FR2435080A1 - Procede et appareil pour positionner photoelectriquement un objet par reference a un repere de coincidence - Google Patents

Procede et appareil pour positionner photoelectriquement un objet par reference a un repere de coincidence

Info

Publication number
FR2435080A1
FR2435080A1 FR7921658A FR7921658A FR2435080A1 FR 2435080 A1 FR2435080 A1 FR 2435080A1 FR 7921658 A FR7921658 A FR 7921658A FR 7921658 A FR7921658 A FR 7921658A FR 2435080 A1 FR2435080 A1 FR 2435080A1
Authority
FR
France
Prior art keywords
parts
photoelectrically
positioning
mark
coincidence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7921658A
Other languages
English (en)
Other versions
FR2435080B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of FR2435080A1 publication Critical patent/FR2435080A1/fr
Application granted granted Critical
Publication of FR2435080B1 publication Critical patent/FR2435080B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • G05D3/16—Control of position or direction using feedback using an analogue comparing device whose output amplitude can only take a number of discrete values

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Procédé pour positionner photoélectriquement un objet dans lequel on utilise un élément détecteur photoélectrique divisé en deux parties et l'objet est déplacé au-dessus desdites parties d'éléments entre elles et la lumière qui leur tombe dessus, ledit objet comporte un repère de coïncidence dont la transparence est différente de celle de l'objet, de sorte que son passage affecte les parties éléments de telle manière que lorsque le repère découvre progressivement l'une des parties, il recouvre progressivement l'autre. Lorsque les parties de repère couvrant les deux parties d'éléments détecteurs sont égales, le mouvement de l'objet est stoppé.
FR7921658A 1978-08-30 1979-08-29 Procede et appareil pour positionner photoelectriquement un objet par reference a un repere de coincidence Granted FR2435080A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10653478A JPS5533146A (en) 1978-08-30 1978-08-30 Photoelectric element for detecting and positioning register mark for engraving

Publications (2)

Publication Number Publication Date
FR2435080A1 true FR2435080A1 (fr) 1980-03-28
FR2435080B1 FR2435080B1 (fr) 1983-10-21

Family

ID=14436050

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7921658A Granted FR2435080A1 (fr) 1978-08-30 1979-08-29 Procede et appareil pour positionner photoelectriquement un objet par reference a un repere de coincidence

Country Status (4)

Country Link
JP (1) JPS5533146A (fr)
DE (1) DE2934603A1 (fr)
FR (1) FR2435080A1 (fr)
GB (1) GB2034025A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634290A1 (fr) * 1988-07-13 1990-01-19 Hologram Ind Procede et dispositif d'enregistrement d'images en relief
EP0418710A1 (fr) * 1989-09-18 1991-03-27 ABB Reaktor GmbH Dispositif pour positionner un mât d'inspection et/ou de réparation d'une cloison d'un coeur d'un réacteur nucléaire refroidi à l'eau
WO1998040792A1 (fr) * 1997-03-10 1998-09-17 Ohlig Albert H Systeme et procede d'alignement optique de films et de substrats pour plaquettes a circuit integre

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793154A (en) * 1980-12-02 1982-06-10 Nissha Printing Co Ltd Registration for printing using transparent ink
DE3335164C2 (de) * 1982-09-28 1994-06-09 Komatsu Mfg Co Ltd Verfahren zur Positionierung von Blechmaterial in einer Stanzeinrichtung
JPS606145U (ja) * 1983-06-23 1985-01-17 日本写真印刷株式会社 製版用フイルム
US4657239A (en) * 1983-07-20 1987-04-14 Ricoh Company, Ltd. Sheet aligning device
US4628578A (en) * 1983-08-19 1986-12-16 Kabushiki Kaisha Komatsu Seisakusho Method and apparatus for automatic punching
DE3377934D1 (en) * 1983-12-28 1988-10-13 Ibm Process and equipment for the automatic alignment of an object in respect of a reference
DE3434125A1 (de) * 1984-09-17 1986-03-20 Battelle-Institut E.V., 6000 Frankfurt Vorrichtung zur steuerung zweidimensionaler bewegungen
DE3443178A1 (de) * 1984-11-27 1986-05-28 Hoechst Ag, 6230 Frankfurt Verfahren zum positionieren von druckformen vor dem stanzen von registerlochungen sowie anordnung zum durchfuehren des verfahrens
FR2598971B1 (fr) * 1986-05-23 1988-08-26 Freminet Dany Perfectionnements aux dispositifs de marge automatique pour machine a imprimer en serigraphie a plateau sortant.
US4835078A (en) * 1987-07-06 1989-05-30 American Telephone And Telegraph Company Method for aligning photomasks
DE3837042A1 (de) * 1988-10-31 1990-05-03 Battelle Institut E V Vorrichtung zum positionieren von materialien in einem kraftfeld
DE4442596C1 (de) * 1994-11-30 1996-04-04 Heidelberg Instruments Mikrotechnik Gmbh Verfahren zur Korrektur von Positionsmeßfehlern
DE102006020358A1 (de) * 2006-04-28 2007-10-31 Prüftechnik Dieter Busch AG Vorrichtung zur quantitativen Beurteilung der räumlichen Lage zweier Maschinenteile, Wellen, Spindeln, Werkstücke oder anderer Gegenstände relativ zueinander
DE102011000613A1 (de) * 2011-02-10 2012-08-16 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Vorrichtung zum Ausrichten eines ersten Bauteils zu einem zweiten Bauteil
DE102016205137B4 (de) * 2016-03-29 2017-12-14 Wafios Aktiengesellschaft Verfahren und Biegemaschine zur Herstellung eines mehrdimensional gebogenen Biegeteils

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128465A (en) * 1974-09-04 1976-03-10 Hitachi Ltd Kauntaomochiita noizusapuresuhoshiki
JPS5352072A (en) * 1976-10-22 1978-05-12 Hitachi Ltd Pattern for alignment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634290A1 (fr) * 1988-07-13 1990-01-19 Hologram Ind Procede et dispositif d'enregistrement d'images en relief
EP0418710A1 (fr) * 1989-09-18 1991-03-27 ABB Reaktor GmbH Dispositif pour positionner un mât d'inspection et/ou de réparation d'une cloison d'un coeur d'un réacteur nucléaire refroidi à l'eau
WO1998040792A1 (fr) * 1997-03-10 1998-09-17 Ohlig Albert H Systeme et procede d'alignement optique de films et de substrats pour plaquettes a circuit integre
GB2340960A (en) * 1997-03-10 2000-03-01 Albert H Ohlig System and method for optically aligning films and substrates used in printed circuit boards
US6156220A (en) * 1997-03-10 2000-12-05 Ohlig; Albert H. System and method for optically aligning films and substrates used in printed circuit boards
US6193899B1 (en) 1997-03-10 2001-02-27 Albert H. Ohlig System and method for optically aligning films and substrates used in printed circuit boards

Also Published As

Publication number Publication date
GB2034025A (en) 1980-05-29
FR2435080B1 (fr) 1983-10-21
DE2934603A1 (de) 1980-03-06
JPS5533146A (en) 1980-03-08

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Legal Events

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