FR2368144A1 - Structure compacte de d - Google Patents
Structure compacte de dInfo
- Publication number
- FR2368144A1 FR2368144A1 FR7730866A FR7730866A FR2368144A1 FR 2368144 A1 FR2368144 A1 FR 2368144A1 FR 7730866 A FR7730866 A FR 7730866A FR 7730866 A FR7730866 A FR 7730866A FR 2368144 A1 FR2368144 A1 FR 2368144A1
- Authority
- FR
- France
- Prior art keywords
- transfer device
- load transfer
- depositions
- fabrication
- conductive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000008188 pellet Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66946—Charge transfer devices
- H01L29/66954—Charge transfer devices with an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42396—Gate electrodes for field effect devices for charge coupled devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/762—Charge transfer devices
- H01L29/765—Charge-coupled devices
- H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
- H01L29/76866—Surface Channel CCD
- H01L29/76875—Two-Phase CCD
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
Abstract
Une structure de portes à dispositif à transfert de charge perfectionnée. On effectue trois dépôts de matériau électriquement conducteur tels que 35b, 40a et 45b pour former des électrodes, ce qui permet la fabrication de structures de portes CCD à deux phases occupant moins de superficie de pastille et fonctionnant à des vitesses plus rapides que les structures de portes à dispositif à transfert de charge classiques. Application aux composants électroniques.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/732,614 US4097885A (en) | 1976-10-15 | 1976-10-15 | Compact, two-phase charge-coupled-device structure utilizing multiple layers of conductive material |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2368144A1 true FR2368144A1 (fr) | 1978-05-12 |
FR2368144B1 FR2368144B1 (fr) | 1983-09-09 |
Family
ID=24944271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7730866A Granted FR2368144A1 (fr) | 1976-10-15 | 1977-10-13 | Structure compacte de d |
Country Status (6)
Country | Link |
---|---|
US (1) | US4097885A (fr) |
JP (1) | JPS5349961A (fr) |
CA (1) | CA1111137A (fr) |
DE (1) | DE2743299A1 (fr) |
FR (1) | FR2368144A1 (fr) |
GB (1) | GB1575690A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0137554A2 (fr) * | 1983-09-23 | 1985-04-17 | Koninklijke Philips Electronics N.V. | Procédé pour la fabrication d'un dispositif semi-conducteur et dispositif semi-conducteur fabriqué selon ce procédé |
FR2603732A1 (fr) * | 1986-09-04 | 1988-03-11 | Werk Fernsehelektronik Veb | Registre a decalage a accouplement de charge (registre ccd) avec une tres petite trame en supprimant une zone de transfert |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4385432A (en) * | 1978-05-18 | 1983-05-31 | Texas Instruments Incorporated | Closely-spaced double level conductors for MOS read only |
US4377904A (en) * | 1978-10-10 | 1983-03-29 | Texas Instruments Incorporated | Method of fabricating a narrow band-gap semiconductor CCD imaging device |
US4231149A (en) * | 1978-10-10 | 1980-11-04 | Texas Instruments Incorporated | Narrow band-gap semiconductor CCD imaging device and method of fabrication |
US4234362A (en) * | 1978-11-03 | 1980-11-18 | International Business Machines Corporation | Method for forming an insulator between layers of conductive material |
JPS56138951A (en) * | 1980-03-31 | 1981-10-29 | Fujitsu Ltd | Manufacture of semiconductor memory device |
JPH02266537A (ja) * | 1989-04-07 | 1990-10-31 | Mitsubishi Electric Corp | 電荷転送素子 |
JP2642523B2 (ja) * | 1991-03-19 | 1997-08-20 | 株式会社東芝 | 電荷結合素子を持つ半導体集積回路装置の製造方法 |
US6218686B1 (en) | 1995-12-28 | 2001-04-17 | Samsung Electronics Co. Ltd. | Charge coupled devices |
KR0165326B1 (ko) * | 1995-12-28 | 1998-12-15 | 김광호 | 전하전송소자 및 그 제조방법 |
KR100268440B1 (ko) | 1998-09-21 | 2000-10-16 | 윤종용 | 고감도 고체 촬상 장치 |
KR20010001327A (ko) * | 1999-06-03 | 2001-01-05 | 김영환 | 전하 결합 소자 |
JP2004006671A (ja) * | 2002-03-22 | 2004-01-08 | Sanyo Electric Co Ltd | 電荷結合素子およびその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2260870A1 (fr) * | 1974-02-08 | 1975-09-05 | Fairchild Camera Instr Co | |
US3909925A (en) * | 1974-05-06 | 1975-10-07 | Telex Computer Products | N-Channel charge coupled device fabrication process |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3795847A (en) * | 1973-03-26 | 1974-03-05 | Gen Electric | Method and apparatus for storing and transferring information |
US3967306A (en) * | 1973-08-01 | 1976-06-29 | Trw Inc. | Asymmetrical well charge coupled device |
US3943543A (en) * | 1974-07-26 | 1976-03-09 | Texas Instruments Incorporated | Three level electrode configuration for three phase charge coupled device |
JPS51138175A (en) * | 1975-05-26 | 1976-11-29 | Fujitsu Ltd | Method of manufacturing charge coupled device |
-
1976
- 1976-10-15 US US05/732,614 patent/US4097885A/en not_active Expired - Lifetime
-
1977
- 1977-07-04 CA CA281,899A patent/CA1111137A/fr not_active Expired
- 1977-07-07 GB GB28582/77A patent/GB1575690A/en not_active Expired
- 1977-08-31 JP JP10375777A patent/JPS5349961A/ja active Granted
- 1977-09-27 DE DE19772743299 patent/DE2743299A1/de not_active Withdrawn
- 1977-10-13 FR FR7730866A patent/FR2368144A1/fr active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2260870A1 (fr) * | 1974-02-08 | 1975-09-05 | Fairchild Camera Instr Co | |
US3931674A (en) * | 1974-02-08 | 1976-01-13 | Fairchild Camera And Instrument Corporation | Self aligned CCD element including two levels of electrodes and method of manufacture therefor |
US3909925A (en) * | 1974-05-06 | 1975-10-07 | Telex Computer Products | N-Channel charge coupled device fabrication process |
Non-Patent Citations (1)
Title |
---|
EXBK/71 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0137554A2 (fr) * | 1983-09-23 | 1985-04-17 | Koninklijke Philips Electronics N.V. | Procédé pour la fabrication d'un dispositif semi-conducteur et dispositif semi-conducteur fabriqué selon ce procédé |
EP0137554A3 (en) * | 1983-09-23 | 1985-05-22 | N.V. Philips' Gloeilampenfabrieken | Method of manufacturing a semiconductor device and semiconductor device manufactured by the use of such a method |
FR2603732A1 (fr) * | 1986-09-04 | 1988-03-11 | Werk Fernsehelektronik Veb | Registre a decalage a accouplement de charge (registre ccd) avec une tres petite trame en supprimant une zone de transfert |
Also Published As
Publication number | Publication date |
---|---|
JPS5349961A (en) | 1978-05-06 |
GB1575690A (en) | 1980-09-24 |
CA1111137A (fr) | 1981-10-20 |
JPS5514545B2 (fr) | 1980-04-17 |
FR2368144B1 (fr) | 1983-09-09 |
US4097885A (en) | 1978-06-27 |
DE2743299A1 (de) | 1978-04-20 |
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