FR2363889A1 - Procede de fabrication de regions enterrees conductrices dans des circuits integres et structures resultantes - Google Patents

Procede de fabrication de regions enterrees conductrices dans des circuits integres et structures resultantes

Info

Publication number
FR2363889A1
FR2363889A1 FR7726691A FR7726691A FR2363889A1 FR 2363889 A1 FR2363889 A1 FR 2363889A1 FR 7726691 A FR7726691 A FR 7726691A FR 7726691 A FR7726691 A FR 7726691A FR 2363889 A1 FR2363889 A1 FR 2363889A1
Authority
FR
France
Prior art keywords
integrated circuits
conductive regions
resulting structures
buried conductive
manufacturing buried
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7726691A
Other languages
English (en)
French (fr)
Other versions
FR2363889B1 (enFirst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Publication of FR2363889A1 publication Critical patent/FR2363889A1/fr
Application granted granted Critical
Publication of FR2363889B1 publication Critical patent/FR2363889B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
    • H10W10/0121—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] in regions recessed from the surface, e.g. in trenches or grooves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
    • H10W10/0125—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] comprising introducing electrical impurities in local oxidation regions, e.g. to alter LOCOS oxide growth characteristics
    • H10W10/0126—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] comprising introducing electrical impurities in local oxidation regions, e.g. to alter LOCOS oxide growth characteristics introducing electrical active impurities in local oxidation regions to create channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/13—Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
FR7726691A 1976-09-03 1977-09-02 Procede de fabrication de regions enterrees conductrices dans des circuits integres et structures resultantes Granted FR2363889A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/720,550 US4149177A (en) 1976-09-03 1976-09-03 Method of fabricating conductive buried regions in integrated circuits and the resulting structures

Publications (2)

Publication Number Publication Date
FR2363889A1 true FR2363889A1 (fr) 1978-03-31
FR2363889B1 FR2363889B1 (enFirst) 1983-01-14

Family

ID=24894399

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7726691A Granted FR2363889A1 (fr) 1976-09-03 1977-09-02 Procede de fabrication de regions enterrees conductrices dans des circuits integres et structures resultantes

Country Status (6)

Country Link
US (1) US4149177A (enFirst)
JP (1) JPS5331984A (enFirst)
CA (1) CA1085064A (enFirst)
DE (1) DE2738049A1 (enFirst)
FR (1) FR2363889A1 (enFirst)
GB (1) GB1577420A (enFirst)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2413782A1 (fr) * 1977-12-30 1979-07-27 Radiotechnique Compelec Element de circuit integre destine aux memoires bipolaires a isolement lateral par oxyde
US4231056A (en) * 1978-10-20 1980-10-28 Harris Corporation Moat resistor ram cell
US4277882A (en) * 1978-12-04 1981-07-14 Fairchild Camera And Instrument Corporation Method of producing a metal-semiconductor field-effect transistor
JPS5799771A (en) * 1980-12-12 1982-06-21 Hitachi Ltd Semiconductor device
US4624046A (en) * 1982-01-04 1986-11-25 Fairchild Camera & Instrument Corp. Oxide isolation process for standard RAM/PROM and lateral PNP cell RAM
US4961102A (en) * 1982-01-04 1990-10-02 Shideler Jay A Junction programmable vertical transistor with high performance transistor
JPS58199537A (ja) * 1982-05-14 1983-11-19 Matsushita Electric Ind Co Ltd 高抵抗半導体層の製造方法
US4549927A (en) * 1984-06-29 1985-10-29 International Business Machines Corporation Method of selectively exposing the sidewalls of a trench and its use to the forming of a metal silicide substrate contact for dielectric filled deep trench isolated devices
US5023200A (en) * 1988-11-22 1991-06-11 The United States Of America As Represented By The United States Department Of Energy Formation of multiple levels of porous silicon for buried insulators and conductors in silicon device technologies

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2098321A1 (enFirst) * 1970-07-10 1972-03-10 Philips Nv
FR2132347A1 (enFirst) * 1971-04-03 1972-11-17 Philips Nv
FR2290037A1 (fr) * 1974-10-29 1976-05-28 Fairchild Camera Instr Co Procede combine pour fabriquer des transistors bipolaires verticaux isoles par oxyde et des transistors bipolaires lateraux complementaires isoles par oxyde et structures ainsi fabriquees

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3648125A (en) * 1971-02-02 1972-03-07 Fairchild Camera Instr Co Method of fabricating integrated circuits with oxidized isolation and the resulting structure
JPS4975280A (enFirst) * 1972-11-24 1974-07-19
US3975752A (en) * 1973-04-04 1976-08-17 Harris Corporation Junction field effect transistor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2098321A1 (enFirst) * 1970-07-10 1972-03-10 Philips Nv
FR2132347A1 (enFirst) * 1971-04-03 1972-11-17 Philips Nv
FR2290037A1 (fr) * 1974-10-29 1976-05-28 Fairchild Camera Instr Co Procede combine pour fabriquer des transistors bipolaires verticaux isoles par oxyde et des transistors bipolaires lateraux complementaires isoles par oxyde et structures ainsi fabriquees

Also Published As

Publication number Publication date
JPS6224944B2 (enFirst) 1987-05-30
DE2738049A1 (de) 1978-03-09
CA1085064A (en) 1980-09-02
FR2363889B1 (enFirst) 1983-01-14
US4149177A (en) 1979-04-10
JPS5331984A (en) 1978-03-25
GB1577420A (en) 1980-10-22

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Legal Events

Date Code Title Description
ST Notification of lapse