FR2466103A1 - Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede - Google Patents
Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede Download PDFInfo
- Publication number
- FR2466103A1 FR2466103A1 FR7923204A FR7923204A FR2466103A1 FR 2466103 A1 FR2466103 A1 FR 2466103A1 FR 7923204 A FR7923204 A FR 7923204A FR 7923204 A FR7923204 A FR 7923204A FR 2466103 A1 FR2466103 A1 FR 2466103A1
- Authority
- FR
- France
- Prior art keywords
- aluminum
- layer
- interconnection
- alumina
- network
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/467—Adding a circuit layer by thin film methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/01—Manufacture or treatment
- H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/6875—Shapes or dispositions thereof being on a metallic substrate, e.g. insulated metal substrates [IMS]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
- H05K1/053—Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an inorganic insulating layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7923204A FR2466103A1 (fr) | 1979-09-18 | 1979-09-18 | Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7923204A FR2466103A1 (fr) | 1979-09-18 | 1979-09-18 | Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2466103A1 true FR2466103A1 (fr) | 1981-03-27 |
| FR2466103B1 FR2466103B1 (https=) | 1983-07-18 |
Family
ID=9229735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7923204A Granted FR2466103A1 (fr) | 1979-09-18 | 1979-09-18 | Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2466103A1 (https=) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2545313A1 (fr) * | 1983-04-29 | 1984-11-02 | Bbc Brown Boveri & Cie | Procede pour fabriquer un circuit a plusieurs couches par stratification et metallisation |
| FR2557755A1 (fr) * | 1983-12-28 | 1985-07-05 | Nec Corp | Substrat de cablage multi-couche |
| EP0170477A3 (en) * | 1984-08-01 | 1987-02-04 | Peter Leslie Moran | Multilayer systems and their method of production |
| WO1995008841A1 (en) * | 1993-09-20 | 1995-03-30 | Labunov Vladimir A | Process for making multilevel interconnections of electronic components |
| WO1996003771A1 (en) * | 1994-07-25 | 1996-02-08 | Micro Components & Systems Ltd. | Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method |
| WO1998053499A1 (en) * | 1997-05-20 | 1998-11-26 | Micro Components Ltd. | Substrate for electronic packaging, pin jig fixture |
| WO2000031797A3 (en) * | 1998-11-25 | 2000-11-23 | Micro Components Ltd | Device for electronic packaging, pin jig fixture |
| NL1033519C2 (nl) * | 2007-03-08 | 2008-09-16 | Yun Tai | Werkwijze voor warmteoverdracht bij halfgeleiders. |
| WO2016190737A3 (en) * | 2015-05-26 | 2017-02-09 | Metalmembranes.Com B.V. | Method to produce electrically isolated or insulated areas in a metal, and a product comprising such area |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3827949A (en) * | 1972-03-29 | 1974-08-06 | Ibm | Anodic oxide passivated planar aluminum metallurgy system and method of producing |
| FR2220879A1 (https=) * | 1973-03-10 | 1974-10-04 | Tokyo Shibaura Electric Co | |
| US4015987A (en) * | 1975-08-13 | 1977-04-05 | The United States Of America As Represented By The Secretary Of The Navy | Process for making chip carriers using anodized aluminum |
-
1979
- 1979-09-18 FR FR7923204A patent/FR2466103A1/fr active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3827949A (en) * | 1972-03-29 | 1974-08-06 | Ibm | Anodic oxide passivated planar aluminum metallurgy system and method of producing |
| FR2220879A1 (https=) * | 1973-03-10 | 1974-10-04 | Tokyo Shibaura Electric Co | |
| US4015987A (en) * | 1975-08-13 | 1977-04-05 | The United States Of America As Represented By The Secretary Of The Navy | Process for making chip carriers using anodized aluminum |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2545313A1 (fr) * | 1983-04-29 | 1984-11-02 | Bbc Brown Boveri & Cie | Procede pour fabriquer un circuit a plusieurs couches par stratification et metallisation |
| FR2557755A1 (fr) * | 1983-12-28 | 1985-07-05 | Nec Corp | Substrat de cablage multi-couche |
| EP0170477A3 (en) * | 1984-08-01 | 1987-02-04 | Peter Leslie Moran | Multilayer systems and their method of production |
| WO1995008841A1 (en) * | 1993-09-20 | 1995-03-30 | Labunov Vladimir A | Process for making multilevel interconnections of electronic components |
| WO1996003771A1 (en) * | 1994-07-25 | 1996-02-08 | Micro Components & Systems Ltd. | Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method |
| US5661341A (en) * | 1994-07-25 | 1997-08-26 | Microcomponents And Systems Ltd. | Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method |
| WO1998053499A1 (en) * | 1997-05-20 | 1998-11-26 | Micro Components Ltd. | Substrate for electronic packaging, pin jig fixture |
| US6448510B1 (en) | 1997-05-20 | 2002-09-10 | Micro Components Ltd. | Substrate for electronic packaging, pin jig fixture |
| WO2000031797A3 (en) * | 1998-11-25 | 2000-11-23 | Micro Components Ltd | Device for electronic packaging, pin jig fixture |
| NL1033519C2 (nl) * | 2007-03-08 | 2008-09-16 | Yun Tai | Werkwijze voor warmteoverdracht bij halfgeleiders. |
| WO2016190737A3 (en) * | 2015-05-26 | 2017-02-09 | Metalmembranes.Com B.V. | Method to produce electrically isolated or insulated areas in a metal, and a product comprising such area |
| CN107923061A (zh) * | 2015-05-26 | 2018-04-17 | 金属膜克姆有限公司 | 在金属中产生电隔离或绝缘区域的方法以及包括这种区域的产品 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2466103B1 (https=) | 1983-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3386894A (en) | Formation of metallic contacts | |
| JPS5828736B2 (ja) | 平坦な薄膜の形成方法 | |
| JPH09213567A (ja) | 薄膜コンデンサおよびその製造方法 | |
| FR2555365A1 (fr) | Procede de fabrication de circuit integre avec connexions de siliciure de tantale et circuit integre realise selon ce procede | |
| JP3775129B2 (ja) | 半導体チップの接続方法 | |
| FR2466103A1 (fr) | Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede | |
| EP0411985B1 (fr) | Procédé de formation du réseau multicouche d'une carte de connexion d'au moins un circuit intégré de haute densité | |
| US3836446A (en) | Semiconductor devices manufacture | |
| EP0415806B1 (fr) | Procédé de dépôt d'une couche isolante sur une couche conductrice du réseau multicouche d'une carte de connexion de circuit intégré de haute densité, et carte en résultant | |
| US9941858B2 (en) | Electricoacoustic component with structured conductor and dielectric layer | |
| CN115151030B (zh) | 线路板结构及其制造方法 | |
| JPH02277242A (ja) | 半導体装置の製造方法 | |
| JP2004172348A (ja) | 薄膜コンデンサの形成方法 | |
| CN117426145A (zh) | 用于制造用于电子应用的具有双面结构化导电层的片材的方法 | |
| JPH09270355A (ja) | 電子部品及びその製造方法 | |
| JP4134552B2 (ja) | 転写部材及びその製造方法及び電子部品及びパターン形成方法 | |
| KR100335350B1 (ko) | 다중 금속층 패터닝 방법 | |
| JP2884021B2 (ja) | 電子部品搭載用基板の製造方法 | |
| JPH04171745A (ja) | 集積回路装置の製造方法 | |
| EP0168287A1 (fr) | Procédé pour la réalisation d'un circuit imprimé et circuit imprimé obtenu par la mise en oeuvre dudit procédé | |
| JPH08264953A (ja) | 多層プリント配線板の配線形成方法 | |
| JPH04217386A (ja) | 回路の製造方法 | |
| JPH0594985A (ja) | 半導体装置の製造方法 | |
| FR2528248A1 (fr) | Procede de fabrication de plaquettes utilisables dans des systemes micro-electroniques | |
| FR2532472A1 (fr) | Procede de fabrication de connexions electriques pour circuit hybride et circuit hybride comportant de telles connexions |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |