172348A (ja) 薄膜コンデンサの形成方法
CN117426145A (zh) 用于制造用于电子应用的具有双面结构化导电层的片材的方法
JPH09270355A (ja) 電子部品及びその製造方法
JP4134552B2 (ja) 転写部材及びその製造方法及び電子部品及びパターン形成方法
KR100335350B1 (ko) 다중 금속층 패터닝 방법
JP2884021B2 (ja) 電子部品搭載用基板の製造方法
JPH04171745A (ja) 集積回路装置の製造方法
EP0168287A1 (fr) Procédé pour la réalisation d'un circuit imprimé et circuit imprimé obtenu par la mise en oeuvre dudit procédé
JPH08264953A (ja) 多層プリント配線板の配線形成方法
JPH04217386A (ja) 回路の製造方法
JPH0594985A (ja) 半導体装置の製造方法
FR2528248A1 (fr) Procede de fabrication de plaquettes utilisables dans des systemes micro-electroniques
FR2532472A1 (fr) Procede de fabrication de connexions electriques pour circuit hybride et circuit hybride comportant de telles connexions

Legal Events

Date Code Title Description
ST Notification of lapse