FR2455634A1 - Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran - Google Patents
Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecranInfo
- Publication number
- FR2455634A1 FR2455634A1 FR7911311A FR7911311A FR2455634A1 FR 2455634 A1 FR2455634 A1 FR 2455634A1 FR 7911311 A FR7911311 A FR 7911311A FR 7911311 A FR7911311 A FR 7911311A FR 2455634 A1 FR2455634 A1 FR 2455634A1
- Authority
- FR
- France
- Prior art keywords
- screen
- electron beam
- vacuum evaporation
- evaporation deposition
- molded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000007738 vacuum evaporation Methods 0.000 title abstract 2
- 230000008021 deposition Effects 0.000 title 1
- 238000010894 electron beam technology Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PROCEDE ET DISPOSITIF DE DEPOT PAR EVAPORATION SOUS VIDE UTILISANT UN FAISCEAU D'ELECTRONS. SELON L'INVENTION, LE FAISCEAU EST MODULE EN INTENSITE OU EN POSITION ET UN ECRAN EST DEPLACE EN SYNCHRONISME ENTRE LA CIBLE ET LES SUBSTRATS A REVETIR. DE CETTE MANIERE, LES RAYONS X EMIS PAR LA CIBLE SONT BLOQUES PAR L'ECRAN. APPLICATION A LA FABRICATION DES COMPOSANTS ELECTRONIQUES.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7911311A FR2455634A1 (fr) | 1979-05-04 | 1979-05-04 | Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran |
GB8014062A GB2049739B (en) | 1979-05-04 | 1980-04-29 | Vacuum evaporation using a modulated electron beam and x-ray opaque screen |
US06/145,727 US4303694A (en) | 1979-05-04 | 1980-05-01 | Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen |
CH342480A CH637168A5 (fr) | 1979-05-04 | 1980-05-02 | Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons module et un ecran. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7911311A FR2455634A1 (fr) | 1979-05-04 | 1979-05-04 | Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2455634A1 true FR2455634A1 (fr) | 1980-11-28 |
FR2455634B1 FR2455634B1 (fr) | 1981-10-23 |
Family
ID=9225058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7911311A Granted FR2455634A1 (fr) | 1979-05-04 | 1979-05-04 | Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran |
Country Status (4)
Country | Link |
---|---|
US (1) | US4303694A (fr) |
CH (1) | CH637168A5 (fr) |
FR (1) | FR2455634A1 (fr) |
GB (1) | GB2049739B (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4620081A (en) * | 1984-08-03 | 1986-10-28 | The United States Of America As Represented By The United States Department Of Energy | Self-contained hot-hollow cathode gun source assembly |
US4664057A (en) * | 1985-12-20 | 1987-05-12 | Allied Corporation | Photoprocessing apparatus including conical reflector |
GB2202237A (en) * | 1987-03-12 | 1988-09-21 | Vac Tec Syst | Cathodic arc plasma deposition of hard coatings |
JP2655094B2 (ja) * | 1994-08-30 | 1997-09-17 | 日本電気株式会社 | 電子銃蒸着装置 |
JPH11200017A (ja) * | 1998-01-20 | 1999-07-27 | Nikon Corp | 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子 |
WO1999065626A1 (fr) * | 1998-06-16 | 1999-12-23 | University Of Virginia Patent Foundation | Dispositif et procede de production d'enduits constituant une barriere thermique |
US6064686A (en) * | 1999-03-30 | 2000-05-16 | Tfi Telemark | Arc-free electron gun |
GB0307745D0 (en) * | 2003-04-03 | 2003-05-07 | Microemissive Displays Ltd | Method and apparatus for depositing material on a substrate |
USD763807S1 (en) | 2014-05-22 | 2016-08-16 | Hzo, Inc. | Boat for a deposition apparatus |
US9156055B2 (en) | 2012-01-10 | 2015-10-13 | Hzo, Inc. | Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods |
US20140335271A1 (en) * | 2012-01-10 | 2014-11-13 | Hzo, Inc. | Boats configured to optimize vaporization of precursor materials by material deposition apparatuses |
USD760180S1 (en) | 2014-02-21 | 2016-06-28 | Hzo, Inc. | Hexcell channel arrangement for use in a boat for a deposition apparatus |
USD764423S1 (en) | 2014-03-05 | 2016-08-23 | Hzo, Inc. | Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1343437A (fr) * | 1962-01-16 | 1963-11-15 | Procédé d'application de couches minces par vaporisation thermique sur un élément non soumis au rayonnement calorifique, notamment pour microscope, ainsi que le dispositif pour la mise en application du procédé ou procédé similaire | |
CH391418A (de) * | 1959-12-04 | 1965-04-30 | Fritz Dr Grasenick | Verfahren zum Aufbringen von Schichten auf Träger, insbesondere für die elektronenmikroskopische Präparation |
FR1582042A (fr) * | 1968-03-26 | 1969-09-26 | ||
AT314624B (de) * | 1972-01-05 | 1974-04-10 | Herwig Horn Dr | Anordnung zur Vakuumbedampfung aus einer thermischen Dampfquelle |
AT338886B (de) * | 1975-09-22 | 1977-09-26 | Horn Herwig Dr | Anordnung zur bedampfung aus einer thermischen dampfquelle |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL287577A (fr) * | 1962-01-16 | |||
JPS5265783A (en) * | 1975-11-28 | 1977-05-31 | Hitachi Ltd | Equipment for evaporation by electron beam |
-
1979
- 1979-05-04 FR FR7911311A patent/FR2455634A1/fr active Granted
-
1980
- 1980-04-29 GB GB8014062A patent/GB2049739B/en not_active Expired
- 1980-05-01 US US06/145,727 patent/US4303694A/en not_active Expired - Lifetime
- 1980-05-02 CH CH342480A patent/CH637168A5/fr not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH391418A (de) * | 1959-12-04 | 1965-04-30 | Fritz Dr Grasenick | Verfahren zum Aufbringen von Schichten auf Träger, insbesondere für die elektronenmikroskopische Präparation |
FR1343437A (fr) * | 1962-01-16 | 1963-11-15 | Procédé d'application de couches minces par vaporisation thermique sur un élément non soumis au rayonnement calorifique, notamment pour microscope, ainsi que le dispositif pour la mise en application du procédé ou procédé similaire | |
FR1582042A (fr) * | 1968-03-26 | 1969-09-26 | ||
AT314624B (de) * | 1972-01-05 | 1974-04-10 | Herwig Horn Dr | Anordnung zur Vakuumbedampfung aus einer thermischen Dampfquelle |
AT338886B (de) * | 1975-09-22 | 1977-09-26 | Horn Herwig Dr | Anordnung zur bedampfung aus einer thermischen dampfquelle |
Non-Patent Citations (2)
Title |
---|
EXBK/70 * |
EXBK/76 * |
Also Published As
Publication number | Publication date |
---|---|
CH637168A5 (fr) | 1983-07-15 |
GB2049739B (en) | 1983-04-27 |
GB2049739A (en) | 1980-12-31 |
FR2455634B1 (fr) | 1981-10-23 |
US4303694A (en) | 1981-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |