FR2448140A1 - Capteur de pression a diaphragme - Google Patents
Capteur de pression a diaphragmeInfo
- Publication number
- FR2448140A1 FR2448140A1 FR8002042A FR8002042A FR2448140A1 FR 2448140 A1 FR2448140 A1 FR 2448140A1 FR 8002042 A FR8002042 A FR 8002042A FR 8002042 A FR8002042 A FR 8002042A FR 2448140 A1 FR2448140 A1 FR 2448140A1
- Authority
- FR
- France
- Prior art keywords
- type
- integrated
- resistors
- pressure sensor
- epitaxial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000009530 blood pressure measurement Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Abstract
CE CAPTEUR DE PRESSION COMPREND UN BLOC 12 A MEMBRANE CONSTITUE D'UN SOCLE 140 DE SILICIUM DU TYPE N, DE RESISTANCES INTEGREES 18 DU TYPE P ET DE BARRETTES CONDUCTRICES INTEGREES 146 DU TYPE P. UNE COUCHE EPITAXIALE 148 DE SILICIUM DU TYPE N, FORMEE SUR LE SOCLE 140, RECOUVRE LES RESISTANCES INTEGREES ET LES BARRETTES CONDUCTRICES. UNE COUCHE 150 DE SILICE ELECTRIQUEMENT ISOLANTE EST FORMEE SUR LA COUCHE EPITAXIALE. DES REGIONS DIFFUSEES 152 DU TYPE P RELIENT ELECTRIQUEMENT LES BARRETTES CONDUCTRICES INTEGREES A DES CONNEXIONS 154 D'ALUMINIUM FORMEES SUR LA COUCHE DE SILICE. LES RESISTANCES INTEGREES ETANT PROTEGEES, LEUR CARACTERISTIQUE ELECTRIQUE EST STABLE. APPLICATIONS NOTAMMENT A LA MESURE DE PRESSION DE FLUIDES CONTENANT DE L'HUMIDITE ET (OU) DES GAZ CORROSIFS.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979011583U JPS55112864U (fr) | 1979-02-02 | 1979-02-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2448140A1 true FR2448140A1 (fr) | 1980-08-29 |
FR2448140B1 FR2448140B1 (fr) | 1982-12-10 |
Family
ID=11781919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8002042A Granted FR2448140A1 (fr) | 1979-02-02 | 1980-01-30 | Capteur de pression a diaphragme |
Country Status (5)
Country | Link |
---|---|
US (1) | US4314226A (fr) |
JP (1) | JPS55112864U (fr) |
DE (1) | DE3003450C3 (fr) |
FR (1) | FR2448140A1 (fr) |
GB (1) | GB2042257A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0316343A1 (fr) * | 1986-07-28 | 1989-05-24 | Rosemount Inc | Capteurs de pression isoles du milieu de pression. |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3118366A1 (de) * | 1981-05-08 | 1982-11-25 | Siemens AG, 1000 Berlin und 8000 München | Drucksensor |
DE3200448C2 (de) * | 1982-01-09 | 1986-03-06 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung einer Halbleiter-Druckwandleranordnung |
JPS58146827A (ja) * | 1982-02-25 | 1983-09-01 | Fuji Electric Co Ltd | 半導体式圧力センサ |
JPS5995420A (ja) * | 1982-11-24 | 1984-06-01 | Hitachi Ltd | Mos型センサ |
USRE33360E (en) * | 1983-06-22 | 1990-10-02 | Abbott Laboratories | Disposable transducer apparatus for an electromanometry system |
US4557269A (en) * | 1983-06-22 | 1985-12-10 | Abbott Laboratories | Disposable transducer apparatus for an electromanometry system |
JPS60128673A (ja) * | 1983-12-16 | 1985-07-09 | Hitachi Ltd | 半導体感圧装置 |
CA1314410C (fr) * | 1986-12-08 | 1993-03-16 | Masanori Nishiguchi | Structure de cablage pour capteur de pression a semiconducteur |
US4737756A (en) * | 1987-01-08 | 1988-04-12 | Imo Delaval Incorporated | Electrostatically bonded pressure transducers for corrosive fluids |
US4996627A (en) * | 1989-01-30 | 1991-02-26 | Dresser Industries, Inc. | High sensitivity miniature pressure transducer |
US5107309A (en) * | 1989-12-18 | 1992-04-21 | Honeywell Inc. | Double diffused leadout for a semiconductor device |
EP0548470B2 (fr) * | 1991-12-24 | 1999-12-08 | Landis & Gyr Technology Innovation AG | Capteur de pression avec un diaphragme en matériau sémi-conducteur |
US6229427B1 (en) * | 1995-07-13 | 2001-05-08 | Kulite Semiconductor Products Inc. | Covered sealed pressure transducers and method for making same |
JP3426498B2 (ja) * | 1997-08-13 | 2003-07-14 | 株式会社日立ユニシアオートモティブ | 圧力センサ |
US7439616B2 (en) * | 2000-11-28 | 2008-10-21 | Knowles Electronics, Llc | Miniature silicon condenser microphone |
US7434305B2 (en) | 2000-11-28 | 2008-10-14 | Knowles Electronics, Llc. | Method of manufacturing a microphone |
US7166910B2 (en) | 2000-11-28 | 2007-01-23 | Knowles Electronics Llc | Miniature silicon condenser microphone |
US8617934B1 (en) | 2000-11-28 | 2013-12-31 | Knowles Electronics, Llc | Methods of manufacture of top port multi-part surface mount silicon condenser microphone packages |
WO2003104784A1 (fr) * | 2002-06-07 | 2003-12-18 | Cantion A/S | Capteur cantilever a ecran de courant et son procede de production |
DE102004035545A1 (de) * | 2004-07-22 | 2006-02-16 | Siemens Ag | Drucksensor und Verfahren zu dessen Herstellung |
DE102005008512B4 (de) | 2005-02-24 | 2016-06-23 | Epcos Ag | Elektrisches Modul mit einem MEMS-Mikrofon |
DE102005008514B4 (de) * | 2005-02-24 | 2019-05-16 | Tdk Corporation | Mikrofonmembran und Mikrofon mit der Mikrofonmembran |
DE102005008511B4 (de) * | 2005-02-24 | 2019-09-12 | Tdk Corporation | MEMS-Mikrofon |
DE102005053765B4 (de) * | 2005-11-10 | 2016-04-14 | Epcos Ag | MEMS-Package und Verfahren zur Herstellung |
DE102005053767B4 (de) * | 2005-11-10 | 2014-10-30 | Epcos Ag | MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau |
DE102005058653A1 (de) * | 2005-12-07 | 2007-06-28 | Siemens Ag | Mitteldrucksensor |
JP4897318B2 (ja) * | 2006-03-16 | 2012-03-14 | ラピスセミコンダクタ株式会社 | ピエゾ抵抗素子及びその製造方法 |
US20080217709A1 (en) * | 2007-03-07 | 2008-09-11 | Knowles Electronics, Llc | Mems package having at least one port and manufacturing method thereof |
JP2009053034A (ja) * | 2007-08-27 | 2009-03-12 | Mitsumi Electric Co Ltd | 半導体圧力センサ及びその製造方法 |
DE102010018499A1 (de) * | 2010-04-22 | 2011-10-27 | Schweizer Electronic Ag | Leiterplatte mit Hohlraum |
US9374643B2 (en) | 2011-11-04 | 2016-06-21 | Knowles Electronics, Llc | Embedded dielectric as a barrier in an acoustic device and method of manufacture |
US9078063B2 (en) | 2012-08-10 | 2015-07-07 | Knowles Electronics, Llc | Microphone assembly with barrier to prevent contaminant infiltration |
DE102013106353B4 (de) * | 2013-06-18 | 2018-06-28 | Tdk Corporation | Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement |
US9794661B2 (en) | 2015-08-07 | 2017-10-17 | Knowles Electronics, Llc | Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package |
CN116062677A (zh) * | 2023-03-21 | 2023-05-05 | 无锡胜脉电子有限公司 | 一种抗干扰的mems压力传感器芯片及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1248087A (en) * | 1969-02-28 | 1971-09-29 | Ferranti Ltd | Improvements relating to pressure gauges |
US3753196A (en) * | 1971-10-05 | 1973-08-14 | Kulite Semiconductor Products | Transducers employing integral protective coatings and supports |
US3968466A (en) * | 1973-10-09 | 1976-07-06 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Pressure transducer |
US3994009A (en) * | 1973-02-12 | 1976-11-23 | Honeywell Inc. | Stress sensor diaphragms over recessed substrates |
US4023562A (en) * | 1975-09-02 | 1977-05-17 | Case Western Reserve University | Miniature pressure transducer for medical use and assembly method |
FR2422261A1 (fr) * | 1978-04-05 | 1979-11-02 | Hitachi Ltd | Transducteur de pression absolue semi-conducteur et procede de fabrication |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT946150B (it) * | 1971-12-15 | 1973-05-21 | Ates Componenti Elettron | Perfezionamento al processo plana re epistssiale per la produzione di circuiti integrati lineari di potenza |
US3971059A (en) * | 1974-09-23 | 1976-07-20 | National Semiconductor Corporation | Complementary bipolar transistors having collector diffused isolation |
NL7415668A (nl) * | 1974-12-02 | 1976-06-04 | Philips Nv | Drukopnemer. |
DE2644638A1 (de) * | 1975-10-06 | 1977-04-07 | Honeywell Inc | Verfahren zur herstellung eines halbleiter-druckfuehlers sowie nach diesem verfahren hergestellter druckfuehler |
US4035823A (en) * | 1975-10-06 | 1977-07-12 | Honeywell Inc. | Stress sensor apparatus |
US4125820A (en) * | 1975-10-06 | 1978-11-14 | Honeywell Inc. | Stress sensor apparatus |
US4095252A (en) * | 1976-12-27 | 1978-06-13 | National Semiconductor Corporation | Composite jfet-bipolar transistor structure |
US4129042A (en) * | 1977-11-18 | 1978-12-12 | Signetics Corporation | Semiconductor transducer packaged assembly |
US4205556A (en) * | 1979-02-12 | 1980-06-03 | Rockwell International Corporation | Circuitry for strain sensitive apparatus |
-
1979
- 1979-02-02 JP JP1979011583U patent/JPS55112864U/ja active Pending
-
1980
- 1980-01-04 US US06/109,489 patent/US4314226A/en not_active Expired - Lifetime
- 1980-01-09 GB GB8000745A patent/GB2042257A/en not_active Withdrawn
- 1980-01-30 FR FR8002042A patent/FR2448140A1/fr active Granted
- 1980-01-31 DE DE3003450A patent/DE3003450C3/de not_active Expired
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1248087A (en) * | 1969-02-28 | 1971-09-29 | Ferranti Ltd | Improvements relating to pressure gauges |
US3753196A (en) * | 1971-10-05 | 1973-08-14 | Kulite Semiconductor Products | Transducers employing integral protective coatings and supports |
US3994009A (en) * | 1973-02-12 | 1976-11-23 | Honeywell Inc. | Stress sensor diaphragms over recessed substrates |
US3968466A (en) * | 1973-10-09 | 1976-07-06 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Pressure transducer |
US4023562A (en) * | 1975-09-02 | 1977-05-17 | Case Western Reserve University | Miniature pressure transducer for medical use and assembly method |
FR2422261A1 (fr) * | 1978-04-05 | 1979-11-02 | Hitachi Ltd | Transducteur de pression absolue semi-conducteur et procede de fabrication |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0316343A1 (fr) * | 1986-07-28 | 1989-05-24 | Rosemount Inc | Capteurs de pression isoles du milieu de pression. |
EP0316343A4 (en) * | 1986-07-28 | 1990-09-26 | Rosemount Inc. | Media isolated differential pressure sensors |
Also Published As
Publication number | Publication date |
---|---|
FR2448140B1 (fr) | 1982-12-10 |
GB2042257A (en) | 1980-09-17 |
DE3003450A1 (de) | 1980-08-07 |
US4314226A (en) | 1982-02-02 |
JPS55112864U (fr) | 1980-08-08 |
DE3003450B2 (de) | 1981-07-16 |
DE3003450C3 (de) | 1982-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |