FR2369022A1 - Procede et appareil de nettoyage d'une piece par ultrasons - Google Patents
Procede et appareil de nettoyage d'une piece par ultrasonsInfo
- Publication number
- FR2369022A1 FR2369022A1 FR7731930A FR7731930A FR2369022A1 FR 2369022 A1 FR2369022 A1 FR 2369022A1 FR 7731930 A FR7731930 A FR 7731930A FR 7731930 A FR7731930 A FR 7731930A FR 2369022 A1 FR2369022 A1 FR 2369022A1
- Authority
- FR
- France
- Prior art keywords
- cleaning
- solvent
- ultrasonics
- ultrasonic
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
L'invention concerne le nettoyage par ultrasons de pièces. La surface à nettoyer d'une pièce 14 reçoit un courant continu de solvant provenant d'un réservoir 40, et un transducteur ultrasonore 50 provoque un phénomène de cavitation dans la pellicule de solvant pour nettoyer efficacement la surface de la pièce. Le nettoyage s'effectue ainsi sans contact mécanique susceptible de déteriorer la pièce. Application au nettoyage des tranches de semiconducteur.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/735,601 US4064885A (en) | 1976-10-26 | 1976-10-26 | Apparatus for cleaning workpieces by ultrasonic energy |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2369022A1 true FR2369022A1 (fr) | 1978-05-26 |
FR2369022B1 FR2369022B1 (fr) | 1982-03-05 |
Family
ID=24956463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7731930A Granted FR2369022A1 (fr) | 1976-10-26 | 1977-10-24 | Procede et appareil de nettoyage d'une piece par ultrasons |
Country Status (5)
Country | Link |
---|---|
US (1) | US4064885A (fr) |
JP (1) | JPS5354868A (fr) |
DE (1) | DE2747082B2 (fr) |
FR (1) | FR2369022A1 (fr) |
GB (1) | GB1591742A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2505673A1 (fr) * | 1981-05-15 | 1982-11-19 | Gca Corp | Appareil pour le decapage par ultra-sons de galettes semiconductrices |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4183011A (en) * | 1977-12-22 | 1980-01-08 | Fred M. Dellorfano, Jr. | Ultrasonic cleaning systems |
JPS56144785A (en) * | 1980-04-11 | 1981-11-11 | Olympus Optical Co | Washer for endoscope |
CH651484A5 (de) * | 1981-06-24 | 1985-09-30 | Roag Ag | Verfahren und vorrichtung zum trennen von optikteilen von tragkoerpern. |
US4409999A (en) * | 1981-08-07 | 1983-10-18 | Pedziwiatr Edward A | Automatic ultrasonic cleaning apparatus |
DE3208195A1 (de) * | 1982-03-06 | 1983-09-08 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Ultraschall-reinigungsverfahren |
US4501285A (en) * | 1982-04-05 | 1985-02-26 | Sonobond Ultrasonics, Inc. | Ultrasonic cleaning apparatus |
US4489740A (en) * | 1982-12-27 | 1984-12-25 | General Signal Corporation | Disc cleaning machine |
CS232593B1 (en) * | 1983-08-22 | 1985-02-14 | Karel Gabriel | Equipment for cleaning of parts by means of near ultrasound field |
FR2575942B1 (fr) * | 1985-01-11 | 1987-05-15 | Thomas Jean | Procede et dispositif de nettoyage par ultrasons |
US4924890A (en) * | 1986-05-16 | 1990-05-15 | Eastman Kodak Company | Method and apparatus for cleaning semiconductor wafers |
GB8727513D0 (en) * | 1987-11-24 | 1987-12-23 | Int Computers Ltd | Cleaning keyboards |
US5230743A (en) * | 1988-05-25 | 1993-07-27 | Semitool, Inc. | Method for single wafer processing in which a semiconductor wafer is contacted with a fluid |
US5168886A (en) * | 1988-05-25 | 1992-12-08 | Semitool, Inc. | Single wafer processor |
US5224504A (en) * | 1988-05-25 | 1993-07-06 | Semitool, Inc. | Single wafer processor |
DE3903607A1 (de) * | 1989-02-08 | 1990-08-09 | Leybold Ag | Vorrichtung zum reinigen, pruefen und einordnen von werkstuecken |
JPH03136232A (ja) * | 1989-08-31 | 1991-06-11 | Dainippon Screen Mfg Co Ltd | 基板の表面処理装置 |
DE3937442A1 (de) * | 1989-11-10 | 1991-05-16 | Nokia Unterhaltungselektronik | Verfahren zum bereichsweisen entfernen von schichten von einem substrat |
US5203360A (en) * | 1990-12-17 | 1993-04-20 | Seagate Technology, Inc. | Disc washing system |
JP2877216B2 (ja) * | 1992-10-02 | 1999-03-31 | 東京エレクトロン株式会社 | 洗浄装置 |
US5529753A (en) * | 1993-07-09 | 1996-06-25 | Dade International Inc. | System for ultrasonic energy coupling by irrigation |
US5368054A (en) * | 1993-12-17 | 1994-11-29 | International Business Machines Corporation | Ultrasonic jet semiconductor wafer cleaning apparatus |
KR0132274B1 (ko) * | 1994-05-16 | 1998-04-11 | 김광호 | 웨이퍼 연마 설비 |
JPH08162425A (ja) * | 1994-12-06 | 1996-06-21 | Mitsubishi Electric Corp | 半導体集積回路装置の製造方法および製造装置 |
US5558111A (en) * | 1995-02-02 | 1996-09-24 | International Business Machines Corporation | Apparatus and method for carrier backing film reconditioning |
JPH08238463A (ja) * | 1995-03-03 | 1996-09-17 | Ebara Corp | 洗浄方法及び洗浄装置 |
US5975098A (en) * | 1995-12-21 | 1999-11-02 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for and method of cleaning substrate |
DE19615962C1 (de) * | 1996-04-22 | 1997-10-23 | Siemens Ag | Verfahren zur Entstaubung von Bauteilen von Elektronenröhren |
DE19619000A1 (de) * | 1996-05-10 | 1997-11-20 | Gottlob Schwarzwaelder | Vorrichtung und Verfahren zum Reinigen von farb- und lackverschmutzten Gegenständen |
US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
JP3286539B2 (ja) * | 1996-10-30 | 2002-05-27 | 信越半導体株式会社 | 洗浄装置および洗浄方法 |
US20020066464A1 (en) * | 1997-05-09 | 2002-06-06 | Semitool, Inc. | Processing a workpiece using ozone and sonic energy |
US20050194356A1 (en) * | 1997-05-09 | 2005-09-08 | Semitool, Inc. | Removing photoresist from a workpiece using water and ozone and a photoresist penetrating additive |
US20050034745A1 (en) * | 1997-05-09 | 2005-02-17 | Semitool, Inc. | Processing a workpiece with ozone and a halogenated additive |
US6701941B1 (en) * | 1997-05-09 | 2004-03-09 | Semitool, Inc. | Method for treating the surface of a workpiece |
US7416611B2 (en) * | 1997-05-09 | 2008-08-26 | Semitool, Inc. | Process and apparatus for treating a workpiece with gases |
US7163588B2 (en) * | 1997-05-09 | 2007-01-16 | Semitool, Inc. | Processing a workpiece using water, a base, and ozone |
US20020157686A1 (en) * | 1997-05-09 | 2002-10-31 | Semitool, Inc. | Process and apparatus for treating a workpiece such as a semiconductor wafer |
US6021789A (en) * | 1998-11-10 | 2000-02-08 | International Business Machines Corporation | Wafer cleaning system with progressive megasonic wave |
US6619305B1 (en) * | 2000-01-11 | 2003-09-16 | Seagate Technology Llc | Apparatus for single disc ultrasonic cleaning |
US6539952B2 (en) | 2000-04-25 | 2003-04-01 | Solid State Equipment Corp. | Megasonic treatment apparatus |
US6766813B1 (en) | 2000-08-01 | 2004-07-27 | Board Of Regents, The University Of Texas System | Apparatus and method for cleaning a wafer |
US6569256B1 (en) * | 2000-09-21 | 2003-05-27 | Intel Corporation | Removing toner from printed material |
KR100473475B1 (ko) * | 2002-08-09 | 2005-03-10 | 삼성전자주식회사 | 기판 세정 장치 |
US7306002B2 (en) * | 2003-01-04 | 2007-12-11 | Yong Bae Kim | System and method for wet cleaning a semiconductor wafer |
US20060027248A1 (en) * | 2004-08-09 | 2006-02-09 | Applied Materials, Inc. | Megasonic cleaning with minimized interference |
MY154929A (en) | 2007-02-08 | 2015-08-28 | Fontana Technology | Particle removal method and composition |
US9266117B2 (en) | 2011-09-20 | 2016-02-23 | Jo-Ann Reif | Process and system for treating particulate solids |
US9192968B2 (en) | 2012-09-20 | 2015-11-24 | Wave Particle Processing | Process and system for treating particulate solids |
CN105983552B (zh) * | 2015-02-15 | 2019-12-24 | 盛美半导体设备(上海)有限公司 | 一种防掉落的半导体清洗装置 |
WO2017125242A1 (fr) | 2016-01-20 | 2017-07-27 | DUSSAULT, Donald Herbert | Procédé et appareil pour le nettoyage d'un disque |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1091076B (de) * | 1956-08-24 | 1960-10-20 | Karl Roll | Vorrichtung zum Reinigen von Gegenstaenden mittels Ultraschall |
US3950184A (en) * | 1974-11-18 | 1976-04-13 | Texas Instruments Incorporated | Multichannel drainage system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2850854A (en) * | 1956-08-20 | 1958-09-09 | Levy Sidney | Method for removing material |
US2938732A (en) * | 1958-08-13 | 1960-05-31 | Jr Cornelius Mantell | Disc record cleaning device |
US2994329A (en) * | 1958-11-10 | 1961-08-01 | Beryl G Catlin | Brush and comb cleaner |
US3401708A (en) * | 1966-11-28 | 1968-09-17 | Richard W. Henes | Device for ultrasonically cleaning phonographic records |
DE6813009U (de) * | 1968-10-03 | 1969-05-29 | Nuova Tecnofarmo Di Panighi & | Vorrichtung zur saeuberung, sterilisation und sterilen aufbewahrung von gegenstaenden und instrumenten |
US3829328A (en) * | 1970-07-13 | 1974-08-13 | Stam Instr | Method for cleaning resilient webs |
JPS489567U (fr) * | 1971-06-18 | 1973-02-02 |
-
1976
- 1976-10-26 US US05/735,601 patent/US4064885A/en not_active Expired - Lifetime
-
1977
- 1977-09-05 JP JP10657177A patent/JPS5354868A/ja active Granted
- 1977-10-20 DE DE2747082A patent/DE2747082B2/de not_active Ceased
- 1977-10-24 GB GB44100/77A patent/GB1591742A/en not_active Expired
- 1977-10-24 FR FR7731930A patent/FR2369022A1/fr active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1091076B (de) * | 1956-08-24 | 1960-10-20 | Karl Roll | Vorrichtung zum Reinigen von Gegenstaenden mittels Ultraschall |
US3950184A (en) * | 1974-11-18 | 1976-04-13 | Texas Instruments Incorporated | Multichannel drainage system |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2505673A1 (fr) * | 1981-05-15 | 1982-11-19 | Gca Corp | Appareil pour le decapage par ultra-sons de galettes semiconductrices |
Also Published As
Publication number | Publication date |
---|---|
DE2747082B2 (de) | 1980-11-06 |
DE2747082A1 (de) | 1978-05-03 |
JPS5644788B2 (fr) | 1981-10-21 |
FR2369022B1 (fr) | 1982-03-05 |
GB1591742A (en) | 1981-06-24 |
US4064885A (en) | 1977-12-27 |
JPS5354868A (en) | 1978-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |