FR2361630A1 - Procede de mesure interferometrique, relative a la surface - Google Patents

Procede de mesure interferometrique, relative a la surface

Info

Publication number
FR2361630A1
FR2361630A1 FR7720043A FR7720043A FR2361630A1 FR 2361630 A1 FR2361630 A1 FR 2361630A1 FR 7720043 A FR7720043 A FR 7720043A FR 7720043 A FR7720043 A FR 7720043A FR 2361630 A1 FR2361630 A1 FR 2361630A1
Authority
FR
France
Prior art keywords
grating
interferometric measurement
measurement process
process relating
diffraction order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7720043A
Other languages
English (en)
Other versions
FR2361630B1 (fr
Inventor
Walter Jaerisch
Guenter Makosch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2361630A1 publication Critical patent/FR2361630A1/fr
Application granted granted Critical
Publication of FR2361630B1 publication Critical patent/FR2361630B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Procédé de mesure interférométrique relatif à la surface. Un faisceau 5 de lumière cohérente collimatée est dirigée sur un réseau 9 en partie directement 7 et en partie par réflexion 8 sur la surface de l'objet à mesurer 10. Les angles d'incidence et l'angle entre le réseau et la surface de l'objet sont choisis tels que chacun des faisceaux incidents sur le réseau a un ordre de diffraction parallèle à l'ordre de diffraction de l'autre faisceau. Le dispositif utilise comme plan de référence les fronts des ondes lumineuses. La distance entre l'objet et le réseau peut être grande de 5 à 50 cm. Peut être utilisé pour mesurer des éléments de surface même substantiellement non réfléchissante.
FR7720043A 1976-08-13 1977-06-21 Procede de mesure interferometrique, relative a la surface Granted FR2361630A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762636498 DE2636498C2 (de) 1976-08-13 1976-08-13 Verfahren zur interferometrischen Oberflächenmessiing

Publications (2)

Publication Number Publication Date
FR2361630A1 true FR2361630A1 (fr) 1978-03-10
FR2361630B1 FR2361630B1 (fr) 1980-12-19

Family

ID=5985380

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7720043A Granted FR2361630A1 (fr) 1976-08-13 1977-06-21 Procede de mesure interferometrique, relative a la surface

Country Status (4)

Country Link
JP (1) JPS5322763A (fr)
DE (1) DE2636498C2 (fr)
FR (1) FR2361630A1 (fr)
GB (1) GB1538811A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2413632A1 (fr) * 1977-12-27 1979-07-27 Ibm Procede interferometrique a resolution 1/4 servant notamment pour la fabrication des circuits integres

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2946493A1 (de) 1979-11-17 1981-05-21 Wolfgang Prof. Dipl.-Phys. Dr. Dreybrodt Verfahren und vorrichtung zur automatischen und beruehrungslosen qualitaetsbewertung optisch reflektierender oberflaechen
EP0066030B1 (fr) * 1981-05-29 1986-08-27 Ibm Deutschland Gmbh Dispositif et procédé pour la mesure interférométrique de planéité
DE3173451D1 (en) * 1981-09-17 1986-02-20 Ibm Deutschland Method for interferometric surface topography
DE3174649D1 (en) * 1981-11-25 1986-06-19 Ibm Deutschland Phase balancing of an optical wave front
DE4318739C2 (de) * 1993-06-05 1997-07-03 Lamtech Lasermestechnik Gmbh Interferometer und Verfahren zur Messung der Topographie von Prüflingsoberflächen
DE10303364A1 (de) * 2003-01-29 2004-08-05 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Bestimmung des Höhenprofils eines Objekts

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4962160A (fr) * 1972-10-16 1974-06-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2413632A1 (fr) * 1977-12-27 1979-07-27 Ibm Procede interferometrique a resolution 1/4 servant notamment pour la fabrication des circuits integres

Also Published As

Publication number Publication date
JPS5322763A (en) 1978-03-02
FR2361630B1 (fr) 1980-12-19
GB1538811A (en) 1979-01-24
JPS616921B2 (fr) 1986-03-03
DE2636498B1 (de) 1977-05-12
DE2636498C2 (de) 1979-02-01

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Legal Events

Date Code Title Description
ST Notification of lapse