GB1538811A - Method for interferometric surface flatness investigation - Google Patents

Method for interferometric surface flatness investigation

Info

Publication number
GB1538811A
GB1538811A GB3355377A GB3355377A GB1538811A GB 1538811 A GB1538811 A GB 1538811A GB 3355377 A GB3355377 A GB 3355377A GB 3355377 A GB3355377 A GB 3355377A GB 1538811 A GB1538811 A GB 1538811A
Authority
GB
United Kingdom
Prior art keywords
investigation
surface flatness
interferometric surface
interferometric
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3355377A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1538811A publication Critical patent/GB1538811A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB3355377A 1976-08-13 1977-08-10 Method for interferometric surface flatness investigation Expired GB1538811A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762636498 DE2636498C2 (de) 1976-08-13 1976-08-13 Verfahren zur interferometrischen Oberflächenmessiing

Publications (1)

Publication Number Publication Date
GB1538811A true GB1538811A (en) 1979-01-24

Family

ID=5985380

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3355377A Expired GB1538811A (en) 1976-08-13 1977-08-10 Method for interferometric surface flatness investigation

Country Status (4)

Country Link
JP (1) JPS5322763A (fr)
DE (1) DE2636498C2 (fr)
FR (1) FR2361630A1 (fr)
GB (1) GB1538811A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2758149C2 (de) * 1977-12-27 1979-10-04 Ibm Deutschland Gmbh, 7000 Stuttgart Interferometrisches Verfahren mit λ /4-Auflösung zur Abstands-, Dicken- und/oder Ebenheitsmessung
DE2946493A1 (de) 1979-11-17 1981-05-21 Wolfgang Prof. Dipl.-Phys. Dr. Dreybrodt Verfahren und vorrichtung zur automatischen und beruehrungslosen qualitaetsbewertung optisch reflektierender oberflaechen
EP0066030B1 (fr) * 1981-05-29 1986-08-27 Ibm Deutschland Gmbh Dispositif et procédé pour la mesure interférométrique de planéité
DE3173451D1 (en) * 1981-09-17 1986-02-20 Ibm Deutschland Method for interferometric surface topography
DE3174649D1 (en) * 1981-11-25 1986-06-19 Ibm Deutschland Phase balancing of an optical wave front
DE4318739C2 (de) * 1993-06-05 1997-07-03 Lamtech Lasermestechnik Gmbh Interferometer und Verfahren zur Messung der Topographie von Prüflingsoberflächen
DE10303364A1 (de) * 2003-01-29 2004-08-05 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Bestimmung des Höhenprofils eines Objekts

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4962160A (fr) * 1972-10-16 1974-06-17

Also Published As

Publication number Publication date
JPS5322763A (en) 1978-03-02
FR2361630B1 (fr) 1980-12-19
FR2361630A1 (fr) 1978-03-10
JPS616921B2 (fr) 1986-03-03
DE2636498B1 (de) 1977-05-12
DE2636498C2 (de) 1979-02-01

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930810